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    Photoemission contaminant detector
    21.
    发明专利
    Photoemission contaminant detector 未知

    公开(公告)号：GB2253051B

    公开(公告)日：1994-10-19

    申请号：GB9103563

    申请日：1991-02-20

    Applicant: TENCOR INSTRUMENTS

    Inventor： STOKOWSKI STANLEY ,  WOLZE DAVID ,  NEUKERMANS ARMAND P

    IPC: G01B11/06 ,  G01N23/227 ,  G01B15/02

    Abstract: Methods for determining the presence or absence of, and the thickness or other spacial extent of, a contaminant layer at each of a plurality of two or more sites on the surface of an electrically conductive material such as a semiconductor, a metal or a metal silicide. The invention uses a change in photoemission current from an illuminated spot on the surface to determine the presence and extent of a contaminant layer at the illuminated site. Compensation is provided for the effects of capacitive current and photovoltaic current. The invention provides a pattern of illumination sites on the conductor surface that can, if desired, cover all points on the surface.

    ACOUSTIC DISTANCE OR THICKNESS MEASUTING DEVICE
    22.
    发明专利
    ACOUSTIC DISTANCE OR THICKNESS MEASUTING DEVICE 未知

    公开(公告)号：GB2020808B

    公开(公告)日：1982-12-22

    申请号：GB7914935

    申请日：1979-04-30

    Applicant: TENCOR INSTRUMENTS

    IPC: G01R27/02 ,  G01R31/26 ,  G01S15/32 ,  G01S9/68

    Abstract: Apparatus for measuring distance between a gauge head orifice, and the front planar surface of an object by sensing acoustic pressure near the gauge head orifice. The acoustic pressure is initially generated by an audio oscillator activating a speaker which emits acoustic waves through a first orifice. Acoustic pressure is sensed through a second orifice, proximate to the first, and the pressure is converted to an electrical signal which is processed to yield a distance signal for a display. Two similar distance gauges spaced apart on opposite sides of a planar member at a known distance are used to compute the thickness of the planar member.

    Single laser bright field and dark field system for detecting anomalies of a sample
    24.
    发明专利
    Single laser bright field and dark field system for detecting anomalies of a sample 未知

    公开(公告)号：AU2213297A

    公开(公告)日：1997-09-22

    申请号：AU2213297

    申请日：1997-03-05

    Applicant: TENCOR INSTRUMENTS

    Inventor： VAEZ-IRAVANI MEHDI

    IPC: G01N21/88 ,  G01N21/95 ,  G01N21/956

    Abstract: A single laser is used to provide light for both dark and bright field detection. The laser beam is split into two beams by a Wollaston prism and both beams are directed towards a sample to be inspected to illuminate two areas of the sample. The light reflected by or transmitted through the sample at the two spots is then combined by the same or a different Wollaston prism and the phase shift caused by any anomaly of a sample is detected as a phase shift between the two beams by a bright field detector. Light scattered by the sample at the two spots is detected by a dark field detector. A halfwave plate is used to orient the polarization plane of light from the laser incident on the Wollaston prism so that one of the two beams incident on the sample has a much higher intensity than the other and so that the sensitivity and the detection operation of dark field is not altered by the presence of two illuminated spots on the sample. A transparent dielectric at a suitable angle to the incident beam and the reflected or transmitted beam may be used to enhance bright field detection.

    PHOTOEMISSION CONTAMINANT DETECTOR
    27.
    发明专利
    PHOTOEMISSION CONTAMINANT DETECTOR 未知

    公开(公告)号：GB9103563D0

    公开(公告)日：1991-04-10

    申请号：GB9103563

    申请日：1991-02-20

    Applicant: TENCOR INSTRUMENTS

    IPC: G01B11/06 ,  G01N23/227

    Abstract: Methods for determining the presence or absence of, and the thickness or other spacial extent of, a contaminant layer at each of a plurality of two or more sites on the surface of an electrically conductive material such as a semiconductor, a metal or a metal silicide. The invention uses a change in photoemission current from an illuminated spot on the surface to determine the presence and extent of a contaminant layer at the illuminated site. Compensation is provided for the effects of capacitive current and photovoltaic current. The invention provides a pattern of illumination sites on the conductor surface that can, if desired, cover all points on the surface.

    28.
    发明专利
    未知

    公开(公告)号：DE69734413T2

    公开(公告)日：2006-07-27

    申请号：DE69734413

    申请日：1997-02-07

    Applicant: TENCOR INSTRUMENTS

    Inventor： SAMSAVAR AMIN ,  WHEELER WILLIAM R ,  EATON STEVEN G ,  ZHUANG JIAN-PING

    IPC: G01B7/34 ,  G01Q70/06 ,  G01B3/00 ,  G01B5/28 ,  G01B21/30 ,  G01N27/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/00 ,  G01Q90/00 ,  G12B5/00

    Abstract: A dual stage scanning instrument includes a sensor (60) for sensing a parameter of a sample (90) and coarse and fine stages (80,70) for causing relative motion between the sensor (60) and the sample (90). The coarse stage (80) has a resolution of about 1 micrometer and the fine stage (70) has a resolution of 1 nanometer or better. The sensor (60) is used to sense the parameter when both stages cause relative motion between the sensor assembly (60) and the sample (90). The sensor (60) may be used to sense height variations of the sample surface as well as thermal variations, electrostatic, magnetic, light reflectivity or light transmission parameters at the same time when height variation is sensed. By performing a long scan at a coarser resolution and short scans at high resolution using the same probe tips at fixed relative positions, data obtained from the long and short scans can be correlated accurately.

    ACOUSTIC DISTANCE OR THICKNESS MEASUTING DEVICE
    30.
    发明专利
    ACOUSTIC DISTANCE OR THICKNESS MEASUTING DEVICE 未知

    公开(公告)号：GB2020808A

    公开(公告)日：1979-11-21

    申请号：GB7914935

    申请日：1979-04-30

    Applicant: TENCOR INSTRUMENTS

    IPC: G01R27/02 ,  G01R31/26 ,  G01S15/32 ,  G01S9/68

    Abstract: Apparatus for measuring distance between a gauge head orifice, and the front planar surface of an object by sensing acoustic pressure near the gauge head orifice. The acoustic pressure is initially generated by an audio oscillator activating a speaker which emits acoustic waves through a first orifice. Acoustic pressure is sensed through a second orifice, proximate to the first, and the pressure is converted to an electrical signal which is processed to yield a distance signal for a display. Two similar distance gauges spaced apart on opposite sides of a planar member at a known distance are used to compute the thickness of the planar member.

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