Abstract:
A process for manufacturing phase change memory cells includes the step of forming a heater element (25a) in a semiconductor wafer (10) and a storage region (31a) of a phase change material on and in contact with the heater element (25a). In order to form the heater element (25a) and the phase change storage region (31a) a heater structure is first formed and a phase change layer (31) is deposited on and in contact with the heater structure. Then, the phase change layer (31) and the heater structure are defined by subsequent self-aligned etch steps.
Abstract:
Described herein is a fuse device (1) having a fuse element (2) provided with a first terminal (10) and a second terminal (16) and an electrically breakable region (15a), which is arranged between the first terminal (10) and the second terminal (16) and is configured to undergo breaking as a result of the supply of a programming electrical quantity, thus electrically separating the first terminal (10) from the second terminal (16). The electrically breakable region (15a) is of a phase-change material, in particular a calcogenic material, for example GST.
Abstract:
A method and apparatus for programming a phase change memory cell (2) is disclosed. A phase change memory cell (2) includes a memory element (10) of a phase change material having a first state ("11"), in which the phase change material is crystalline and has a minimum resistance level, a second state ("00") in which the phase change material is amorphous and has a maximum resistance level, and a plurality of intermediate states with resistance levels there between. The method includes using programming pulses to program the phase change memory cell (2) in either the set, reset, or one of the intermediate states. To program in the intermediate states, a programming pulse creates a crystalline percolation path having an average diameter (D) through amorphous phase change material and a second programming pulse modifies the diameter (D) of the crystalline percolation path to program the phase change memory cell to the proper current level.
Abstract:
A vertical MOSFET transistor, formed in a body (13) of semiconductor material having a surface and housing a buried conductive region (19) of a first conductivity type; a channel region (29) of a second conductivity type, arranged on top of the buried conductive region; a surface conductive region (26, 35c) of the first conductivity type, arranged on top of the channel region (29) and the buried conductive region (19); a gate insulation region (22), extending at the sides of and contiguous to the channel region (29); and a gate region (23, 35d) extending at the sides of and contiguous to the gate insulation region (22).
Abstract:
Phase-change memory device, wherein memory cells (2) are arranged in rows (7) and columns (6) and form a memory array. The memory cells (2) are formed by a selection device (4) of an MOS type and by a phase-change region (3) connected to the selection device. The selection device (4) is formed by a first conductive region (32) and a second conductive region (33), which extend in a substrate (31) of semiconductor material and are spaced from one another via a channel region (34), and by an isolated control region (36) connected to a respective row (7) and overlying the channel region (34). The first conductive region (32) is connected to a connection line (42) extending parallel to the rows, the second conductive region (33) is connected to the phase-change region (46), and the phase-change region is connected to a respective column (6). The first connection line (42) is a metal interconnection line and is connected to the first conductive region (32) via a source-contact region (40) made as point contact and distinct from the first connection line (42).
Abstract:
A memory device is proposed. The memory device includes a plurality of memory cells (P,S), wherein each memory cell includes a storage element (P) and a selector (S) for selecting the corresponding storage element during a reading operation or a programming operation. The selector includes a unipolar element (M) and a bipolar element (D;B). The memory device further includes control means (110s) for prevalently enabling the unipolar element during the reading operation or the bipolar element during the programming operation.
Abstract:
A process wherein an insulating region (13) is formed in a body at least around an array portion (51) of a semiconductor body (10); a gate region (16) of semiconductor material is formed on top of a circuitry portion (51) of the semiconductor body (10); a first silicide protection mask (52) is formed on top of the array portion; the gate region (16) and the active areas (43) of the circuitry portion (51) are silicided and the first silicide protection mask (52) is removed. The first silicide protection mask (52) is of polysilicon and is formed simultaneously with the gate region (16). A second silicide protection mask (53) of dielectric material covering the first silicide protection mask (52) is formed before silicidation of the gate region (16). The second silicide protection mask (53) is formed simultaneously with spacers (41) formed laterally to the gate region (16).