-
公开(公告)号:EP2707953A4
公开(公告)日:2014-12-03
申请号:EP12786090
申请日:2012-05-11
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT
Inventor: PRUNNILA MIKA , JAAKKOLA ANTTI , PENSALA TUOMAS
CPC classification number: B81B3/0072 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81C2201/0164 , B81C2201/0167 , B81C2201/0177 , G06F17/5045 , H03H9/02448 , H03H9/2447 , H03H2009/2442
-
22.MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF 有权
Title translation: 阵列的微观力学谐振器及其制造方法公开(公告)号:EP2603975A4
公开(公告)日:2013-08-21
申请号:EP11816146
申请日:2011-08-11
Applicant: TEKNOLOGIAN TUTKIMUSKESKUS VTT
Inventor: JAAKKOLA ANTTI , PENSALA TUOMAS , KIIHAMAEKI JYRKI
CPC classification number: H03H3/0072 , H03H3/0076 , H03H9/02448 , H03H9/2463 , H03H9/505 , H03H2009/02385 , H03H2009/02503 , H03H2009/2442
-