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    ION SOURCE
    21.
    发明申请
    ION SOURCE 审中-公开
    离子源

    公开(公告)号：WO2013019129A2

    公开(公告)日：2013-02-07

    申请号：PCT/NZ2012000137

    申请日：2012-08-03

    Applicant: INST GEOLOG NUCLEAR SCIENCES ,  FUTTER RICHARD JOHN ,  MARKWITZ ANDREAS

    Inventor： FUTTER RICHARD JOHN ,  MARKWITZ ANDREAS

    CPC classification number: H01J37/08 ,  C23C14/046 ,  C23C14/48 ,  C23C14/562 ,  H01J3/04 ,  H01J27/14 ,  H01J37/3171 ,  H01J2237/002 ,  H01J2237/061

    Abstract: The invention provides an ion source comprising first and second cathode pole pieces spaced apart from one another to form a cavity therebetween, an edge of the first cathode pole piece being spaced apart from an edge of the second cathode pole piece to define an elongate cathode gap between the respective edges of the pole pieces, the elongate cathode gap having a longitudinal axis; at least one magnet arranged for magnetising the first and second cathode pole pieces with opposite magnetic polarities; an elongate anode located in the cavity, the anode being spaced apart from the first and second cathode pole pieces and having a longitudinal axis, the longitudinal axis of the elongate anode and the longitudinal axis of the elongate cathode gap substantially coplanar; a first electrical connection which extends from outside the cavity to the anode; and a gas feed conduit which extends from outside the cavity to inside the cavity for introducing a gas into the cavity.

    Abstract translation: 本发明提供了一种离子源，其包括彼此间隔开以在其间形成空腔的第一和第二阴极极片，第一阴极极片的边缘与第二阴极极片的边缘间隔开以限定细长的阴极间隙 在极片的相应边缘之间，细长阴极间隙具有纵向轴线; 至少一个磁体布置成用于以相反的磁极性磁化所述第一和第二阴极极片; 位于空腔中的细长阳极，阳极与第一和第二阴极极片间隔开并且具有纵向轴线，细长阳极的纵向轴线和细长阴极间隙的纵向轴线基本上共面; 从空腔外部延伸到阳极的第一电连接; 以及从空腔外部延伸到腔体内部的气体供给导管，用于将气体引入空腔。

    ION SOURCE WITH SUBSTANTIALLY PLANAR DESIGN
    23.
    发明申请
    ION SOURCE WITH SUBSTANTIALLY PLANAR DESIGN 审中-公开
    离子源与大规模平面设计

    公开(公告)号：WO2006055296A2

    公开(公告)日：2006-05-26

    申请号：PCT/US2005/040159

    申请日：2005-11-07

    Applicant: GUARDIAN INDUSTRIES CORP. ,  LUTEN, Henry, A. ,  VEERASAMY, Vijayen, S.

    Inventor： LUTEN, Henry, A. ,  VEERASAMY, Vijayen, S.

    IPC: H01J27/14 ,  H01J37/08 ,  H01J3/04

    CPC classification number: H01J37/08 ,  H01J3/04 ,  H01J27/143

    Abstract: In certain example embodiments of this invention, there is provide an ion source including an anode and a cathode. In certain example embodiments, the cathode does not overhang over the anode, or vice versa. Since no, or fewer, areas of overhang are provided between the anode and cathode, there is less undesirable build-up on the anode and/or cathode during operation of the ion source so that the source can run more efficiently. Moreover, in certain example embodiments, an insulator such as a ceramic or the like is provided between the anode and cathode.

    Abstract translation: 在本发明的某些示例实施例中，提供了包括阳极和阴极的离子源。 在某些示例性实施例中，阴极不会悬在阳极上，反之亦然。 由于在阳极和阴极之间没有或更少的突出区域被提供，所以在离子源操作期间在阳极和/或阴极上的不希望的积聚较少，使得源可以更有效地运行。 此外，在某些示例性实施例中，在阳极和阴极之间设置诸如陶瓷等的绝缘体。

    ION SOURCE
    27.
    发明公开
    ION SOURCE 审中-公开
    离子源

    公开(公告)号：EP2739764A2

    公开(公告)日：2014-06-11

    申请号：EP12819519.5

    申请日：2012-08-03

    Applicant: Institute Of Geological And Nuclear Sciences Limited

    Inventor： FUTTER, Richard John ,  MARKWITZ, Andreas

    IPC: C23C14/48 ,  C23C14/00 ,  H01J1/88

    CPC classification number: H01J37/08 ,  C23C14/046 ,  C23C14/48 ,  C23C14/562 ,  H01J3/04 ,  H01J27/14 ,  H01J37/3171 ,  H01J2237/002 ,  H01J2237/061

    Abstract: The invention provides an ion source comprising first and second cathode pole pieces spaced apart from one another to form a cavity therebetween, an edge of the first cathode pole piece being spaced apart from an edge of the second cathode pole piece to define an elongate cathode gap between the respective edges of the pole pieces, the elongate cathode gap having a longitudinal axis; at least one magnet arranged for magnetising the first and second cathode pole pieces with opposite magnetic polarities; an elongate anode located in the cavity, the anode being spaced apart from the first and second cathode pole pieces and having a longitudinal axis, the longitudinal axis of the elongate anode and the longitudinal axis of the elongate cathode gap substantially coplanar; a first electrical connection which extends from outside the cavity to the anode; and a gas feed conduit which extends from outside the cavity to inside the cavity for introducing a gas into the cavity.

    ION SOURCE WITH SUBSTANTIALLY PLANAR DESIGN
    28.
    发明公开
    ION SOURCE WITH SUBSTANTIALLY PLANAR DESIGN 有权
    基本上平面结构离子源

    公开(公告)号：EP1825491A2

    公开(公告)日：2007-08-29

    申请号：EP05818170.2

    申请日：2005-11-07

    Applicant: Guardian, Industries Corp.

    Inventor： LUTEN, Henry, A. ,  VEERSASAMY, Vijayen, S.

    IPC: H01J27/14

    CPC classification number: H01J37/08 ,  H01J3/04 ,  H01J27/143

    Abstract: In certain example embodiments of this invention, there is provide an ion source including an anode (25) and a cathode (5). In certain example embodiments, the cathode does not overhang over the anode, or vice versa. Since no, or fewer, areas of overhang are provided between the anode and cathode, there is less undesirable build-up on the anode and/or cathode during operation of the ion source so that the source can run more efficiently. Moreover, in certain example embodiments, an insulator (35) such as a ceramic or the like is provided between the anode and cathode.

    Teilchenquelle
    29.
    发明公开
    Teilchenquelle 审中-公开

    公开(公告)号：EP1258903A3

    公开(公告)日：2006-12-06

    申请号：EP01710048.8

    申请日：2001-09-15

    Applicant: Roentdek Handels GmbH

    Inventor： Spielberger, Lutz Dr. ,  Bräuning-Demian, Angela Dr. ,  Penache, Maria Christina ,  Schmidt-Böcking, Horts Dr. ,  Schösser, Sven ,  Jahnke, Till ,  Hohn, Oliver ,  Mergel, Volker Dr.

    IPC: H01J27/02

    CPC classification number: H01J49/10 ,  H01J3/04 ,  H01J27/022 ,  H01J37/08

    Abstract: Die Erfindung betrifft eine Teilchenquele, insbesondere eine Ionenquelle (99) für die Erzeugung angeregter Teilchen in gasförmigen Medien. Eine dielektrische, z.B. Kaptonfolie (11) ist beidseitig elektrisch leitfähig beschichtet (12, 13) und es wird zwischen den beiden Beschichtungen eine Spannung, vorzugsweise gepulst, angelegt. Durch die Spannung wird im Gasdurchfluss eine Gasentladung (14) gezündet. Durch eine Druckdifferenz zwischen den beiden Seiten (21, 22) der Folie expandiert das Gas von der Hochdruckseite auf die Niederdruckseite, vorzugsweise in einer Ultraschallexpansion (15), wodurch ein gerichteter kalter Strahl (32) aus angeregten Teilchen oder Ionen erzeugt wird.

    Abstract translation: 本发明涉及一种颗粒源，特别是用于在气体介质中产生激发颗粒的离子源。 电介质例如Kapton箔在两侧电导电涂覆，并且在两个涂层之间施加优选脉冲的电压。 气体通过气体通过电压点燃气体放电。 由于箔的两侧之间的压力差，气体从高压侧膨胀到低压侧，优选地在超声波膨胀中，由此产生被引导的冷激发的粒子或离子束。

    Teilchenquelle
    30.
    发明公开
    Teilchenquelle 审中-公开
    粒子

    公开(公告)号：EP1258903A2

    公开(公告)日：2002-11-20

    申请号：EP01710048.8

    申请日：2001-09-15

    Applicant: Roentdek Handels GmbH

    Inventor： Spielberger, Lutz Dr. ,  Bräuning-Demian, Angela Dr. ,  Penache, Maria Christina ,  Schmidt-Böcking, Horts Dr. ,  Schösser, Sven ,  Jahnke, Till ,  Hohn, Oliver ,  Mergel, Volker Dr.

    IPC: H01J27/02

    CPC classification number: H01J49/10 ,  H01J3/04 ,  H01J27/022 ,  H01J37/08

    Abstract: Die Erfindung betrifft eine Teilchenquele, insbesondere eine Ionenquelle (99) für die Erzeugung angeregter Teilchen in gasförmigen Medien. Eine dielektrische, z.B. Kaptonfolie (11) ist beidseitig elektrisch leitfähig beschichtet (12, 13) und es wird zwischen den beiden Beschichtungen eine Spannung, vorzugsweise gepulst, angelegt. Durch die Spannung wird im Gasdurchfluss eine Gasentladung (14) gezündet. Durch eine Druckdifferenz zwischen den beiden Seiten (21, 22) der Folie expandiert das Gas von der Hochdruckseite auf die Niederdruckseite, vorzugsweise in einer Ultraschallexpansion (15), wodurch ein gerichteter kalter Strahl (32) aus angeregten Teilchen oder Ionen erzeugt wird.

    Abstract translation: 本发明涉及一种Teilchenquele，特别是用于在气体介质的受激粒子的产生的离子源（99）。 一种电介质，例如 在两侧上的导电涂层（12，13）和卡普顿薄膜（11）是两个涂层，电压，优选的脉冲创建之间。 由电压，气体放电（14）在气流被点燃。 通过该膜的两个侧面（21,22）之间的压力差从高压侧到低压侧膨胀气体，优选在超声膨胀（15），由此从激发粒子或离子产生的定向冷射流（32）。

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