公开(公告)号：JP2006343334A

公开(公告)日：2006-12-21

申请号：JP2006159061

申请日：2006-06-07

Applicant: CASCADE MICROTECH INC

Inventor： CAMPBELL RICHARD L ,  ANDREWS MICHAEL ,  BUI LYNH

IPC: G01R1/067 ,  G01R31/26 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a probe capable of reducing a stray electromagnetic field in the vicinity of a probe tip part to reduce a crosstalk with a neighboring device, capable of making a sufficient current flow, and allowing probing at a high-frequency. SOLUTION: This high-frequency probe has a contact point end part positioned within an end part circumferential edge of a coaxial cable, and shielded by a grounding conductor of the coaxial cable. COPYRIGHT: (C)2007,JPO&INPIT

公开(公告)号：JP2001068515A

公开(公告)日：2001-03-16

申请号：JP2000197550

申请日：2000-06-30

Applicant: CASCADE MICROTECH INC

Inventor： COWAN CLARENCE E ,  TERVO PAUL A ,  DUNKLEE JOHN L

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/18 ,  G01R31/28 ,  H01L21/66 ,  H01L35/00 ,  H01L35/32

Abstract: PROBLEM TO BE SOLVED: To reduce noises caused by a capacitance current and affecting test and measurement to a value less than an allowable value by shielding the capacitance current produced by a thermal unit for changing the temperature of a chuck for supporting a device, in a probe station for testing and measuring an integrated circuit device. SOLUTION: This thermal chuck includes a chuck 4 for supporting a device during testing, a thermal unit for changing the temperature of the chuck 4, and a conductive member which is connected to the thermal unit as a capacitance but is not in direct electrical contact therewith. The conductive member is connected electrically to a controller 18 for supplying electricity to the thermal unit and provides a conductive passage for taking almost all the capacitance current generated by the operation of the thermal unit and flowing the current to the controller 18. In order to take the capacitance current generated by the conductive member and to flow the current to a ground outside the closed box 2, the expansion portion of the environment closed box 2 of the probe station is coupled capacitatively to the conductive member.

公开(公告)号：JPH1140627A

公开(公告)日：1999-02-12

申请号：JP15784098

申请日：1998-06-05

Applicant: CASCADE MICROTECH INC

Inventor： PETERS RON A

IPC: G01R31/26 ,  G01R1/06 ,  G01R1/18 ,  G01R31/28 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a probe station which can be used for both the manual and completely automated uses. SOLUTION: This probe station 10 is provided with a chuck device 14 having a supporting face 42a extended to a side part for supporting a test device, and an environment control surrounding body 52 substantially surrounding this supporting face 42a during the probing of the test device. The chuck device 14 can be moved to a horizontal direction to the environment control surrounding body 52. The environment control surrounding body 52 is provided with a conductive flexible wall assembly connected with the chuck device 14, and this wall assembly is provided with flexibly extensible first and second wall elements 58a and 58b. Each wall element is made independently extensible along mutually substantially right-angled flexible axial lines, and the one wall element is made flexible along the flexible axial line, while the other wall element is made movable to a horizontal direction to the flexible axial line.

公开(公告)号：JPH08288342A

公开(公告)日：1996-11-01

申请号：JP8365996

申请日：1996-04-05

Applicant: CASCADE MICROTECH INC

Inventor： ERITSUKU DABURIYUU SUTORAIDO ,  JIERII BII SHIYAPATSUCHIYAA ,  KEI RIIDO GURIISON ,  DEIRU II KAARUTON

IPC: G01R31/26 ,  G01R1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  G01R35/00 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide an interconnect assembly which is used for evaluating the signal condition in a probe measuring network. SOLUTION: This system is provided with a base 62, individual internal probe areas 98, individual external probe areas 100, a reference connecting part 110, and a high frequency transmission structure part 106 which can connects a planar probe are with the reference connecting part 110 in such a manner that a high frequency signal can be uniformly transmitted when the tip position of a device measuring probe in a network on a probe area changes. In the evaluation of a signal channel of a probe measuring network, a reference unit is connected with the reference connecting part, and each device measuring probe tip corresponding to an aimed signal channel is sequentially positioned on the internal probe area. Since the transmission structure part transmits a signal uniformly, the relative condition of a signal inputted in or outputted from each of the probe tip almost coincide with the condition of a signal measured or supplied by the reference unit.

公开(公告)号：JPH06160236A

公开(公告)日：1994-06-07

申请号：JP17557092

申请日：1992-07-02

Applicant: CASCADE MICROTECH INC

Inventor： SUKOTSUTO ETSUCHI RAMUBAUGU

IPC: G01M11/00 ,  G02B6/00 ,  G02B6/36

Abstract: PURPOSE: To provide an optical fiber probe which can be easily replaced and is provided with an optical fiber of such length as to minimize optical transmission effect in multi-mode and in which the damage caused by excessive advancement of a probe end of the optical fiber at a test device or a fiber probe end can be prevented. CONSTITUTION: A probe main body 10 comprising a tip end 12 which selectively approaches an photo-electronic test device and a thin and long optical fiber 16 which, extending in the longitudinal direction along the probe main boDy 10, is projected, from the tip end, ARE provided. In addition, the probe main body 10 is provided with a means which generously guides the optical fiber 16 toward a probe tip end 16a and generously holes the optical fiber 16 at a specified position of the probe tip end 16a, or, a channel 20 bent downward, is provided, and a thin and long part of the optical fiber is so configured that it can move in longitudinal direction against the probe tip end and the probe main body.

公开(公告)号：JPH0653297A

公开(公告)日：1994-02-25

申请号：JP12926693

申请日：1993-05-31

Applicant: CASCADE MICROTECH INC

Inventor： UOOREN KEI HAAUTSUDO ,  MAACHIN JIEI KOKUSHII ,  POORU EI TAABO

IPC: H01L21/66 ,  H01L21/68 ,  H01L21/683

Abstract: PURPOSE: To provide a wafer probe station which is equipped with a compact and unified environment control enclosure which realize EMI shield, practical air-tightness for dry purge gas at the time of low temperature test, and dark environment. CONSTITUTION: This probe station is equipped with a practically flat plane 82 for holding a testing equipment, a holder 28 for a probe 30 coming into contact with the testing equipment, and a pair of positioning mechanism 16, 24 which relatively reciprocate a retaining plane and the holder mutually independently. By the positioning mechanisms, the retaining plane and the holder are reciprocated relatively. In order to maintain the sealing property around the retaining plane, enclosures 42, 44, 46, 48, 72, 74, 76, 78, etc., surrounding the retaining plane are installed. Each of the positioning mechanism is, at least partly, arranged outside the enclosures.

公开(公告)号：JPH05198654A

公开(公告)日：1993-08-06

申请号：JP18100092

申请日：1992-07-08

Applicant: CASCADE MICROTECH INC

Inventor： SUKOTSUTO EICHI RANBAUFU ,  ANDORIYUU SHII DABUIDOSON

IPC: G01R31/26 ,  G01R31/27 ,  H01L21/66 ,  H01L31/10

Abstract: PURPOSE: To accurately inspect a 2-terminal microwave device on a wafer, without using a special device or an attachment by measuring a characteristics of a microwave device with a diode assigned parallel to the microwave device in forward-direction bias state, etc. CONSTITUTION: With a wafer 10 comprising a microwave device 12b connected between a first contact point 13 on an upper side surface 14 and a ground surface 16 on a lower side surface prepared, diodes 12a and 12c assigned, side by side with the microwave device 12b are connected between the second contact point 13 on the upper side surface 14 and the ground surface 16, with a given sideward spacing between the first and second contact points 13 provided. In addition, a microwave probe 19 wherein, comprising a ground conductor 28 and a signal conductor 25, their sideward spacings agree with each other is prepared. An operation parameter which characterizes the microwave device 12b is measured through the signal conductor 25 and the ground conductor 28, with the diodes 12a and 12c in forward-direction bias, by applying a first voltage between a ground conductor 28 and the ground surface 16.

公开(公告)号：TWI650560B

公开(公告)日：2019-02-11

申请号：TW106132809

申请日：2017-09-25

Applicant: 美商加斯凱德微科技公司 ,  CASCADE MICROTECH, INC.

Inventor： 費席爾 格韋恩 尼爾 ,  FISHER, GAVIN NEIL ,  賽林格恩 湯瑪士 瑞恩爾 ,  THAERIGEN, THOMAS REINER ,  麥卡恩 彼得 ,  MCCANN, PETER ,  瓊斯 瑞德尼 ,  JONES, RODNEY ,  達克沃斯 寇比L ,  DUCKWORTH, KOBY L.

IPC: G01R1/067 ,  G01R1/38

公开(公告)号：TW201833563A

公开(公告)日：2018-09-16

申请号：TW106141634

申请日：2017-11-29

Applicant: 美商加斯凱德微科技公司 ,  CASCADE MICROTECH, INC.

Inventor： 巴克 丹尼爾 馬克 ,  BOCK, DANIEL MARK ,  可麗瑞 提姆 ,  CLEARY, TIM

IPC: G01R1/073 ,  G01R31/302

Abstract: 用於一受測裝置(DUT)的無線操作的晶圓上測試之接點引擎、探針頭組件、探針系統、以及相關的方法。一種接點引擎係包含一撓性的介電薄膜，其係具有一第一表面與一第二表面、以及複數個探針，其係藉由該撓性的介電薄膜所支承。該複數個探針係被定向以接觸在該DUT上的複數個接點位置。在該複數個探針中的每一個探針係包含一對應的探針尖端，其係從該撓性的介電薄膜的該第二表面突出，並且被配置以電性及實體地接觸該複數個接點位置的一對應的接點位置。該接點引擎進一步包含至少一藉由該撓性的介電薄膜所支承的薄膜天線。一種探針頭組件係包含該接點引擎。一種探針系統係包含該探針頭組件。相關的方法係包含利用該接點引擎的方法。

Abstract in simplified Chinese: 用于一受测设备(DUT)的无线操作的晶圆上测试之接点发动机、探针头组件、探针系统、以及相关的方法。一种接点发动机系包含一挠性的介电薄膜，其系具有一第一表面与一第二表面、以及复数个探针，其系借由该挠性的介电薄膜所支承。该复数个探针系被定向以接触在该DUT上的复数个接点位置。在该复数个探针中的每一个探针系包含一对应的探针尖端，其系从该挠性的介电薄膜的该第二表面突出，并且被配置以电性及实体地接触该复数个接点位置的一对应的接点位置。该接点发动机进一步包含至少一借由该挠性的介电薄膜所支承的薄膜天线。一种探针头组件系包含该接点发动机。一种探针系统系包含该探针头组件。相关的方法系包含利用该接点发动机的方法。

公开(公告)号：TWI623990B

公开(公告)日：2018-05-11

申请号：TW105137232

申请日：2016-11-15

Applicant: 加斯凱德微科技公司 ,  CASCADE MICROTECH, INC.

Inventor： 安德魯斯 彼得 杜格拉斯 ,  ANDREWS, PETER DOUGLAS ,  紐頓 大衛 麥寇 ,  NEWTON, DAVID MICHAEL ,  海斯 大衛 藍道爾 ,  HESS, DAVID RANDLE

IPC: H01L21/66 ,  G01R31/26 ,  G01R1/07