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公开(公告)号：KR1020080055491A
公开(公告)日：2008-06-19
申请号：KR1020060128884
申请日：2006-12-15
Applicant: 한국과학기술연구원
Abstract: A conductive nitride representing magnetic property in room temperature and a method for manufacturing the same are provided to improve the efficiency of a spin implantation by growing TiN to which a transition metal is added through ion implantation, sputtering, or MBE(Molecular Beam Epitaxy). A transition metal, such as Cr, Mn, Fe, Co, Ni, and Cu, is doped by 1 - 10 at% into a conductive nitride such as TiN, TaN, NbN, and ZrN. In case a voltage is applied, a current is linearly changed at a junction of TiN/GaN. This represents that a general ohmic contact is formed at an interface of a metal and a semiconductor instead of a Schottky barrier when an interface is formed between the conductive nitride and the semiconductor. Therefore, an electron moves smoothly through the TiN so that the loss of data, for example, the change of a spin state of the electron. The conductive nitride to which the transition metal is added increases the efficiency of a spin implantation.
Abstract translation: 提供表示室温下的磁性能的导电氮化物及其制造方法，用于通过生长通过离子注入，溅射或MBE（分子束外延）添加过渡金属的TiN来提高旋转注入的效率。 将诸如Cr，Mn，Fe，Co，Ni和Cu的过渡金属以1-10％的比例掺杂到诸如TiN，TaN，NbN和ZrN的导电氮化物中。 在施加电压的情况下，在TiN / GaN的结处电流线性变化。 这表示当在导电氮化物和半导体之间形成界面时，在金属和半导体的界面而不是肖特基势垒形成一般的欧姆接触。 因此，电子通过TiN平滑地移动，使得数据的损失，例如电子的自旋状态的变化。 添加过渡金属的导电氮化物增加了旋转注入的效率。
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公开(公告)号：KR100489639B1
公开(公告)日：2005-05-17
申请号：KR1020020073209
申请日：2002-11-22
Applicant: 한국과학기술연구원 , (주)제이 앤 엘 테크
IPC: H01L21/56
Abstract: 본 발명은 공구강 재질의 몰드 금형과, 상기 몰드 금형의 표면에 코팅된 수소를 함유하지 않은 경질 탄소 필름으로 구성되는 향상된 반도체 봉지용 에폭시 몰딩 콤파운드(EMC) 몰드 금형을 제공한다. 본 발명에 의한 몰드 금형은 EMC와 우수한 이형성을 가지면서 동시에 표면 오염의 발생을 억제함으로써 몰딩공정의 생산성을 현저히 증가시킬 수 있다.
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公开(公告)号：KR100291533B1
公开(公告)日：2001-07-12
申请号：KR1019970067702
申请日：1997-12-11
Applicant: 한국과학기술연구원
IPC: C23C16/26
Abstract: PURPOSE: A method is provided which improves corrosion resistance for solid particles by improving mechanical properties of a membrane without change of optical characteristics while neither a fatally poisonous gas is used nor a thick membrane is coated. CONSTITUTION: The corrosion resistance non-reflective diamond-like rigid carbon membrane contains 0.1 to 10 atom% of silicon and has a thickness of 0.5 to 3 microns. In a method for depositing a diamond-like rigid carbon membrane on an optical substrate, the method for manufacturing the corrosion resistance non-reflective diamond-like rigid carbon membrane having a thickness of 0.5 to 3 microns is characterized in that hydrocarbon compounds are used as a carbon source, a silicon contained gas is used as a silicon source, the optical substrate is selected from the group consisting of Ge, Si, ZnS, ZnSe, MgF2 and sapphire, and silicon contains 0.1 to 10 atom% in a carbon membrane which is manufactured by controlling a partial pressure of silicon of the synthetic gas, wherein the deposition is carried out using a plasma chemical vapor deposition, sputtering, ion beam synthesis or ion plating, and wherein the plasma chemical vapor deposition is performed under the conditions of a high frequency of 10 to 50 MHz and a pressure of 1 m Torr to 100 Torr.
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公开(公告)号：KR1020000002698A
公开(公告)日：2000-01-15
申请号：KR1019980023561
申请日：1998-06-23
Applicant: 한국과학기술연구원
CPC classification number: C23C14/0611 , C23C14/35 , C23C14/58 , H01L21/566
Abstract: PURPOSE: The semiconductor packaging mold is provided which has mold release properties, abrasion resistance and corrosion resistance. CONSTITUTION: The semiconductor packaging mold is dry-washed and formed a mixed layer supplying a hydrocarbon on the board of the mold, followed by formation of diamond type carbon film. A synthetic apparatus(1) comprises a synthetic chamber(2), a vacuum gauge(3), a gas supplying gauge(4), a power supplying gauge(5) and a magnetron sputter gun(6). The mold is dry-washed using argon ion, and the mixed layer is formed between the board and the diamond film.
Abstract translation: 目的：提供具有脱模性，耐磨性和耐腐蚀性的半导体封装模具。 构成：对半导体封装模具进行干洗，形成在模具板上供给碳氢化合物的混合层，然后形成金刚石型碳膜。 合成装置（1）包括合成室（2），真空计（3），气体供给量规（4），供电量规（5）和磁控溅射枪（6）。 使用氩离子对模具进行干洗，并且在板和金刚石膜之间形成混合层。
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Patent Agency Ranking
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公开(公告)号：KR1019960002635B1
公开(公告)日：1996-02-24
申请号：KR1019920022103
申请日：1992-11-23
Applicant: 한국과학기술연구원
IPC: C23C16/46
Abstract: The method for installing filament improves the stability of filament by eliminating torsion and compressive stress caused by carburization and thermal expansion of filament. The method comprises: (A) maintaining two parallel electrodes(5a, 5b) at constant distance; (B) installing the filament(1) between the electrodes; and (C) installing the supporter(6) in the middle of gas feeder(2) and filament to prevent the filament hanging down.
Abstract translation: 灯丝的安装方法通过消除由于渗碳和长丝热膨胀引起的扭转和压缩应力，提高了灯丝的稳定性。 该方法包括：（A）保持恒定距离的两个平行电极（5a，5b）; （B）将灯丝（1）安装在电极之间; 和（C）将支撑件（6）安装在气体供给器（2）的中部和灯丝，以防止灯丝垂下。
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公开(公告)号：KR1019940011349A
公开(公告)日：1994-06-21
申请号：KR1019920022103
申请日：1992-11-23
Applicant: 한국과학기술연구원
IPC: C23C16/46
Abstract: 본 발명은 다이아몬드 합성용 고온 필라멘트 화학증착장치의 필라멘트 설치방법에 관한 것이다.
본 발명은 고온 필라멘트 화학증착장치의 가동시 탄화나 열팽창에 의해 필 라멘트의 길이 변화가 발생하여 초래되는 필라멘트의 길이변화를 흡수하기 위한 방편으로 전극사이에 설치되는 필라멘트의 양측단부중 적어도 일측의 결합부가 전극에 대해 상대적인 슬라이딩이 가능하도록 필라멘트를 설치하는 방법에 기술적 특징이 있다.
본 발명의 필라멘트 설치방법은 탄화나 열팽창에 의한 필라멘트의 길이변화가 흡수되어 필라멘트에 압축응력을 가하지 않기 때문에 뒤틀림등의 악영향을 배제할 수 있어 필라멘트의 안정화를 기할 수 있다는 효과가 있다.-
公开(公告)号：KR1020140112848A
公开(公告)日：2014-09-24
申请号：KR1020130027452
申请日：2013-03-14
Applicant: 한국과학기술연구원
CPC classification number: C23C16/505 , B82Y30/00 , C23C8/02 , C23C8/42 , C23C22/68 , C23C22/78 , C23F4/00 , F28F2245/02 , Y10T428/24355
Abstract: A method for manufacturing a hydrophilic aluminum surface according to an embodiment of the present invention comprises an activating step of manufacturing doping-aluminum having a surface activated by doping the surface of the aluminum using reactive gas; and a structure forming step of forming a nanopattern including a needle, plate, or dot-shaped nanoprotrusion structure on the surface of the aluminum by oxidizing the doping-aluminum. The method can artificially make the hydrophilic or superhydrophilic aluminum from hydrophobic aluminum, and can provide the aluminum surface body in which an aging effect hardly shows and hydrophilic aluminum surface characteristics are maintained for a long time.
Abstract translation: 根据本发明的实施方案的亲水性铝表面的制造方法包括：通过使用反应性气体掺杂铝的表面来制造表面活化的掺杂铝的活化步骤; 以及通过氧化掺杂铝在铝的表面上形成包括针，板或点状纳米突起结构的纳米图案的结构形成步骤。 该方法可以人造地使疏水性铝形成亲水性或超亲水性的铝，并且能够提供长时间保持老化效果几乎不显示和亲水性铝表面特性的铝表面体。
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公开(公告)号：KR1020140091086A
公开(公告)日：2014-07-21
申请号：KR1020120150554
申请日：2012-12-21
Applicant: 한국과학기술연구원
IPC: H01L21/66
CPC classification number: G06F17/5045 , G06F17/5009
Abstract: Disclosed are a multi-dimensional virtual experimental apparatus for designing a nanodevice and a method for the same. The disclosed multi-dimensional virtual experimental apparatus for designing a nanodevice includes a virtual sample determining part for determining a virtual experimental material for designing a nanodevice; a virtual process experimental part for applying at least one process to the virtual experimental material determined by the virtual sample determining part; and a virtual process analyzing part for analyzing each process result applied to the virtual experimental material in the virtual process experimental part. The virtual process analyzing part further includes a multi-level analyzing part for analyzing the process result based on one or more particle levels.
Abstract translation: 公开了一种用于设计纳米器件的多维虚拟实验装置及其方法。 所公开的用于设计纳米器件的多维虚拟实验装置包括用于确定用于设计纳米器件的虚拟实验材料的虚拟样本确定部分; 虚拟处理实验部件，用于将至少一个处理应用于由虚拟样本确定部分确定的虚拟实验材料; 以及用于分析在虚拟处理实验部分中应用于虚拟实验材料的每个处理结果的虚拟过程分析部分。 虚拟过程分析部分还包括用于基于一个或多个粒子水平分析过程结果的多级分析部分。
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