公开(公告)号：AU2003216497A8

公开(公告)日：2003-09-22

申请号：AU2003216497

申请日：2003-03-03

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： DICKSON WILLIAM C ,  FERNANDEZ ANDRES

IPC: G02B26/08 ,  B81B3/00 ,  G02B20060101 ,  G02B26/10 ,  H02N1/00

Abstract: Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.

公开(公告)号：AU2003216497A1

公开(公告)日：2003-09-22

申请号：AU2003216497

申请日：2003-03-03

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： FERNANDEZ ANDRES ,  DICKSON WILLIAM C

IPC: G02B26/08 ,  B81B3/00 ,  G02B20060101 ,  G02B26/10 ,  H02N1/00

Abstract: Apparatus and methods are provided for driving a two-axis MEMS mirror using three non-contact actuation elements or electrodes. A differential bi-directional mirror control uses unipolar drive voltages biased at a suitable value. Transformation functions map two-axis tip-tilt commands to three actuation drive signals for selected electrode orientations and sizes.

公开(公告)号：AU2003213165A1

公开(公告)日：2003-09-09

申请号：AU2003213165

申请日：2003-02-18

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  BANYAI WILLIAM C

IPC: B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  G02B7/182

Abstract: In a gimbaled micromachined micromirror array optimized for parallel-plate electrostatic operation, longitudinal-type gimbal hinge elements are provided in which a plurality of torsional longitudinal hinge elements are arranged in an array parallel to the axis of rotation and which are linked together by rigid lateral brace sections. In primary embodiment the hinge elements are arranged in a double gimbal configuration. Specific embodiments of the hinge elements are simple longitudinal, compound longitudinal, stacked simple longitudinal, and stacked compound longitudinal. The longitudinal hinges may be used with various types of mirrors including circular or rectilinear, recessed or nonrecessed, where the hinges are connected in either a symmetric or asymmetric configuration relative to one another, as hereinafter illustrated by way of a subset of examples. A preferred embodiment of a mirror structure suitable for an array structure according to the invention is a nonstacked compound longitudinal hinge symmetrically connected to a circular nonrecessed electrostatically-actuatable parallel plate mirror within a substantially circular ring hinged in substantially the same way to form a double gimbaled structure.

公开(公告)号：WO2004036259A3

公开(公告)日：2004-12-29

申请号：PCT/US0331811

申请日：2003-10-07

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： STAKER BRYAN P ,  CAMPBELL EUGENE W ,  PAX PAUL H

IPC: G02B6/35

CPC classification number: G02B6/3508 ,  G02B6/3556 ,  G02B6/357

Abstract: In a folded three-dimensional free-space optical switch including a set of fibers and an optical system for producing collimated beamlets aligned to intersect an array of dual axis micromirrors of coplanar input and output mirror elements, and a folding mirror, the input and output micromirrors are arranged in a pattern wherein either the input or output mirror set is disposed along an annulus and wherein the complementary output or input mirror set is disposed within the annulus in order to globally minimize maximum tilt angles for a two-dimensional locus of tilt angles of the micromirror set. The beamlets are routed from assigned input fibers to corresponding input moveable mirrors to assigned output fibers via the static folding mirror and corresponding output moveable mirrors.

公开(公告)号：WO2003012811A1

公开(公告)日：2003-02-13

申请号：PCT/US2002/023424

申请日：2002-07-22

Applicant: GLIMMERGLASS NETWORKS, INC.

Inventor： STAKER, Bryan, P. ,  TEETER, Douglas, L., Jr. ,  DeBEY, Thomas, A. ,  AMM, David, T.

IPC: H01H57/00

CPC classification number: H01H59/0009

Abstract: An array apparatus has a micromachined SOI structure (22), such as a MEMS array, mounted directly on a class of substrate (24), such as low temperature co-fired ceramic, in which is embedded electrostatic actuation electrodes (26-29) disposed in substantial alignment with the individual MEMS elements, where the electrostatic electrodes (26-29) are configured for substantial fanout and the electrodes (26-29) are oversized such that in combination with the ceramic assembly are configured to allow for placement of the vias (36-37) within a tolerance of position relative to electrodes (26-29) such that contact is not lost therebetween at the time of manufacturing.

Abstract translation: 阵列装置具有微机械加工的SOI结构（例如MEMS阵列），其直接安装在诸如低温共烧陶瓷之类的基底（24）上，其中嵌有静电致动电极（26-29） 设置成与各个MEMS元件基本上对准，其中静电电极（26-29）被配置为实质上扇出，并且电极（26-29）被加大尺寸，使得与陶瓷组件组合以允许放置 通孔（36-37）在相对于电极（26-29）的位置的公差范围内，使得在制造时不会发生接触。

公开(公告)号：WO2003012171A1

公开(公告)日：2003-02-13

申请号：PCT/US2002/023421

申请日：2002-07-22

Applicant: GLIMMERGLASS NETWORKS, INC.

Inventor： STAKER, Bryan, P. ,  TEETER JR., Douglas, L. ,  AMM, David, T.

IPC: C25B9/00

CPC classification number: B81B3/0086 ,  B81B2201/042

Abstract: In an array apparatus, each MEMS element, comprising an actuatable element and a supportive handle, is mounted over a plurality of electrodes (26, 27) wherein an air gap is controlled by the thickness of the electrodes and not primarily by the structure of the handle (20). The structure of electrostatic actuation electrodes in specific embodiments is disclosed. While the invention is primarily a technique for reducing the air gap (52) without unduly limiting the thickness of the handle, the invention may also be used to establish an air gap greater than the thickness of the handle.

Abstract translation: 在阵列装置中，包括可致动元件和支撑手柄的每个MEMS元件安装在多个电极（26,27）上，其中气隙由电极的厚度控制，而不主要由电极的结构 手柄（20）。 在具体实施例中公开了静电致动电极的结构。 尽管本发明主要是用于减小气隙（52）而不过度地限制手柄厚度的技术，但是本发明也可用于建立大于手柄厚度的气隙。

公开(公告)号：WO2008061097A3

公开(公告)日：2008-07-10

申请号：PCT/US2007084568

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC ,  STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: G02B26/00 ,  H01L27/00

CPC classification number: G02B26/0841

Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

Abstract translation: 在相邻电极之间设置有基于MEMS的反射镜，以便能够承受相对较高的施加电压，从而基本上减少暴露于不受控制的表面电位。 基于MEMS的反射镜，因此避免了电压漂移，并具有改进的镜面位置稳定性。 选择沟槽尺寸，使得施加在每个相邻电极对之间的电压保持在预定义的限度内。 诸如二氧化硅的绝缘层电隔离每对相邻的电极。 每个绝缘层部分地在相关联的沟槽上方延伸，并且其特征在于相同的高度和宽度尺寸。

公开(公告)号：WO2008061101A3

公开(公告)日：2008-07-03

申请号：PCT/US2007084575

申请日：2007-11-13

Applicant: GLIMMERGLASS NETWORKS INC ,  FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

Inventor： FERNANDEZ ANDRES ,  STAKER BRYAN P ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

IPC: H01L21/00

CPC classification number: B32B37/1292 ,  B32B7/12 ,  B32B2309/68 ,  B32B2457/00 ,  B81C3/001 ,  B81C2203/032 ,  B81C2203/035 ,  Y10T428/24612 ,  Y10T428/2462

Abstract: One or more cavities are formed in the bonding surfaces of one, all, or some of the elements to be bonded. These cavities serve as receptacles for the bonding material and are where the bonds are localized. The cavities are of sufficient size and shape so that their volume is greater than the volume of bonding material forming the bond. This ensures that when the elements are brought into contact with one another to mate, the bonding material, which can flow prior to solidifying into a bond, will flow into the cavities and will not impede the separation of the parts. This allows the parts to be mated with nominally zero separation. Once solidified, the bonding material forms a localized bond inside each cavity. Different cavity shapes, such as, rectangular, circular, or any other shape that can be injected or filled with adhesive material may be used.

Abstract translation: 在待结合的一个，全部或一些元件的接合表面中形成一个或多个空腔。 这些空腔用作接合材料的接收器，并且是键的位置。 空腔具有足够的尺寸和形状，使得它们的体积大于形成结合的粘合材料的体积。 这确保了当元件彼此接触以配合时，可以在凝固成粘合之前流动的粘合材料将流入空腔中，并且不会阻碍部件的分离。 这允许零件与标称零分离配合。 一旦固化，接合材料在每个空腔内形成局部粘合。 可以使用不同的腔体形状，例如矩形，圆形或可以用粘合剂材料注射或填充的任何其它形状。

公开(公告)号：WO2008070764A2

公开(公告)日：2008-06-12

申请号：PCT/US2007/086616

申请日：2007-12-06

Applicant: GLIMMERGLASS NETWORKS, INC. ,  STAKER, Bryan, P. ,  FERNANDEZ, Andres ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

Inventor： STAKER, Bryan, P. ,  FERNANDEZ, Andres ,  KINDWALL, Alexander, P. ,  OWENS, Windsor, E.

CPC classification number: G02B6/3556 ,  G02B6/357 ,  G02B26/0841

Abstract: An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.

Abstract translation: 在平面衬底上形成MEMS器件阵列，该平面衬底在多个环形区域或扇区中的每一个中具有基本上相同结构的多个MEMS反射镜，其中每个区域中的MEMS反射镜具有相同的 预倾斜。 通过将每个双轴可倾斜反射镜嵌入预倾斜微平台或万向节内来实现预倾斜。 在特定实施例中，为每个微镜提供预选预倾斜的一个微平台，并且提供具有与预倾斜一致的形状的下电极。 在一个具体实施例中，环形区域是连续的椭圆形或卵形区域。 通过预倾斜，意味着微镜的静止状态或非启动状态使得来自固定源的反射光束被引导至目标阵列的中心。

公开(公告)号：WO2004036259A2

公开(公告)日：2004-04-29

申请号：PCT/US2003/031811

申请日：2003-10-07

Applicant: GLIMMERGLASS NETWORKS, INC.

Inventor： STAKER, Bryan, P. ,  CAMPBELL, Eugene, W. ,  PAX, Paul, H.

IPC: G02B

CPC classification number: G02B6/3508 ,  G02B6/3556 ,  G02B6/357

Abstract: In a folded three-dimensional free-space optical switch including a set of fibers and an optical system for producing collimated beamlets aligned to intersect an array of dual axis micromirrors of coplanar input and output mirror elements, and a folding mirror, the input and output micromirrors are arranged in a pattern wherein either the input or output mirror set is disposed along an annulus and wherein the complementary output or input mirror set is disposed within the annulus in order to globally minimize maximum tilt angles for a two-dimensional locus of tilt angles of the micromirror set. The beamlets are routed from assigned input fibers to corresponding input moveable mirrors to assigned output fibers via the static folding mirror and corresponding output moveable mirrors.

Abstract translation: 在包括一组光纤的折叠的三维自由空间光学开关和用于产生准直的子束的光学系统的光学系统中，所述准直子束被对齐以与共面输入和输出反射镜元件的双轴微镜阵列和折叠镜相交，所述输入和输出 微镜以其中输入或输出反射镜组沿着环形布置的图案布置，并且其中互补输出或输入反射镜组设置在环形空间内，以便全局地最小化倾斜角度的二维轨迹的最大倾斜角度 的微镜组。 子束从分配的输入光纤路由到相应的输入可移动反射镜，经由静态折叠镜和相应的输出可移动反射镜分配给输出光纤。