FIELD-EFFECT TRANSISTORS WITH SELF-ALIGNED P-SHIELD CONTACTS

    公开(公告)号:EP4415051A1

    公开(公告)日:2024-08-14

    申请号:EP23205387.6

    申请日:2023-10-24

    Inventor: HEBERT, Francois

    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. The structure comprises a semiconductor substrate including a first doped region, a second doped region, a third doped region, and a trench that includes a trench bottom, a first sidewall, and a second sidewall opposite to the first sidewall. The first doped region is disposed adjacent to the first sidewall of the trench, the second doped region is disposed adjacent to the second sidewall of the trench, the third doped region is disposed adjacent to the trench bottom of the first trench, the first doped region. The third doped region connects the first doped region to the second doped region, and the first doped region, the second doped region, and the third doped region have a conductivity type. The structure further comprises a gate structure in the trench.

    CHIP STRUCTURE WITH MOISTURE BARRIER ALONG OPENING IN EDGE THEREOF AND MANUFACTURING METHOD OF THE CHIP STRUCTURE

    公开(公告)号:EP4400885A1

    公开(公告)日:2024-07-17

    申请号:EP23195594.9

    申请日:2023-09-06

    Inventor: Wu, Zhuojie

    Abstract: A structure includes an integrated circuit chip in a substrate, and an I/O opening extending inwardly from an edge of the integrated circuit chip. A dielectric moisture barrier includes a first portion extending along a side of the I/O opening, a second portion extending along the edge of the integrated circuit chip, and a third portion coupling the first moisture barrier portion to the second moisture barrier portion to complete the moisture barrier between the edge of the integrated circuit chip and the I/O opening. The third portion is distanced from the corner of the integrated circuit chip where the I/O opening meets the edge of the chip to prevent damage to the moisture barrier from fabrication processes, such as chip dicing, chip handling or other processes. Various crack stop configurations are also provided to further protect the moisture barrier from damage.

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