公开(公告)号：SG144740A1

公开(公告)日：2008-08-28

申请号：SG2006023006

申请日：2003-09-29

Applicant: LAM RES CORP

Inventor： WOODS CARL A ,  GARCIA JAMES P ,  DE LARIOS JOHN M ,  RAVKIN MICHAEL ,  REDEKER FRED C

IPC: C25D5/22 ,  C25D7/12 ,  H01L21/00 ,  B08B3/00

Abstract: Methods and Systems for Processing a Substrate Using A Dynamic Liquid Meniscus A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.

公开(公告)号：DE602005000450T2

公开(公告)日：2007-12-06

申请号：DE602005000450

申请日：2005-03-29

Applicant: LAM RES CORP

Inventor： WOODS CARL ,  PARKS JOHN ,  SMITH MICHAEL G R ,  GARCIA JAMES P ,  DE LARIOS JOHN M

IPC: B05D3/12 ,  B05C9/02 ,  B05D1/00 ,  H01L21/00 ,  H01L21/02 ,  H01L21/027 ,  H01L21/304 ,  H01L21/306

Abstract: An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus.

公开(公告)号：DE602005000450D1

公开(公告)日：2007-03-08

申请号：DE602005000450

申请日：2005-03-29

Applicant: LAM RES CORP

Inventor： WOODS CARL ,  PARKS JOHN ,  SMITH MICHAEL G R ,  GARCIA JAMES P ,  DE LARIOS JOHN M

IPC: B05D3/12 ,  B05C9/02 ,  B05D1/00 ,  H01L21/00 ,  H01L21/02 ,  H01L21/027 ,  H01L21/304 ,  H01L21/306

Abstract: An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus.

公开(公告)号：PL374502A1

公开(公告)日：2005-10-31

申请号：PL37450203

申请日：2003-09-30

Applicant: LAM RES CORP

Inventor： DE LARIOS JOHN M ,  GARCIA JAMES P ,  WOODS CARL ,  RAVKIN MIKE ,  REDEKER FRITZ ,  BOYD JOHN ,  NICKHOU AFSHIN

IPC: H01L21/00

Abstract: One of many embodiments of a substrate preparation system is provided which includes a head having a head surface where the head surface is proximate to a surface of the substrate. The system also includes a first conduit for delivering a first fluid to the surface of the substrate through the head, and a second conduit for delivering a second fluid to the surface of the substrate through the head, where the second fluid is different than the first fluid. The system also includes a third conduit for removing each of the first fluid and the second fluid from the surface of the substrate where the first conduit, the second conduit and the third conduit act substantially simultaneously. In an alternative embodiment, a method for processing a substrate is provided that includes generating a fluid meniscus on a surface of the substrate and applying acoustic energy to the fluid meniscus. The method also includes moving the fluid meniscus over the surface the substrate to process the surface of the substrate.