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    Field emission electron source having carbon nanotubes
    44.
    发明申请
    Field emission electron source having carbon nanotubes 有权
    具有碳纳米管的场发射电子源

    公开(公告)号：US20090236961A1

    公开(公告)日：2009-09-24

    申请号：US12313932

    申请日：2008-11-26

    Applicant: Yang Wei ,  Liang Liu ,  Shou-Shan Fan

    Inventor： Yang Wei ,  Liang Liu ,  Shou-Shan Fan

    IPC: H01J1/00

    CPC classification number: H01J1/304 ,  H01J2201/30415 ,  H01J2201/30434 ,  H01J2201/30469

    Abstract: A field emission electron source includes a CNT needle and a conductive base. The CNT needle has an end portion and a broken end portion; the end portion is contacted with and electrically connected to a surface of the conductive base. The CNTs at the broken end portion form a taper-shape structure, wherein one CNT protrudes and is higher than the adjacent CNTs.

    Abstract translation: 场发射电子源包括CNT针和导电基底。 CNT针具有端部和断端部; 端部与导电基底的表面接触并电连接。 破碎端部的CNT形成锥形结构，其中一个CNT突出并且高于相邻的CNT。

    PARTICLE SOURCE AND MANUFACTURING METHOD THEREFOR
    47.
    发明公开
    PARTICLE SOURCE AND MANUFACTURING METHOD THEREFOR 有权
    Verfahren zum Herstellen einer Teilchenquelle

    公开(公告)号：EP2575158A1

    公开(公告)日：2013-04-03

    申请号：EP12798587.7

    申请日：2012-06-13

    Applicant: 38th Research Institute, China Electronics Technology Group Corporation

    Inventor： LIU, Huarong

    IPC: H01J37/04

    CPC classification number: C23F4/02 ,  B82Y99/00 ,  H01J1/00 ,  H01J1/3044 ,  H01J9/025 ,  H01J27/26 ,  H01J37/04 ,  H01J37/06 ,  H01J37/073 ,  H01J37/08 ,  H01J2201/30415 ,  H01J2237/0807

    Abstract: The present disclosure provides a method for manufacturing a particle source, comprising: placing a metal wire in vacuum, introducing active gas and catalyst gas, adjusting a temperature of the metal wire, and applying a positive high voltage V to the metal wire to dissociate the active gas at the surface of the metal wire, in order to generate at a peripheral surface of the head of the metal wire an etching zone in which field induced chemical etching (FICE) is performed; increasing by the FICE a surface electric field at the apex of the metal wire head to be greater than the evaporation field of the material for the metal wire, so that metal atoms at the wire apex are evaporated off; after the field evaporation is activated by the FICE, causing mutual adjustment between the FICE and the field evaporation, until the head of the metal wire has a shape of combination of a base and a tip on the base, wherein the FICE occurs at the lateral side of the metal wire head to form the base, and the field evaporation occurs at the apex of the metal wire head to form the tip; and stopping the FICE and the field evaporation when the head of the metal wire takes a predetermine shape.

    Abstract translation: 本公开内容提供了一种制造颗粒源的方法，包括：将金属线放置在真空中，引入活性气体和催化剂气体，调节金属丝的温度，以及向金属丝施加正高电压V以使 在金属线的表面处的活性气体，以在金属线的头部的外周表面处产生进行场诱导化学蚀刻（FICE）的蚀刻区域; 通过FICE增加金属丝头顶点处的表面电场，使其大于金属线材料的蒸发场，使金属丝顶端的金属原子蒸发掉; 在通过FICE激活场蒸发之后，引起FICE和场蒸发之间的相互调节，直到金属丝的头部具有基部和底部的尖端的组合的形状，其中FICE出现在侧面 金属丝头的一侧形成基部，并且在金属丝头的顶点处发生场蒸发以形成尖端; 并且当金属丝的头部具有预定的形状时，停止FICE和场蒸发。

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