公开(公告)号：US07692139B2

公开(公告)日：2010-04-06

申请号：US11872576

申请日：2007-10-15

Applicant: Bon Woong Koo ,  Frank Sinclair

Inventor： Bon Woong Koo ,  Frank Sinclair

IPC: H01J37/317

CPC classification number: H01J37/026 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/04 ,  H01J2237/05

Abstract: A system for ion beam neutralization includes a beamguide configured to transport an ion beam through a dipole field, a first array of magnets and a second array of magnets configured to generate a multi-cusp magnetic field, the first array of magnets being on a first side of the ion beam path and the second array of magnets being on a second side of the ion beam path. The system may further include a charged particle source having one or more apertures configured to inject charged particles into the ion beam. The system may furthermore align the one or more apertures with at least one of the first array of magnets and the second array of magnets to align the injected charged particles from the charged particle source with one or more magnetic regions for an effective charged particle diffusion into the ion beam.

Abstract translation: 用于离子束中和的系统包括被配置为将离子束传送通过偶极场的波导，第一磁体阵列和被配置为产生多尖点磁场的第二磁体阵列，第一磁体阵列位于第一 离子束路径的一侧和第二磁体阵列位于离子束路径的第二侧上。 该系统还可以包括具有一个或多个孔的带电粒子源，所述孔被配置为将带电粒子注入到离子束中。 该系统还可以将一个或多个孔与第一磁体阵列和第二磁体阵列中的至少一个对准，以使来自带电粒子源的注入的带电粒子与一个或多个磁性区域对准，以使有效的带电粒子扩散成 离子束。

公开(公告)号：US07521677B2

公开(公告)日：2009-04-21

申请号：US11642249

申请日：2006-12-20

Applicant: Gero Walter ,  Rainer Härle

Inventor： Gero Walter ,  Rainer Härle

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J37/21 ,  H01J2237/047 ,  H01J2237/05 ,  H01J2237/216 ,  H01J2237/24507 ,  H01J2237/2485 ,  H01J2237/28 ,  H01J2237/2802

Abstract: A method and a device for determining the distance from the sample to be examined to at least one reference point which function independently of the type of sample. A signal is modulated to a first potential of a sample and a primary particle beam is directed at the sample, resulting in a secondary particle beam being formed by an interaction, the particles of this beam having the modulated signal. The particles of the secondary particle beam and the signal modulated to the potential of the particles of the secondary particle beam are detected. By comparing the detected modulated signal to a reference signal, the distance is determined from the relationship between the reference signal and the detected modulated signal. The device has the corresponding components for implementing the method.

Abstract translation: 一种用于确定从被检测样品到至少一个独立于样品类型起作用的参考点的距离的方法和装置。 信号被调制到样品的第一电位，并且一次粒子束被引导到样品，导致通过相互作用形成的二次粒子束，该束的粒子具有调制信号。 检测二次粒子束的粒子和调制到二次粒子束的粒子的电位的信号。 通过将检测到的调制信号与参考信号进行比较，根据参考信号与检测到的调制信号之间的关系确定距离。 该设备具有用于实现该方法的相应组件。

公开(公告)号：US20080018460A1

公开(公告)日：2008-01-24

申请号：US11779686

申请日：2007-07-18

Applicant: Koji Ishiguro ,  Kaoru Umemura ,  Noriyuki Kaneoka

Inventor： Koji Ishiguro ,  Kaoru Umemura ,  Noriyuki Kaneoka

IPC: G08B21/00 ,  G21K5/10

CPC classification number: H01J37/3056 ,  H01J37/3005 ,  H01J37/304 ,  H01J2237/0225 ,  H01J2237/05 ,  H01J2237/24514 ,  H01J2237/248 ,  H01J2237/30455 ,  H01J2237/31744 ,  H01J2237/31745

Abstract: Provided is a charged particle beam processing apparatus capable of improving yields by suppressing the spread of metal pollution to a semiconductor manufacturing process to a minimum. The charged particle beam processing apparatus includes an ion beam column 1 that is connected to a vacuum vessel 10 and irradiates a sample 35 with an ion beam 11 of nonmetal ion species, a microsampling unit 3 having a probe 16 that extracts a microsample 43 cut out from a sample 35 by the ion beam 11, a gas gun 2 that discharges a gas for bonding the microsample 43 and the probe 16, a pollution measuring beam column 6A that is connected to the same vacuum vessel 10 to which the ion beam column 1 is connected and irradiates an ion beam irradiation traces by the ion beam column 1 with a pollution measuring beam 13, and a detector 7 that detects characteristic X-rays emitted from the ion beam irradiation traces by the ion beam column 1 upon irradiation with the pollution measuring beam 13.

Abstract translation: 提供一种能够通过将半导体制造工序的金属污染的扩散抑制到最小来提高产率的带电粒子束处理装置。 带电粒子束处理装置包括离子束柱1，其连接到真空容器10并用非金属离子种类的离子束11照射样品35，微量取样单元3具有探针16，其提取切出的微量样品43 从样品35通过离子束11，放出用于接合微量样品43和探针16的气体的气枪2，连接到同一真空容器10的污染测量束柱6A，离子束柱 1通过离子束柱1连接并用污染测量光束13照射离子束照射迹线;以及检测器7，其在照射离子束柱1时检测由离子束柱1从离子束照射迹线发射的特征X射线 污染测量梁13。

公开(公告)号：US20050242284A1

公开(公告)日：2005-11-03

申请号：US11102483

申请日：2005-04-08

Applicant: Toshikatsu Kaneyama

Inventor： Toshikatsu Kaneyama

IPC: H01J37/05 ,  H01J37/153 ,  H01J37/26 ,  H01J47/00

CPC classification number: H01J37/26 ,  H01J2237/05 ,  H01J2237/2522

Abstract: There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.

Abstract translation: 公开了以与高倍率成像时相同的方式在物镜保持高激发的同时实现低倍率成像的电子显微镜。 位于物镜后面的物镜微缩镜使由物镜放大的样本图像缩小。 因此，尖锐聚焦的电子束进入第一中间透镜。 这大大降低了中间透镜中离轴像差的影响。 第一，第二和第三中间透镜分别在能量过滤器的入射窗平面和入射图像平面中产生交叉图像和显微镜图像。 能量过滤器将显微镜图像和交叉图像分别聚焦到出射图像平面和出射窗口平面。 来自滤波器的输出图像由第一和第二投影仪透镜投射到最终的图像平面上。

公开(公告)号：US20190074160A1

公开(公告)日：2019-03-07

申请号：US16172609

申请日：2018-10-26

Applicant: Atomnaut Inc.

Inventor： Peter V. Liddicoat

IPC: H01J37/285 ,  H01J49/00 ,  H01J37/22 ,  H01J49/40

CPC classification number: H01J37/285 ,  H01J37/226 ,  H01J49/0004 ,  H01J49/40 ,  H01J2237/04 ,  H01J2237/05 ,  H01J2237/2067 ,  H01J2237/2855

Abstract: An imaging system that selectively alternates between a first, non-destructive imaging mode and a second, destructive imaging mode to analyze a specimen so as to determine an atomic structure and composition of the specimen is provided. The field ionization mode can be used to acquire first images of ionized atoms of an imaging gas present in a chamber having the specimen disposed therein, and the field evaporation mode can be used to acquire second images of ionized specimen atoms evaporated from a surface of the specimen with the imaging gas remaining in the chamber. The first and second image data can be analyzed in real time, during the specimen analysis, and results can be used to dynamically adjust operating parameters of the imaging system.

公开(公告)号：US20170301512A1

公开(公告)日：2017-10-19

申请号：US15513231

申请日：2015-09-17

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Takashi SEKIGUCHI ,  Hideo IWAI

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/05 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: When an electrode (29) such as a grid applied with a negative voltage is installed in front of an objective lens (23), low energy electrons among secondary electrons (25) generated from a sample (24) by an electron beam or the like is reflected by the electrode to come into a detector (22) installed in the sample (24) side, while electrons of higher energy are not detected, since they are not reflected by the electrode. Accordingly, since only the electrons of lower energy of the secondary electrons can be detected by discriminating the secondary electrons by the energy, it is possible to obtain a detection signal, e.g., rich in the information on the surface state of the sample.

公开(公告)号：US20170140896A1

公开(公告)日：2017-05-18

申请号：US15322223

申请日：2015-07-01

Applicant: Peter V. Liddicoat

Inventor： Peter V. Liddicoat

IPC: H01J37/285 ,  H01J49/40

CPC classification number: H01J37/285 ,  H01J37/226 ,  H01J49/0004 ,  H01J49/40 ,  H01J2237/04 ,  H01J2237/05 ,  H01J2237/2067 ,  H01J2237/2855

Abstract: An imaging system that selectively alternates a first, non-destructive imaging mode and a second, destructive imaging mode to analyze a specimen so as to determine an atomic structure and composition of the specimen is provided. The field ionization mode can be used to acquire first images of ionized atoms of an imaging gas present in a chamber having the specimen disposed therein, and the field evaporation mode can be used to acquire second images of ionized specimen atoms evaporated from a surface of the specimen with the imaging gas remaining in the chamber. The first and second image data can be analyzed in real time, during the specimen analysis, and results can be used to dynamically adjust operating parameters of the imaging system.

公开(公告)号：US20120080596A1

公开(公告)日：2012-04-05

申请号：US13227505

申请日：2011-09-08

Applicant: Wilfried Vandervorst

Inventor： Wilfried Vandervorst

IPC: H01J37/26

CPC classification number: H01J37/226 ,  H01J37/285 ,  H01J49/0004 ,  H01J2237/04 ,  H01J2237/05 ,  H01J2237/202 ,  H01J2237/248 ,  H01J2237/2855

Abstract: A laser atom probe system and a method for analysing a specimen by laser atom probe tomography are disclosed. The system includes a specimen holder whereon a specimen to be analyzed may be mounted, the specimen having a tip shape. The system further includes a detector, an electrode arranged between the specimen holder and the detector, and a voltage source configured to apply a voltage difference between the specimen tip and the electrode. The system also includes at least one laser system configured to direct a laser beam laterally at the specimen tip and a tip shape monitoring means configured to detect and monitor the tip shape, and/or a means for altering and/or controlling one or more laser parameters of said laser beam(s) so as to maintain, restore or control said specimen tip shape.

Abstract translation: 公开了一种激光原子探针系统和通过激光原子探针层析成像分析样品的方法。 该系统包括可以安装待分析样品的样品架，样品具有尖端形状。 所述系统还包括检测器，布置在所述检体保持器和检测器之间的电极，以及被配置为施加所述检测头和所述电极之间的电压差的电压源。 该系统还包括至少一个激光系统，其被配置为在激光束的侧面引导激光束，以及尖端形状监测装置，被配置为检测和监视尖端形状，和/或用于改变和/或控制一个或多个激光器 所述激光束的参数，以便维持，恢复或控制所述样品尖端形状。

公开(公告)号：US20120049060A1

公开(公告)日：2012-03-01

申请号：US13217013

申请日：2011-08-24

Applicant: Uwe Luecken ,  Cornelis Sander Kooijman ,  Frank Jeroen Pieter Schuurmans

Inventor： Uwe Luecken ,  Cornelis Sander Kooijman ,  Frank Jeroen Pieter Schuurmans

IPC: H01J47/00 ,  G01N23/00

CPC classification number: H01J37/244 ,  H01J37/05 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802 ,  H01J2237/2817

Abstract: A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.

Abstract translation: 用于透射电子显微镜的检测器系统包括用于记录图案的第一检测器和用于记录图案的特征位置的第二检测器。 第二检测器优选地是位置敏感检测器，其提供精确，快速的位置信息，其可以用作反馈以稳定图案在第一检测器上的位置。 在一个实施例中，第一检测器检测电子能量损失电子光谱，并且第二检测器位于第一检测器后面并检测通过第一检测器的电子，检测零损耗峰值的位置并调整电子通路 稳定第一检测器上的光谱位置。

公开(公告)号：US07977630B2

公开(公告)日：2011-07-12

申请号：US11102483

申请日：2005-04-08

Applicant: Toshikatsu Kaneyama

Inventor： Toshikatsu Kaneyama

IPC: H01J44/00

CPC classification number: H01J37/26 ,  H01J2237/05 ,  H01J2237/2522

Abstract: There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.

Abstract translation: 公开了以与高倍率成像时相同的方式在物镜保持高激发的同时实现低倍率成像的电子显微镜。 位于物镜后面的物镜微缩镜使由物镜放大的样本图像缩小。 因此，尖锐聚焦的电子束进入第一中间透镜。 这大大降低了中间透镜中离轴像差的影响。 第一，第二和第三中间透镜分别在能量过滤器的入射窗平面和入射图像平面中产生交叉图像和显微镜图像。 能量过滤器将显微镜图像和交叉图像分别聚焦到出射图像平面和出射窗口平面。 来自滤波器的输出图像由第一和第二投影仪透镜投射到最终的图像平面上。