公开(公告)号：EP2847781A4

公开(公告)日：2015-12-09

申请号：EP13788136

申请日：2013-05-07

Applicant: KLA TENCOR CORP

Inventor： NASSER-GHODSI MEHRAN ,  PLETTNER TOMAS ,  HAYNES ROBERT G ,  SEARS CHRISTOPHER MALCOLM STANLEY

IPC: H01J3/02 ,  H01J37/065 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J3/027 ,  H01J3/029 ,  H01J27/024 ,  H01J37/063 ,  H01J37/065 ,  H01J37/28 ,  H01J2237/06375

Abstract: One embodiment disclosed relates to an electron source for generating an electron beam. The electron source includes an electron emitter having a tip from which an electron beam is extracted. The electron further includes a non-planar extractor with an extractor opening and a built-in beam-limiting aperture. The extractor opening is larger than the beam-limiting aperture, and central axes of both the extractor opening and the beam-limiting aperture are aligned with the tip along a beam axis. Another embodiment relates to a method of generating an electron beam using an electron source having a non-planar extractor. Another embodiment relates to an array of electron sources for generating an array of electron beams. The array of electron sources includes an array of electron emitters and an array of non-planar extractor structures. Other embodiments, aspects and features are also disclosed.

公开(公告)号：EP1508910A4

公开(公告)日：2005-10-26

申请号：EP02807434

申请日：2002-12-30

Applicant: UNIV ZHONGSHAN

Inventor： XU NINGSHENG ,  SHE JUNCONG ,  DENG SHAOZHI ,  CHEN JUN

IPC: H01J3/02 ,  H01J29/48 ,  H01J1/304 ,  H01J29/02

CPC classification number: H01J3/021 ,  H01J3/029 ,  H01J29/481

Abstract: A gun with a cold cathode is disclosed in the present invention. A cold cathode made of a material for a cold cathode is held on a base, a mesh gate is right over the cold cathode, a focusing electrode in a circular hole-shape is right over the mesh gate, and the above-described electrodes are insulated with each other and held on the base. A mesh shielding electrode may be also provided right over the focusing electrode and is fixed on the base by a support for the shielding electrode. Depending on circumstances, the shielding electrode is required in a smaller device such as a pixel tube, but is not required in the applicattion of a cold lamp. The gun with a cold cathode according to the present invention is simple in structure, excellent in performance, and mainly used for a electron source, a electrical lamp with a cold cathode, and a pixel tube, it may be also used for other circumstances having the require similar to that.

公开(公告)号：EP1329927A1

公开(公告)日：2003-07-23

申请号：EP01970252.1

申请日：2001-09-27

Applicant: Sharp Kabushiki Kaisha

Inventor： IDE, Tetsuya ,  SAWAHATA, Junichi ,  URAYAMA, Masao

IPC: H01J1/304 ,  H01J31/12

CPC classification number: H01J29/488 ,  H01J1/304 ,  H01J3/021 ,  H01J3/029 ,  H01J29/467 ,  H01J2329/00

Abstract: A cold-cathode electron source having an improved utilization efficiency of an electron beam and a simple structure. The cold-cathode electron source comprises a gate electrode (4) provided on a substrate (2) through an insulating layer (3) and an emitter (6) extending through the insulating layer (3) and the gate electrode (4) and disposed in an opening of the gate. During the emission of electrons from the emitter (6), the following relationships are satisfied: 10 [V/µm] ≥ (Va-Vg)/(Ha-Hg) ≥ Vg/Hg; and Vg/Hg [V/µm] ≥ Va × 10 -4 × (9.7-1.3 × 1n (Hg)) x (1000/Ha) 0.5 , where Ha [µm] is an anode-emitter distance, Va [V] is an anode-emitter voltage, Hg [µm] is a gate-emitter distance, and Vg [V] is a gate-emitter voltage.

Abstract translation: 具有提高电子束的利用效率和简单结构的冷阴极电子源。 冷阴极电子源包括通过绝缘层（3）设置在基板（2）上的栅极（4）和延伸穿过绝缘层（3）和栅电极（4）的发射极（6） 在门口的开口。 在从发射体（6）发射电子时，满足以下关系：10ÄV/μmÜ≥（Va-Vg）/（Ha-Hg）≥Vg/ Hg; 和Vg / HgÄV/ mu m≥Va x 10 -4（x）（9.7-1.3 x 1n（Hg））x（1000 / Ha）<0.5>，其中HaÄmumÜ是阳极 - 发射极距离，Va ÄVÜ是一个阳极 - 发射极电压，HgÜ是一个栅 - 发射极距离，VgÄVÜ是一个栅 - 发射极电压。

公开(公告)号：EP0860853A3

公开(公告)日：1998-09-02

申请号：EP98300636.2

申请日：1998-01-29

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Beeteson, John ,  Knox, Andrew Ramsay ,  Pietrzak, Christopher Carlo

IPC: H01J31/12 ,  H01J29/48 ,  H01J29/46 ,  H01J3/02 ,  H01J21/00

CPC classification number: H01J3/029 ,  H01J3/02 ,  H01J29/04 ,  H01J2329/00

Abstract: A virtual remote cathode has the position of a space charge cloud associated with it fixed by the geometry of a fixed insulating plate (902). The plate (902) can be made to accurate dimensions and hence the virtual remote cathode to control grid (502) distance can be accurately controlled and will not change as a result of any mechanical, electrical or physical changes in the construction. The fixed insulating plate (902) is located on a surface of the control grid (502) facing the cathode (510).

Abstract translation: 虚拟远程阴极具有由固定绝缘板（902）的几何形状固定的与其相关联的空间电荷云的位置。 可以将板902制成精确的尺寸，并因此可以精确地控制虚拟远程阴极以控制电网502的距离，并且不会由于结构中的任何机械，电或物理变化而改变。 固定绝缘板（902）位于控制栅极（502）的面向阴极（510）的表面上。

公开(公告)号：EP0860853A2

公开(公告)日：1998-08-26

申请号：EP98300636.2

申请日：1998-01-29

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Beeteson, John ,  Knox, Andrew Ramsay ,  Pietrzak, Christopher Carlo

IPC: H01J31/12 ,  H01J29/48 ,  H01J29/46 ,  H01J3/02 ,  H01J21/00

CPC classification number: H01J3/029 ,  H01J3/02 ,  H01J29/04 ,  H01J2329/00

Abstract: A virtual remote cathode has the position of a space charge cloud associated with it fixed by the geometry of a fixed insulating plate (902). The plate (902) can be made to accurate dimensions and hence the virtual remote cathode to control grid (502) distance can be accurately controlled and will not change as a result of any mechanical, electrical or physical changes in the construction. The fixed insulating plate (902) is located on a surface of the control grid (502) facing the cathode (510).

Abstract translation: 虚拟遥控阴极具有与固定绝缘板（902）的几何形状固定的空间电荷云的位置。 板（902）可以制成精确的尺寸，因此可以精确地控制虚拟遥控阴极到控制栅（502）的距离，并且不会由于结构中的任何机械，电或物理变化而改变。 固定绝缘板（902）位于面向阴极（510）的控制栅极（502）的表面上。

公开(公告)号：EP0851460A1

公开(公告)日：1998-07-01

申请号：EP96120867.5

申请日：1996-12-24

Applicant: ADVANTEST CORPORATION

Inventor： Frosien, Jürgen, Dr. ,  Lanio, Stefan, Dr. ,  Schönecker, Gerald, Dr.

IPC: H01J37/063 ,  H01J3/02

CPC classification number: H01J3/029 ,  H01J37/063

Abstract: The invention relates to a gun lens (1) for generating a particle beam with a cathode (2), an extraction electrode (3), an anode (4) and a condenser lens (5), wherein a deceleration field is generated between the extraction electrode and the anode and the condenser lens produces a magnetic field which is superimposed on both the cathode, the extraction electrode and the anode.

Abstract translation: 本发明涉及一种用于产生具有阴极（2），提取电极（3），阳极（4）和聚光透镜（5）的粒子束的枪形透镜（1），其中在 引出电极和阳极和聚光透镜产生叠加在阴极，引出电极和阳极两者上的磁场。

公开(公告)号：EP0550335A1

公开(公告)日：1993-07-07

申请号：EP92403558.7

申请日：1992-12-28

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventor： Leroux, Thierry ,  Py, Christophe

IPC: H01J3/02 ,  H01J1/30

CPC classification number: H01J3/022 ,  H01J3/029

Abstract: Système permettant de maîtriser la forme d'un faisceau de particules chargées.
Le faisceau de particules est issu d'une source (58) de ces particules. Cette source est associée à une électrode collectrice qui collecte les particules. Le système comprend au moins une zone résistive (56) et au moins deux électrodes de commande (52, 54), cette zone résistive et ces électrodes de commande étant disposées sensiblement au même niveau que la source, ces électrodes de commande étant en outre placées de part et d'autre de la zone résistive et prévues pour polarier celle-ci, le profil de résistance électrique de la zone résistive étant choisi de façon à avoir la répartition de potentiel permettant d'obtenir la forme voulue du faisceau issu de la source lorsque les électrodes de commande sont convenablement polarisées.
Application à la focalisation d'un faisceau de particules chargées.

Abstract translation: 控制带电粒子束形式的系统。 粒子束从这些颗粒的源（58）发出。 该源与收集颗粒的收集电极相关联。 该系统包括至少一个电阻区（56）和至少两个控制电极（52,54），该电阻区和这些控制电极基本上被布置在与源相同的水平处，这些控制电极进一步放置在两侧 的电阻区并且旨在偏振电阻区，电阻区的电阻分布被选择为具有电位分布，使得当控制电极适当时可以获得从源发射的束的期望形式 偏振。 应用于带电粒子束的聚焦。

公开(公告)号：KR1020020001543A

公开(公告)日：2002-01-09

申请号：KR1020010034442

申请日：2001-06-18

Applicant: 소니 주식회사

Inventor： 나카무라히로후미 ,  미야자키히데키 ,  모리게이조 ,  시부사고지

IPC: H01J29/51

CPC classification number: H01J3/029 ,  H01J29/488

Abstract: PURPOSE: Electron gun, cathode ray tube and image display device are provided to improve the focus characteristics of a cathode ray tube by reducing the working area of the cathode. CONSTITUTION: An electron gun is comprised of a cathode(K) that has an electron emission surface(21) and a first grid(11) that has a beam hole(11A). The electron emission surface(21) and the beam hole(11A) are arranged opposite to each other and the area opposite the beam hole(11A) within the electron emission surface(21) is in closest proximity to the first grid(11).

Abstract translation: 目的：提供电子枪，阴极射线管和图像显示装置，通过减少阴极的工作面积来改善阴极射线管的聚焦特性。 构成：电子枪由具有电子发射表面（21）的阴极（K）和具有光束孔（11A）的第一格栅（11）组成。 电子发射表面（21）和光束孔（11A）彼此相对布置，并且与电子发射表面（21）内的光束孔（11A）相对的区域最靠近第一格栅（11）。

公开(公告)号：KR1020010051486A

公开(公告)日：2001-06-25

申请号：KR1020000065760

申请日：2000-11-07

Applicant: 에텍 시스템즈, 인코포레이티드

Inventor： 베네크라센,리에이치.

IPC: H01J29/48

CPC classification number: H01J37/063 ,  H01J3/029

Abstract: PURPOSE: A tetrode electron gun for electronic beam column is provided to adjust both variable high brightness and illumination uniformity in the profile of the electron beam by adding the fourth electrostatic focusing electrode located between the cathode and the anode within the electron gun. CONSTITUTION: An electron beam column comprises an electron source including a cathode(2), an electrode disposed coaxially to electrons emitted from the cathode, an anode(8) disposed coaxially to the electrons influenced by the electrode, an electrostatic focusing electrode(18) disposed between the electrode and the anode; an aperture located so that an electron beam from the source is incident thereon; and a plurality of electron beam lenses(20), each co-axial to the electron beam and located to focus the beam after passing through the aperture.

Abstract translation: 目的：提供电子束柱的四极电子枪，通过将位于电子枪内的阴极和阳极之间的第四静电聚焦电极相加，来调节电子束轮廓中的可变高亮度和照明均匀性。 构成：电子束柱包括电子源，包括阴极（2），与阴极发射的电子同轴布置的电极，与受电极影响的电子同轴设置的阳极（8），静电聚焦电极（18） 设置在电极和阳极之间; 定位成使来自源的电子束入射的孔; 和多个电子束透镜（20），每个电子束透镜（20）均与电子束同轴并且定位成在通过光圈之后聚焦光束。

公开(公告)号：KR1020030045813A

公开(公告)日：2003-06-11

申请号：KR1020037004361

申请日：2001-09-27

Applicant: 샤프 가부시키가이샤

Inventor： 이데테츠야 ,  사와하타쥬니치 ,  우라야마마사오

IPC: H01J1/30

CPC classification number: H01J29/488 ,  H01J1/304 ,  H01J3/021 ,  H01J3/029 ,  H01J29/467 ,  H01J2329/00

Abstract: 전자빔의 이용효율을 향상시킬 수 있고, 간단한 구조에 의해 실현할 수 있는 냉음극 전자원을 제공한다.
본 발명의 냉음극 전자원은, 기판(2)상에 절연층(3)을 통해 형성된 게이트전극(4)과, 이 절연층(3) 및 게이트전극(4)을 관통하여 제공된 게이트 개구부에 제공된 에미터(6)를 구비하고, 상기 에미터(6)로부터의 전자방출시에는, 애노드-에미터간 거리를 Ha [μm], 애노드-에미터간 전압을 Va [V], 게이트-에미터간 거리를 Hg [μm], 게이트-에미터간 전압을 Vg [V]로 한 경우, 10 [V/μm] ≥ (Va - Vg) / (Ha - Hg) ≥ Vg/Hg를 만족하고, 또한, Vg/Hg [V/μm] ≥ Va × 10
-4 × (9.7 - 1.3 × ln(Hg)) × (1000/Ha)
0.5 를 만족한다.

Abstract translation: 具有提高的电子束利用效率和简单结构的冷阴极电子源。 冷阴极电子源包括通过绝缘层（3）和延伸穿过绝缘层（3）和栅电极（4）的发射极（6）设置在基板（2）上的栅电极（4） 在大门的开口处。 在从发射器（6）发射电子的过程中，满足以下关系：10＆amp; Auml; V / mu m＆Uuml; ＆安培; GE; （Va-Vg）/（Ha-Hg）＆amp; Ge; VG /汞柱; 和Vg / Hg＆Auml; V / mu＆Uuml; ＆安培; GE; Va×10 -4。 x（9.7-1.3×1n（Hg））×（1000 / Ha）0.5，其中Ha＆Auml; mu m＆Uuml; 是阳极 - 发射器距离，Va＆Auml; V＆Uuml; 是阳极 - 发射极电压，Hg＆Auml; mu m＆Uuml; 是门极 - 发射极间距，Vg＆Auml; V＆Uuml; 是门极 - 发射极电压。 ＆lt;图像＆GT;