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    Electron-optical lens barrel and its manufacturing method
    41.
    发明专利
    Electron-optical lens barrel and its manufacturing method 审中-公开
    电子光学镜片及其制造方法

    公开(公告)号：JP2009076474A

    公开(公告)日：2009-04-09

    申请号：JP2008331587

    申请日：2008-12-25

    Applicant: Toudai Tlo Ltd ,  株式会社東京大学Tlo

    Inventor： OKUMURA KATSUYA ,  MIYOSHI MOTOSUKE

    IPC: H01J37/12 ,  G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J37/147 ,  H01J37/153 ,  H01J37/16

    CPC classification number: H01J37/12 ,  H01J37/147 ,  H01J37/153 ,  H01J2237/1215

    Abstract: PROBLEM TO BE SOLVED: To provide an electron-optical lens barrel suitable for miniaturization, and its manufacturing method.
    SOLUTION: The electron-optical lens barrel is provided with a barrel body 1 and an electrostatic lens 2 arranged on an inner surface of the barrel body 1. The inner face of the barrel body 1 is to be of high-resistance conductivity, and that 1 includes an inner tube 11 and an outer tube 12, the inner tube 11 arranged inside the outer tube 12.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题：提供适合于小型化的电子 - 光学透镜镜筒及其制造方法。 解决方案：电子 - 光学透镜镜筒设置有设置在筒体1的内表面上的筒体1和静电透镜2.筒体1的内表面具有高电阻导电性 1，内管11和外管12，内管11配置在外管12的内侧。（C）2009，JPO＆INPIT

    DEFLECTOR FOR CHARGED PARTICLES
    47.
    发明专利
    DEFLECTOR FOR CHARGED PARTICLES 失效

    公开(公告)号：JPS57172642A

    公开(公告)日：1982-10-23

    申请号：JP5675881

    申请日：1981-04-15

    Applicant: RIKAGAKU KENKYUSHO

    Inventor： GOTOU HIDEKAZU ,  SOUMA TAKASHI ,  IDESAWA MASANORI

    IPC: H01J3/26 ,  H01J29/74 ,  H01J37/147

    Abstract: PURPOSE:To remove the Fourier components of high orders, and enable beams of a wider range to be deflected by designating, from among the electrode elements placed on a circumference, 10 elements located at specified center angles and 10 elements located in the reverse positions to the said 10 elements as X-direction deflecting electrodes, and designating elements each located at a position having a given relative phase to each of the said 20 elements as Y-direction deflecting electrodes. CONSTITUTION:Among 60 electrode elements D1-D60 placed on a circumference at equal distance intervals, 10 electrode elements D2, D60-D10,D52 located at center angles of 12 deg., 24 deg., 60 deg., 96 deg. and 108 deg., and 10 electrode elements D32, D30- D40 D22 located in the reverse positions to the above 10 elements D2, D60-D10, D52 are designated as deflecting electrodes of X-direction. 20 Electrode elements each located at a position having 90 deg. differed phase from each of the above 20 electrode elements are designated as deflecting electrodes of Y-direction, and the remaining 20 electrode elements are designated as earthing electrodes. Then, +Vx-Vx and +Vy-Vy are applied to the X and Y electrodes, respectively. As a result, the Fourier components of third order and fifth order aberrations can be removed, and beams of a wider range can be deflected.

    Laminate ceramic coil former
    50.
    发明专利
    Laminate ceramic coil former 未知

    公开(公告)号：GB2429834A

    公开(公告)日：2007-03-07

    申请号：GB0517859

    申请日：2005-09-02

    Applicant: NANOBEAM LTD

    Inventor： ZHANG TAO

    IPC: H01J37/141 ,  H01F5/02 ,  H01F7/20 ,  H01J3/22 ,  H01J3/26 ,  H01J37/147

    Abstract: A coil former (1) comprising a plurality of ceramic plates (2) arranged to form a laminate (3) between first and second ends (4, 5), each plate having an opening therein such that when the plates are arranged in the laminate, a passage (7) is defined between the first and second ends. The coil former can be used in apparatus such as electron microscopes, electron lithography devices and ion implantation devices.

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