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    METHOD AND APPARATUS FOR IN-SITU PROBE TIP REPLACEMENT INSIDE A CHARGED PARTICLE BEAM MICROSCOPE
    51.
    发明公开
    METHOD AND APPARATUS FOR IN-SITU PROBE TIP REPLACEMENT INSIDE A CHARGED PARTICLE BEAM MICROSCOPE 审中-公开
    METHOD AND APPARATUS FOR在显微镜原位探针尖端更改与带电粒子束

    公开(公告)号：EP1782435A2

    公开(公告)日：2007-05-09

    申请号：EP05773762.9

    申请日：2005-07-21

    Applicant: Omniprobe, Inc.

    Inventor： MOORE, Thomas M. ,  ZAYKOVA-FELDMAN, Lyudmila

    IPC: G21K7/00

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/2005 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/31745 ,  H01J2237/31749

    Abstract: We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there. Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.

    STRAIN DETECTION FOR AUTOMATED NANO-MANIPULATION
    55.
    发明公开
    STRAIN DETECTION FOR AUTOMATED NANO-MANIPULATION 审中-公开
    电压检测用于自动MANIPULATION NANO

    公开(公告)号：EP1782037A2

    公开(公告)日：2007-05-09

    申请号：EP05773812.2

    申请日：2005-07-21

    Applicant: Omniprobe, Inc.

    Inventor： Moore, Thomas M.

    IPC: G01N3/00 ,  G01L1/04

    CPC classification number: H01J37/20 ,  B82Y35/00 ,  G01L5/226 ,  H01J37/185 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/2062 ,  H01J2237/31745 ,  H01J2237/31749 ,  Y10S977/849

    Abstract: We disclose a strain detector for in-situ lift-out, comprising a nano-manipulator probe shaft (100); a strain gauge (120) mounted on the probe shaft; and a first cut-out on the probe shaft. The first cut-out has a rectangular cross-section (130 or 160). There is a second cut-out on the probe shaft; the second cut-out having a semiconductor cross-section. The second cut-out is positioned on the shaft opposite from the first cut-out; the first and second cut-out thus defining a thinned region in the probe. The strain gauge is mounted on the probe shaft at the location of the thinned region. There is detecting circuitry for detecting amplifying and conditioning the out put strain gauge; and wires electrically connecting the strain gauge to the detection circuitry. The wires are preferably located in the trench (140) in the probe shaft. Other embodiments are discloses With multiple strain gauge and detectors, as well as method of use.

    METHOD FOR SAMPLE SEPARATION AND LIFT-OUT
    56.
    发明公开
    METHOD FOR SAMPLE SEPARATION AND LIFT-OUT 有权
    程序样品和分离PROBENAUSHEBUNG

    公开(公告)号：EP1436601A1

    公开(公告)日：2004-07-14

    申请号：EP01945982.5

    申请日：2001-05-23

    Applicant: Omniprobe, Inc.

    Inventor： MOORE, Thomas, M. ,  KRUGER, Rocky, D. ,  HARTFIELD, Cheryl

    IPC: G01N21/86

    CPC classification number: G01N1/286 ,  H01J37/3056 ,  H01J37/31 ,  H01J2237/31745 ,  H01L21/67092

    Abstract: When a desired portion (110) is separated from an integrated circuit chip or a semiconductor wafer (100), the portion is separated so that the resulting sample can be moved to a location for examination by TEM, SEM or other means. A sample portion of the chip or wafer containing an area of interest is separated with a single cut by a focused ion-beam (160). Prior to separation, the sample is fixed to a micromanipulator probe (120). The sample is moved by the probe to the location for examination and fixed there. The probe is then detached form the sample by the focused ion-beam.

    METHOD FOR EXTRACTING FROZEN SPECIMENS AND MANUFACTURE OF SPECIMEN ASSEMBLIES
    57.
    发明公开
    METHOD FOR EXTRACTING FROZEN SPECIMENS AND MANUFACTURE OF SPECIMEN ASSEMBLIES 审中-公开
    提取冷冻样品的方法和样本安排生产

    公开(公告)号：EP2694941A2

    公开(公告)日：2014-02-12

    申请号：EP12768369.6

    申请日：2012-04-04

    Applicant: Omniprobe, Inc.

    Inventor： HARTFIELD, Cheryl

    IPC: G01N1/28 ,  G02B21/34 ,  H01J37/20

    CPC classification number: F25D3/107 ,  G01N1/42 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/208 ,  H01J2237/31745

    Abstract: A method for attaching a frozen specimen to a manipulator probe tip typically inside a charged-particle beam microscope. The method comprises cooling the probe tip to a temperature at or below that of the frozen specimen, where the temperature of the frozen specimen is preferably at or below the vitrification temperature of water; bringing the probe tip into contact with the frozen specimen, and bonding the probe tip to the frozen specimen by flowing water vapor onto the region of contact between the probe tip and the frozen specimen. The bonded probe tip and specimen may be moved to a support structure such as a TEM grid and bonded to it by similar means. The probe tip can then be disconnected by heating the probe tip or applying a charged-particle beam.

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