Abstract:
Provided are a palladium aminoalkoxide compound in a solid state at room temperature and a process for preparation of palladium nano-catalyst using the same without external reduction agent to exhibit extremely high volatility and thermal stability and high catalytic activity in organic synthesis applications. The palladium(II) aminoalkoxide compound or hydrate thereof represented by following formula 1, wherein m is an integer of 1 to 3; R and R' include fluorine or not and are linear or branched alkyl groups having C1-C4. The compound is prepared reacting any one of bis(acetonitril)dihalogenated palladium(II) compound and alkali metal salt of aminoalkoxide, or halogenated palladium(II) compound and alkali metal salt of aminoalkoxide. The process for preparing palladium nano-particles comprises thermally decomposing the palladim(II) aminoalkoxide compound or hydrate thereof at 100 to 300 deg.C under an organic compound containing an electron donor element.
Abstract:
PURPOSE: A method for forming a hydroxyl monolayer on a substrate is provided to make a silicon wafer coated with only a hydroxide radical by making chlorine absorbed to the surface of the silicon wafer in a high vacuum atmosphere and by replacing the chlorine with the hydroxide radical while using water. CONSTITUTION: A halogen element of a gas state is absorbed to the surface of a substrate in a high vacuum atmosphere. Water is supplied to the surface of the substrate to which a halogen element is absorbed in a high vacuum atmosphere so that the halogen element is replaced with the hydroxide radical by reaction of water molecules and the halogen element to form a hydroxyl monolayer.