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    MICROWAVE ELECTRON GUN
    52.
    发明申请
    MICROWAVE ELECTRON GUN 审中-公开
    MICROWAVE电子枪

    公开(公告)号：WO1986001032A1

    公开(公告)日：1986-02-13

    申请号：PCT/US1985001304

    申请日：1985-07-08

    Applicant: MADEY, John, M., J. ,  WESTENSKOW, Glen, A.

    IPC: H01J23/34

    CPC classification number: H05H7/18 ,  H01J3/02 ,  H01J23/06

    Abstract: An electron gun (10) that suppresses the non-linear space charge forces and phase-dependant focusing forces that are chiefly responsible for the high emittance of conventional electron guns. The gun comprises a resonant microwave cavity (15), a cathode (12) mounted in the cavity wall, and a momentum analyzer system (17). The resonant microwave cavity, when supplied with microwave power, supports an electromagnetic field having a high-gradient electric component directed along an acceleration axis. The cavity is formed with an exit aperture (32) at a location relative to the cathode such that emitted electrons are accelerated along the axis and pass through the exit aperture. The cavity length is chosen to allow the microwave field within the cavity volume to accelerate the electrons to an energy of about 0.5-1.0 MeV prior to the electrons' passing through the aperture. Bunching is provided by the momentum analyzer. An electron emerging from the cavity has an energy determined by the phase of the microwave field at the time of that electron's emission. Those electrons having energies corresponding to the desired inital phase value are permitted to pass through the momentum analyzer, thereby forming a prebunched electron beam for injection into a linear accelerator.

    ELEKTRONENKANONE UND STRAHLUNGSERZEUGUNGSANLAGE
    53.
    发明公开
    ELEKTRONENKANONE UND STRAHLUNGSERZEUGUNGSANLAGE 有权
    STRAHLUNGSERZEUGUNGSANLAGE

    公开(公告)号：EP3053182A1

    公开(公告)日：2016-08-10

    申请号：EP14772094.0

    申请日：2014-09-16

    Applicant: Siemens Aktiengesellschaft

    Inventor： HEID, Oliver

    IPC: H01J3/02 ,  H01J35/04 ,  H01J35/06 ,  H01J35/14

    CPC classification number: H01J3/027 ,  H01J3/02 ,  H01J3/18 ,  H01J35/06 ,  H01J35/14

    Abstract: The invention relates to an electron gun for generating a flat electron beam, comprising a cathode with an emission surface which is curved about a central axis and which is designed to emit electrons. The electron gun further comprises an accelerating device for accelerating the electrons in a radial direction towards a target region on the central axis. Furthermore, the emission surface has a width in the azimuth direction and a height oriented perpendicularly to the width, said width being at least ten times greater than the height.

    Abstract translation: 本发明涉及一种用于产生扁平电子束的电子枪，包括具有围绕中心轴弯曲且被设计为发射电子的发射表面的阴极。 电子枪还包括加速装置，用于沿着径向加速电子朝向中心轴线上的目标区域。 此外，发射表面具有方位角方向上的宽度和垂直于宽度的高度，所述宽度比高度高至少十倍。

    Emitter device with focusing columns
    54.
    发明公开
    Emitter device with focusing columns 审中-公开
    与聚焦柱发射器装置

    公开(公告)号：EP1406285A3

    公开(公告)日：2006-08-02

    申请号：EP03255974.2

    申请日：2003-09-23

    Applicant: Hewlett-Packard Development Company, L.P.

    Inventor： Schut, David ,  Govyadinov, Alexander ,  Yang, Xiaofeng

    IPC: H01J3/02

    CPC classification number: H01J3/02 ,  H01J3/022 ,  H01J3/18 ,  H01J29/481 ,  H01J29/62 ,  H01J2237/3175

    Abstract: An emitter device (10) including a focusing array (20) with plural focusing columns (24) to focus emissions from one or more emitters (28) onto a target medium. Relative movement between the target medium and the focused emissions allows each focusing column to focus emissions over an area of the target medium encompassing the movement range. In a preferred embodiment, separate emitter, focusing array and target medium chips are used. The focusing array may be moveable, or in a particularly preferred embodiment, is affixed to the emitter chip, in which case the target medium chip is movable or the focusing array includes beam direction control.

    MICROWAVE ELECTRON GUN
    57.
    发明授权
    MICROWAVE ELECTRON GUN 失效
    MICROWAVE电子枪

    公开(公告)号：EP0187852B1

    公开(公告)日：1992-06-03

    申请号：EP85903901.8

    申请日：1985-07-08

    Applicant: MADEY, John, M., J. ,  WESTENSKOW, Glen, A.

    Inventor： MADEY, John, M., J. ,  WESTENSKOW, Glen, A.

    IPC: H01J23/34 ,  H01J23/16 ,  H01J25/00 ,  H01J25/10 ,  H01J25/12 ,  H01J29/54 ,  H01J29/70 ,  H01J29/76 ,  H01J40/00

    CPC classification number: H05H7/18 ,  H01J3/02 ,  H01J23/06

    Abstract: An electron gun (10) that suppresses the non-linear space charge forces and phase-dependant focusing forces that are chiefly responsible for the high emittance of conventional electron guns. The gun comprises a resonant microwave cavity (15), a cathode (12) mounted in the cavity wall, and a momentum analyzer system (17). The resonant microwave cavity, when supplied with microwave power, supports an electromagnetic field having a high-gradient electric component directed along an acceleration axis. The cavity is formed with an exit aperture (32) at a location relative to the cathode such that emitted electrons are accelerated along the axis and pass through the exit aperture. The cavity length is chosen to allow the microwave field within the cavity volume to accelerate the electrons to an energy of about 0.5-1.0 MeV prior to the electrons' passing through the aperture. Bunching is provided by the momentum analyzer. An electron emerging from the cavity has an energy determined by the phase of the microwave field at the time of that electron's emission. Those electrons having energies corresponding to the desired inital phase value are permitted to pass through the momentum analyzer, thereby forming a prebunched electron beam for injection into a linear accelerator.

    ELEKTRONENKANONE UND STRAHLUNGSERZEUGUNGSANLAGE
    58.
    发明申请
    ELEKTRONENKANONE UND STRAHLUNGSERZEUGUNGSANLAGE 审中-公开
    电子枪辐射发电厂

    公开(公告)号：WO2015074781A1

    公开(公告)日：2015-05-28

    申请号：PCT/EP2014/069663

    申请日：2014-09-16

    Applicant: SIEMENS AKTIENGESELLSCHAFT

    Inventor： HEID, Oliver

    IPC: H01J3/02 ,  H01J35/04 ,  H01J35/06 ,  H01J35/14

    CPC classification number: H01J3/027 ,  H01J3/02 ,  H01J3/18 ,  H01J35/06 ,  H01J35/14

    Abstract: Eine Elektronenkanone zur Erzeugung eines Elektronen-Flachstrahls umfasst eine Kathode mit einer Emissionsfläche, die um eine Zentralachse gekrümmt ist und dazu ausgebildet ist, Elektronen zu emittieren. Die Elektronenkanone umfasst weiterhin eine Beschleunigungsvorrichtung zur Beschleunigung der Elektronen in einer radialen Richtung hin zu einem Zielbereich an der Zentralachse. Außerdem weist die Emissionsfläche in azimutaler Richtung eine Breite und eine senkrecht zur Breite orientierte Höhe auf, wobei die Breite mindestens zehnmal so groß ist wie die Höhe.

    Abstract translation: 用于产生电子束的电子枪包括具有发射表面，该表面是弯曲的围绕中心轴线，并适合于发射电子的扁平阴极。 所述电子枪还包括用于在所述中心轴线朝向目标区域在径向方向上加速电子的加速装置。 另外，在方位角方向上的发射区域并垂直于宽度与高度取向的宽度，所述宽度至少10倍的高度一样大。

    電子銃又はイオン銃の取扱方法および収容体
    59.
    发明申请
    電子銃又はイオン銃の取扱方法および収容体 审中-公开
    用于处理电子枪或离子枪的外壳和方法

    公开(公告)号：WO2012127963A1

    公开(公告)日：2012-09-27

    申请号：PCT/JP2012/054119

    申请日：2012-02-21

    Applicant: 電気化学工業株式会社 ,  森下 利幸 ,  照井 良典 ,  廣川 晋平

    Inventor： 森下　利幸 ,  照井　良典 ,  廣川　晋平

    IPC: H01J37/06 ,  H01L21/027

    CPC classification number: H01R43/26 ,  H01J3/02 ,  H01J37/06 ,  H01J37/065 ,  H01J37/067 ,  H01J37/07 ,  H01J37/08 ,  Y10T29/49117

    Abstract: 本発明は、あらかじめ陰極（１）と陽極（９）とを組み込んで組立て、前記陰極と前記陽極とを組み込んだ状態で保管、輸送可能な荷電粒子銃（ＥＧ）において、前記荷電粒子銃を保管、輸送する際に、前記陰極と前記陽極とを導体（１１）で接続することを特徴とする。これにより、保管、輸送中に発生した静電気が引き起こす放電によって、荷電粒子銃の電極先端が損傷することを防止できるようになった。

    Abstract translation: 本发明是一种带电粒子枪（EG），其中负极（1）和正极（9）预先集成并组装，并且可以在负极和 正极集成在一起，其中在带电粒子枪的储存和运输期间，负极和正极通过导体（11）连接。 由此，可以防止带电粒子枪的电极头在储存和运输期间由静电引起的放电损坏。

    OZONE AND PLASMA GENERATION USING ELECTRON BEAM TECHNOLOGY
    60.
    发明申请
    OZONE AND PLASMA GENERATION USING ELECTRON BEAM TECHNOLOGY 审中-公开
    使用电子束技术的臭氧和等离子体生成

    公开(公告)号：WO2012083184A1

    公开(公告)日：2012-06-21

    申请号：PCT/US2011/065523

    申请日：2011-12-16

    Applicant: ADVANCED ELECTRON BEAMS, INC. ,  BAKHTARI, Kaveh

    Inventor： BAKHTARI, Kaveh

    IPC: H01L21/306

    CPC classification number: B01J19/085 ,  C01B13/10 ,  H01J3/02 ,  H01J33/00 ,  H01J37/3233 ,  H01J37/32357 ,  H01J37/32816

    Abstract: This invention proposes, among other things, systems and methods for providing ozone generators or plasma generators that generate an electric field in an electron generation chamber that is separate from a reaction chamber. An electron beam emitter in an electron generation chamber is configured to emit a beam of electrons and is separated from the reaction chamber by an electron permeable barrier that provides a window through which the beam of electrons passes. The electrons are accelerated to the required energy in the electron generation chamber and transmitted through the barrier to the reaction chamber, where an input gas source introduces an input gas into the reaction chamber. The input gas may react with the beam of electrons inside the reaction chamber to form an output gas comprising a plasma or a concentration of ozone, and the output gas passes from the reaction chamber to a wafer processing chamber.

    Abstract translation: 本发明尤其提出了用于提供在与反应室分离的电子发生室中产生电场的臭氧发生器或等离子体发生器的系统和方法。 电子发生室中的电子束发射器被配置为发射电子束，并且通过电子可透过的屏障与反应室分离，该屏障提供电子束通过的窗口。 电子被加速到电子发生室中所需的能量，并通过势垒传递到反应室，其中输入气体源将输入气体引入反应室。 输入气体可以与反应室内的电子束反应形成包含等离子体或浓度的臭氧的输出气体，并且输出气体从反应室通到晶片处理室。

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