公开(公告)号：KR1020090032926A

公开(公告)日：2009-04-01

申请号：KR1020080042432

申请日：2008-05-07

Applicant: 전자부품연구원

Inventor： 이국녕 ,  황학인 ,  이대성 ,  정석원 ,  이경일 ,  홍성민

IPC: B81B7/02 ,  B81B7/00

Abstract: A micro heater and a manufacturing method thereof are provided to lower the power consumption by maximizing the thermal isolation effect, and to use the micro heater as the excellent infrared light source. A micro heater comprises a heater wiring(130) which is separated from substrate, an electrode pad(140) which authorizes the voltage in the bi end of the heater wiring, and a support pillar(150) which supports the heater wiring. The heater wiring includes an insulating layer which electrically insulates substrate and heater wiring; and a metal layer which is evaporated on the insulating layer and flows current.

Abstract translation: 提供微加热器及其制造方法，通过最大化隔热效果来降低功耗，并且使用微加热器作为优异的红外光源。 微加热器包括与基板分离的加热器布线（130），授权加热器布线的双端电压的电极焊盘（140）和支撑加热器布线的支撑柱（150）。 加热器布线包括使基板和加热器布线电绝缘的绝缘层; 以及在绝缘层上蒸发并流过电流的金属层。

公开(公告)号：KR100877076B1

公开(公告)日：2009-01-09

申请号：KR1020070052620

申请日：2007-05-30

Applicant: 전자부품연구원

Inventor： 조진우 ,  신진국 ,  한종훈 ,  장세홍 ,  이경일 ,  서문석 ,  이유진 ,  이철승 ,  김성현

IPC: G01R1/067 ,  G01R1/073 ,  H01L21/66

Abstract: 본 발명은 유리잉크 코팅법을 이용한 프로브카드용 탐침의 절연방법에 관한 것으로, 보다 자세하게는 고집적화되는 반도체 칩 및 디스플레이 회로검사에 사용되는 프로브카드용 탐침 상호 간에 절연성을 확보하기 위한 방법에 관한 것이다.
본 발명의 유리잉크 코팅법을 이용한 프로브카드용 탐침의 절연방법은 프로브카드용 탐침을 절연하는 방법에 있어서, 도금 또는 에칭 공정으로 탐침을 제작하는 단계; 상기 탐침을 크리닝한 후, 유리잉크를 이용하여 코팅하는 단계; 상기 코팅된 탐침의 양끝을 연마하여 프로브 유닛에 삽입하는 단계; 및 상기 탐침을 에폭시로 고정한 후, 상기 프로브 유닛을 PCB 회로부에 연결시키는 단계를 포함한다.
프로브카드, 탐침, 절연, 유리잉크, 에폭시

公开(公告)号：KR100848262B1

公开(公告)日：2008-07-25

申请号：KR1020070053723

申请日：2007-06-01

Applicant: 전자부품연구원

Inventor： 이경일 ,  조진우 ,  김성현 ,  한종훈 ,  서문석 ,  이철승 ,  신진국

IPC: G02F1/1345

CPC classification number: G02F1/1309 ,  B41J2/14 ,  B41J2/1642 ,  G02F1/1303 ,  G03F7/0002 ,  H04N5/225

Abstract: A minute pattern transfer apparatus with the variable line path is provided to form the patterns with various line paths by controlling the interval between probes. An ink preserving member(320) preserves ink. An ink transmitting member(330) transmits the ink to a probe member. The probe member(340) transfers the ink introduced from the ink transmitting member. A driving member controls the interval formed at the probe member. The probe member includes a space for preserving the ink transmitted from the ink preserving member. Plural probes(341) transfer the ink. A spring(370) is connected with the probe member in order to support the motion of the probe. Plural probes are formed in parallel to each other. The driving member includes a magnet fixed to the probe member. A coil is located at the upper portion of the magnet and makes the current flow.

Abstract translation: 提供具有可变线路径的微小图案转印装置，通过控制探针之间的间隔来形成具有各种线路径的图案。 油墨保存构件（320）保留油墨。 墨水传送部件（330）将墨水传送到探针部件。 探针构件（340）传送从墨水传送构件引入的墨。 驱动构件控制在探针构件上形成的间隔。 探针构件包括用于保存从保墨构件透过的墨的空间。 多个探头（341）传送墨水。 弹簧（370）与探针构件连接以便支撑探针的运动。 多个探针彼此平行地形成。 驱动构件包括固定到探针构件的磁体。 线圈位于磁体的上部并使电流流动。

公开(公告)号：KR1020080006911A

公开(公告)日：2008-01-17

申请号：KR1020060066245

申请日：2006-07-14

Applicant: 전자부품연구원

Inventor： 서문석 ,  신진국 ,  이철승 ,  이경일

IPC: G01Q60/38 ,  G01Q60/24

CPC classification number: G01Q60/38 ,  G01Q70/12

Abstract: An AFM(Atomic Force Microscope) cantilever probe and a method for manufacturing the same are provided to facilitate setting of thickness of the cantilever with the microscopic probe and obtain desired natural resonance frequency of the cantilever. An AFM(Atomic Force Microscope) cantilever probe(200) comprises a handling part(240), a cantilever part(230), a probe part(210), and a probe(220). The handling part is made of a semiconductor substrate. The cantilever is elongated in bar-shape on the bottom of the handling part. The probe part, elongating on one side of the cantilever part, is shaped in vertically projected peak. The probe, provided on the peak of the probe part, makes contact with a surface of an analyzing object.

Abstract translation: 提供了一种AFM（原子力显微镜）悬臂探头及其制造方法，以便于利用微型探针设置悬臂的厚度，并获得悬臂的所需天然共振频率。 AFM（原子力显微镜）悬臂探针（200）包括处理部分（240），悬臂部分（230），探针部分（210）和探针（220）。 处理部由半导体基板构成。 悬臂在处理部分的底部呈杆形伸长。 在悬臂部分的一侧伸长的探针部分成形为垂直投影的峰。 在探针部分的峰上提供的探针与分析对象的表面接触。

公开(公告)号：KR1020070009789A

公开(公告)日：2007-01-19

申请号：KR1020050063672

申请日：2005-07-14

Applicant: 전자부품연구원

Inventor： 서문석 ,  신진국 ,  이철승 ,  김성현 ,  최영진 ,  이경일 ,  조진우

IPC: G01Q60/38 ,  H01L21/027 ,  H01L21/31 ,  H01L21/324

CPC classification number: G01Q60/38 ,  H01L21/0273 ,  H01L21/31 ,  H01L21/324

Abstract: A probe of an AFM(Atomic Force Microscope) cantilever using a ferroelectric is provided to precisely measure the electric polarization of the ferroelectric by using the ferroelectric in the probe of the cantilever. A probe of an AFM(Atomic Force Microscope) cantilever using a ferroelectric includes a cantilever support(100), an insulation layer(110), a metal layer(120), and a ferroelectric(130). The insulation layer is formed on the cantilever support. The metal layer is formed on the insulation layer. The ferroelectric is formed at the tip head of the metal layer. The ferroelectric has a domain of 180 degrees. The ferroelectric uses a PZT.

Abstract translation: 提供使用铁电体的AFM（原子力显微镜）悬臂的探针，通过在悬臂的探针中使用铁电体来精确测量铁电体的电极化。 使用铁电体的AFM（原子力显微镜）悬臂的探针包括悬臂支撑件（100），绝缘层（110），金属层（120）和铁电体（130）。 绝缘层形成在悬臂支架上。 金属层形成在绝缘层上。 铁电体形成在金属层的尖端处。 铁电体具有180度的域。 铁电使用PZT。

公开(公告)号：KR1020050020052A

公开(公告)日：2005-03-04

申请号：KR1020030057695

申请日：2003-08-20

Applicant: 전자부품연구원

Inventor： 서문석 ,  신진국 ,  최영진 ,  이경일

IPC: G01N13/16

Abstract: PURPOSE: A method for forming a channel of a cantilever for an atomic force microscope having an FET is provided to reduce a width of a channel of the cantilever without using an electric beam lithography process. CONSTITUTION: A method for forming a channel of a cantilever for an atomic force microscope having an FET includes forming a probe at a front end of the cantilever upwardly extending from a supporting part. A channel is formed at a lower region of the probe of the cantilever. At least two insulation layers(120) are stacked on an upper surface of a silicon layer(110) in which first conductive impurities are doped. The channel is formed at the silicon layer(110). The two insulation layers(120) are formed by using mutually different materials.

Abstract translation: 目的：提供一种用于形成具有FET的原子力显微镜的悬臂的通道的方法，以便不使用电子束光刻工艺来减小悬臂的通道的宽度。 构成：用于形成具有FET的原子力显微镜的悬臂的通道的方法包括在悬臂的前端形成从支撑部向上延伸的探针。 在悬臂的探针的下部区域形成有通道。 至少两个绝缘层（120）堆叠在其中掺杂有第一导电杂质的硅层（110）的上表面上。 沟道形成在硅层（110）处。 两个绝缘层（120）通过使用相互不同的材料形成。

公开(公告)号：KR100463882B1

公开(公告)日：2004-12-31

申请号：KR1020020075821

申请日：2002-12-02

Applicant: 전자부품연구원

Inventor： 이대성 ,  이경일 ,  황학인

IPC: G01J5/20

Abstract: PURPOSE: A millimeter wave detection sensor is provided to increase sensitiveness of the sensor by comparing a reference voltage for a transition temperature of a temperature sensor with a value of a voltage for a measured heater temperature and adjusting a heater temperature to the transition temperature of the temperature sensor. CONSTITUTION: A millimeter wave detection sensor includes a first antenna(31) and a second antenna(32), a heater(41), a temperature sensor(40), an insulating layer, a first electrode port(61) and a second electrode port(62), a third electrode port(81) and a fourth electrode port(82), and a thermocouple temperature sensor(70). The first antenna(31) and the second antenna(32) are formed on an upper of a silicon substrate(100). The heater(41) is formed between the first antenna(31) and the second antenna(32) such that the heater(41) makes contact with the first antenna(31) and the second antenna(32).

Abstract translation: 目的：提供毫米波检测传感器以通过将用于温度传感器的转变温度的参考电压与用于测量的加热器温度的电压值进行比较并且将加热器温度调节到所述传感器的转变温度来增加传感器的灵敏度 温度感应器。 一种毫米波检测传感器，包括第一天线（31）和第二天线（32），加热器（41），温度传感器（40），绝缘层，第一电极端口（61）和第二电极 （62），第三电极端口（81）和第四电极端口（82）以及热电偶温度传感器（70）。 第一天线（31）和第二天线（32）形成在硅衬底（100）的上部。 加热器41形成在第一天线31​​和第二天线32之间，使得加热器41与第一天线31​​和第二天线32接触。

公开(公告)号：KR1020040046545A

公开(公告)日：2004-06-05

申请号：KR1020020074493

申请日：2002-11-27

Applicant: 전자부품연구원

Inventor： 이경일 ,  이대성 ,  황학인

IPC: H01L29/84

Abstract: PURPOSE: A diaphram manufacturing method for a micro device is provided to improve the stability of a diaphram structure by forming an octagonal diaphram using an etching mask having a cross type pattern. CONSTITUTION: A low stress etch stop layer(110) is formed on a silicon substrate(100). An etching mask layer(120) is formed at the lower portion of the silicon substrate. A cross type pattern(150) is formed at the center portion of the etch mask layer for partially exposing the silicon substrate. A diaphram for a micro device is formed by carrying out anisotropic etching process on the silicon substrate exposed through the cross type pattern. Preferably, the diaphram of the low stress etch stop layer is the shape of an octagonal structure.

Abstract translation: 目的：提供一种微型装置的制造方法，以通过使用具有交叉型图案的蚀刻掩模通过形成八边形二膜来提高双层结构的稳定性。 构成：在硅衬底（100）上形成低应力蚀刻停止层（110）。 在硅衬底的下部形成蚀刻掩模层（120）。 在蚀刻掩模层的中心部分处形成交叉型图案（150），以部分地暴露硅衬底。 通过在通过十字型图案曝光的硅衬底上进行各向异性蚀刻工艺，形成微器件的膜。 优选地，低应力蚀刻停止层的膜是八边形结构的形状。

公开(公告)号：KR1020040021259A

公开(公告)日：2004-03-10

申请号：KR1020020052856

申请日：2002-09-03

Applicant: 전자부품연구원

Inventor： 이대성 ,  이경일 ,  황학인

IPC: G01R29/08

CPC classification number: G01R21/04 ,  G01K11/006

Abstract: PURPOSE: A microwave power sensor and a fabricating method thereof are provided to perform easily an impedance matching operation by connecting a heating resistor to an input terminal and forming thermocouples at both sides of the heating resistor. CONSTITUTION: A microwave power sensor includes a semiconductor substrate(100), a membrane(20), the first and the second thermocouples(31,32), an RF input terminal(10), a heating resistor(12), the first and the second ground plates(11a,11b), the third ground plate(13), and the first and the second output terminals(51,52). The semiconductor substrate(100) includes an oxide layer. The membrane(20) is formed on a predetermined region of the semiconductor substrate. The first and the second thermocouples(31,32) are formed on the membrane. The RF input terminal(10) is formed on the oxide layer. The heating resistor(12) is connected to the RF input terminal. The first and the second ground plates(11a,11b) are formed on the oxide layer corresponding to both sides of the RF input terminal. The third ground plate(13) is connected to the RF input terminal and the first and the second ground plates. The first and the second output terminals(51,52) are connected to the first and the second thermocouples.

Abstract translation: 目的：提供微波功率传感器及其制造方法，通过将加热电阻器连接到输入端子并在加热电阻器的两侧形成热电偶来容易地进行阻抗匹配操作。 构成：微波功率传感器包括半导体衬底（100），膜（20），第一和第二热电偶（31,32），RF输入端子（10），加热电阻器（12），第一和 第二接地板（11a，11b），第三接地板（13）以及第一和第二输出端子（51,52）。 半导体衬底（100）包括氧化物层。 膜（20）形成在半导体衬底的预定区域上。 第一和第二热电偶（31,32）形成在膜上。 RF输入端（10）形成在氧化物层上。 加热电阻器（12）连接到RF输入端子。 第一和第二接地板（11a，11b）形成在与RF输入端子的两侧对应的氧化物层上。 第三接地板（13）连接到RF输入端子和第一和第二接地板。 第一和第二输出端子（51,52）连接到第一和第二热电偶。

公开(公告)号：KR1020030083927A

公开(公告)日：2003-11-01

申请号：KR1020020022329

申请日：2002-04-23

Applicant: 전자부품연구원

Inventor： 이경일 ,  박효덕

IPC: G02B26/08

Abstract: PURPOSE: A micro actuator and a fabrication method thereof are provided, which has an amplified displacement by forming electrodes with different polarity at a zigzag prolonged part. CONSTITUTION: The first and the second anchor(15a,15b) are fixed on the upper part of a substrate(10) by being separated each other. A zigzag prolonged part is formed in a zigzag shape from the first anchor to the second anchor, and is floated from the substrate, and includes a stacked structure of a bottom electrode and a piezoelectric film. The first top electrode group has top electrodes with different polarity by being separated on the piezoelectric film of the zigzag prolonged part prolonged from the first anchor. And the second top electrode group is symmetrical to the first top electrode group, and has top electrodes with different polarity on the piezoelectric film of the zigzag prolonged part prolonged from the second anchor.

Abstract translation: 目的：提供一种微型致动器及其制造方法，其通过在锯齿形延长部分形成具有不同极性的电极而具有放大位移。 构成：第一和第二锚（15a，15b）通过彼此分离地固定在基板（10）的上部。 之字形延长部分从第一锚固件到第二锚固件以锯齿形形成，并且从基板浮起，并且包括底部电极和压电膜的堆叠结构。 第一顶部电极组具有通过在从第一锚点延伸的之字形延长部分的压电膜上分离而具有不同极性的顶部电极。 并且第二顶部电极组与第一顶部电极组对称，并且在Zigzag延长部分的压电膜上具有从第二个锚点延伸的具有不同极性的顶部电极。