公开(公告)号：WO2005091331A3

公开(公告)日：2006-09-28

申请号：PCT/US2005008003

申请日：2005-03-10

Applicant: BROOKS AUTOMATION INC ,  ARNOLD PAUL C ,  RUTT PAUL M

Inventor： ARNOLD PAUL C ,  RUTT PAUL M

IPC: G01L21/32 ,  H01J33/00 ,  H01J41/00 ,  H01J41/04

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.

Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积并将电子保持在阳极区域中的阳极。 电离计可以具有多个电子源和/或集电极。 集电极可以位于阳极体积内或阳极体积外。 电离计可以具有用于基于质荷比分离离子的质量过滤器。 电离计可以是衡量压力的Bayard-Alpert型，也可以是确定气体类型的残留气体分析仪。

公开(公告)号：WO2006094687A1

公开(公告)日：2006-09-14

申请号：PCT/EP2006/001864

申请日：2006-03-01

Applicant: INFICON GMBH ,  KNAPP, Wolfram ,  WÜEST, Martin

Inventor： KNAPP, Wolfram ,  WÜEST, Martin

IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J1/30 ,  H01J1/304 ,  H01J41/00 ,  H01J41/02 ,  H01J41/04 ,  H01J41/06 ,  H01J41/08 ,  H01J41/10 ,  H01J19/00 ,  H01J19/02 ,  H01J19/04 ,  H01J19/10

CPC classification number: G01L21/32 ,  G01L21/12 ,  H01J1/3042 ,  H01J41/04

Abstract: An electron-emitting cathode (6) consists of an electrically conducting emitter layer (7) attached to a side wall (2) which consists of stainless steel and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (lie) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (V G ) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (V A ) and is regulated in such a way that an anode current (I A ) is kept constant. The emitter layer (7) may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

Abstract translation: 电子发射阴极（6）由附着在由不锈钢构成的侧壁（2）上的导电发射极层（7）和门 发射极层（7）。 阴极（6）围绕包含圆柱形栅状阳极（5）的反应区域（3）和由直轴向丝线组成的中心离子收集器（4）。 通过电流计（11）测量反映在反应区域（3）中气体密度的离子集电极电流（11a），同时栅极电压（V SUB）保持在接地电压 的发射极层（7）和较高的阳极电压（V SUB），并且以使得阳极电流（I SUB）保持恒定的方式被调节。 发射极层（7）可以由碳纳米管，类金刚石，金属或金属或半导体材料的混合物组成，例如可以用碳化物或钼涂覆的硅。 然而，发射体表面也可以是通过例如化学蚀刻使侧壁的内表面的一部分变粗糙。 栅极（9）可以是栅格，或者它可以由分布在发射极区域上的覆盖隔离物的金属膜的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。

公开(公告)号：KR2019920007024U

公开(公告)日：1992-04-22

申请号：KR2019900013907

申请日：1990-09-07

Applicant: 삼성에스디아이 주식회사

Inventor： 전일영

IPC: H01J41/00 ,  H01J29/48

公开(公告)号：WO2008070204A3

公开(公告)日：2008-10-09

申请号：PCT/US2007070765

申请日：2007-06-08

Applicant: ION APPLIC INC ,  KAYE WILLIAM J ,  STIMAC ROBERT M

Inventor： KAYE WILLIAM J ,  STIMAC ROBERT M

IPC: H01J49/26 ,  H01J41/00 ,  H01J49/00

CPC classification number: H01J49/0013 ,  G01N27/622 ,  H01J49/00 ,  H01J49/022

Abstract: By utilizing the combination of a unique electronic ion injection control circuit in conjunction with a particularly designed drift cell construction, the instantly disclosed ion mobility spectrometer achieves increased levels of sensitivity, while achieving significant reductions in size and weight. The instant IMS is of a much simpler and easy to manufacture design, rugged and hermetically sealed, capable of operation at high temperatures to at least 2500C, and is uniquely sensitive, particularly to explosive chemicals.

Abstract translation: 通过将独特的电子离子注入控制电路与特别设计的漂移单元结构相结合，即时公开的离子迁移谱仪实现了更高水平的灵敏度，同时实现了尺寸和重量的显着减小。 即时IMS具有更简单和易于制造的设计，坚固且密封，能够在高达至少250℃的高温下操作，并且是特别敏感的，特别是对于爆炸性化学品。

公开(公告)号：WO2005091330A3

公开(公告)日：2005-11-10

申请号：PCT/US0211321

申请日：2002-05-28

Applicant: INFICON INC

Inventor： ELLEFSON ROBERT E ,  FREES LOUIS C

IPC: G01L21/32 ,  H01J41/00 ,  H01J41/04

CPC classification number: H01J41/04

Abstract: In an ionization gauge, the effect of X-rays emitted when a collimated electron beam strikes grid surfaces in the gauge structure is reduced by a louvered beam stop. The louvered beam stop creates shadow regions having no X-rays, thus minimizing the amount of X-rays striking the collector plate and reducing the X-ray effect portion of the residual current.

Abstract translation: 在电离计中，当准直电子束撞击仪表结构中的栅格表面时发射的X射线的效果由百叶窗光束挡块减小。 百叶窗光束停止产生没有X射线的阴影区域，从而最小化撞击集电板的X射线的量并减少残余电流的X射线效应部分。

公开(公告)号：WO0221568A2

公开(公告)日：2002-03-14

申请号：PCT/US0126349

申请日：2001-08-23

Applicant: MCNC ,  GOODWIN JOHANSSON SCOTT H

Inventor： GOODWIN-JOHANSSON SCOTT H

IPC: F04D33/00 ,  H01J41/00

CPC classification number: F04D33/00

Abstract: A MEMS pumping device driven by electrostatic forces comprises a substrate having at least one substrate electrode disposed thereon. Affixed to the substrate is a moveable membrane that generally overlies the at least one substrate electrode. The moveable membrane comprises at least one electrode element and a biasing element. The moveable membrane includes a fixed portion attached to the substrate and distal portion extending from the fixed portion and being moveable with respect to the substrate electrode. A dielectric element is disposed between the at least one substrate electrode and the at least one electrode element of the moveable membrane to provide for electrical isolation. In operation, a voltage differential is established between the at least one substrate electrode and the at least one electrode element which displaces the moveable membrane relative to the substrate to thereby controllably distribute matter residing between the substrate and the distal portion of the moveable membrane. In a further embodiment the MEMS pumping devices comprise more that two moveable membranes that are configured so as to maximize flow in a desired direction. Additional embodiments include more than one electrode element disposed within the moveable membrane that are capable of individual and sequential biasing to improve overall net flow in the desired flow direction.

Abstract translation: 由静电力驱动的MEMS泵送装置包括其上设置有至少一个基板电极的基板。 粘附到基底上的是可移动的膜，其通常覆盖至少一个基底电极。 可动膜包括至少一个电极元件和偏置元件。 可移动膜包括附接到基底的固定部分和从固定部分延伸并可相对于基底电极移动的远端部分。 电介质元件设置在至少一个基板电极和可移动​​膜的至少一个电极元件之间以提供电隔离。 在操作中，在所述至少一个衬底电极和至少一个电极元件之间建立电压差，所述至少一个电极元件使可移动膜相对于衬底移位，从而可控地分布位于可移动膜的衬底和远端部分之间的物质。 在另一实施例中，MEMS抽吸装置包括更多的两个可移动膜，其被配置为使得在期望方向上的流量最大化。 另外的实施例包括设置在可移动膜内的多于一个电极元件，其能够单独和顺序偏置以改善期望流动方向上的整体净流量。

公开(公告)号：WO01080281A2

公开(公告)日：2001-10-25

申请号：PCT/US2001/011111

申请日：2001-04-06

IPC: H05H1/46 ,  B01J3/02 ,  H01J41/12 ,  H01J41/18 ,  H01L21/3065 ,  H01L21/31 ,  H05H1/14 ,  H01J41/00

CPC classification number: H01J41/18

Abstract: A stand-alone plasma vacuum pump for pumping gas from a low-pressure inlet to a high-pressure outlet, composed of: a housing enclosing one or more pumping regions located between the inlet and the outlet; a plurality of permanent magnet assemblies providing magnetic fields that extend in the pumping region between the inlet and the outlet, the magnetic field forming magnetic flux channels for guiding and confining plasmas; elements disposed for coupling microwave power into the flux channels to heat electrons, ionize gas, and accelerate plasma ions in a direction from the inlet to the outlet; elements disposed for creating an electric in the magnetic flux channels to accelerate ions in the flux channels toward the outlet by momentum transfer; and a differential conductance baffle proximate to the outlet for promoting flow of plasma ions and neutral atoms to the outlet while impeding flow of neutral gas molecules in a direction from the outlet toward the inlet.

Abstract translation: 一种独立的等离子体真空泵，用于将气体从低压入口泵送到高压出口，所述等离子体真空泵由围绕位于入口和出口之间的一个或多个泵送区域的外壳组成; 多个永磁体组件，其提供在入口和出口之间的泵送区域中延伸的磁场，形成用于引导和限制等离子体的磁通通道的磁场; 用于将微波功率耦合到通量通道中以加热电子，离子化气体并在从入口到出口的方向加速等离子体离子的元件; 被设置用于在磁通量通道中产生电的元件，以通过动量传递将通量通道中的离子加速到出口; 以及靠近出口的差分电导挡板，用于促进等离子体离子和中性原子流到出口，同时阻止中性气体分子在从出口朝向入口的方向上的流动。

公开(公告)号：BG66799B1

公开(公告)日：2018-12-17

申请号：BG11172414

申请日：2014-03-24

Applicant: INST PO ELEKTRONIKA BAN

Inventor： DONKOV NIKOLAY

IPC: H01J41/00

Abstract: Устройствотозайонно-гетерноизпомпваненамираприложениеприфундаменталнии приложниизследванияв областтанафизиката, физико-химията, космическитеизследвания, кактои припроизводственитехнологиив нано- имикроелектрониката, медицината, вакуумнатаметалургия, електронно-лъчевитетехнологии. Устройствотозайонно-гетерноизпомпванесесъстоиотохлаждаемцилиндриченкорпусс воднариза, вобеманакойтосенамирадолнияформиращелектрод, изпълненвъвформатанафуния, наднегосаразположенинаразстояниеединнаддругпръстеновиденизточникнаелектронии цилиндриченанодсублиматор, катоелектромагнитаобхващавъншноохлаждаемиякорпус. Катода-източникнаелектроние галваничноизолиранотформиращияелектрод. Цилиндричниятанод-сублиматоре сдиаметърнаосноватадо 11 mm ивисочинаот 10 до 60 mm ие разположеннадкатода - зигзагообразенизточникнаелектронис диаметърдо 38 mm. Формиращиятелектродпредставлявафуниевиднотяло. Тойе дистанциранотосноватанаанодасублиматорнаразстояниеот 20 до 40 mm, адокатодае до 13 mm. Пристартовиналяганияпо-малкиот 5.10-1 Рав обеманакорпуса, йоннияттоккъмстенитемуе пропорционаленнаналяганетов обеманаустройството. Предимстванаустройствотозайонно-гетерноизпомпванеса, четое сголяманадеждности високаскоростнайонноизпомпване, бързи сигуренс възможностнаавтоматизиранетомустарти оптимизиранеразходанагетеренматериал. 4 претенции, 2 фигури

公开(公告)号：AT513196T

公开(公告)日：2011-07-15

申请号：AT06707346

申请日：2006-03-01

Applicant: INFICON GMBH

Inventor： KNAPP WOLFRAM ,  WUEEST MARTIN

IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J1/30 ,  H01J1/304 ,  H01J41/00 ,  H01J41/02 ,  H01J41/04

Abstract: An electron-emitting cathode (6) consists of an electricaly conducting emitter layer (7) attached to a side wall (2) and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (I IC ) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (Vc) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (V A ) and is regulated in such a way that an anode current (T A ) is kept constant. The emitter layer (7) may comprise an array of metal, e.g., nickel or molybdenum tips or consist essentially of a semiconductor material like silicon, preferably coated by, e.g., carbide, diamond-like carbon or molybdenum, or of carbon nanotubes or it may be a roughened surface portion of the side wall surface. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

公开(公告)号：IN170941B

公开(公告)日：1992-06-20

申请号：IN296DE1987

申请日：1987-04-09

Applicant: CHAURASIA UMA SHANKAR ,  CHAURASIA BHANU SHANKAR

Inventor： CHAURASIA UMA SHANKAR ,  CHAURASIA BHANU SHANKAR

IPC: H01J41/00