公开(公告)号：AU2003300771A8

公开(公告)日：2004-05-25

申请号：AU2003300771

申请日：2003-05-13

Applicant: BREWER SCIENCE INC

Inventor： DESHPANDE SHREERAM V ,  NOWAK KELLY A ,  BHAVE MANDER R ,  XU GU ,  MEADOR JIMMY D

IPC: C09D101/00 ,  C09D129/08 ,  G02B1/11 ,  G03F7/09 ,  H01L21/768 ,  C08F12/02 ,  C08F20/10 ,  C08F212/00 ,  C08F16/36

Abstract: New anti-reflective or fill compositions having improved flow properties are provided. The compositions comprise a styrene-allyl alcohol polymer and preferably at least one other polymer (e.g., cellulosic polymers) in addition to the styrene-allyl alcohol polymer. The inventive compositions can be used to protect contact or via holes from degradation during subsequent etching in the dual damascene process. The inventive compositions can also be applied to substrates (e.g., silicon wafers) to form anti-reflective coating layers having high etch rates which minimize or prevent reflection during subsequent photoresist exposure and developing.

公开(公告)号：AU2003282554A1

公开(公告)日：2004-05-04

申请号：AU2003282554

申请日：2003-10-07

Applicant: BREWER SCIENCE INC

Inventor： FOWLER MICHELLE ,  WINDSOR MICHELLE ,  NEEF CHARLES J ,  BHAVE MANDAR

IPC: C09B69/00 ,  G03F7/09

Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.

公开(公告)号：CA2462613A1

公开(公告)日：2003-05-08

申请号：CA2462613

申请日：2002-10-29

Applicant: BREWER SCIENCE INC

Inventor： SHIH WU-SHENG ,  LAMB JAMES E III

IPC: H05K3/22 ,  B81C1/00 ,  C08G59/68 ,  C08L63/00 ,  H01L21/027 ,  H01L21/3105 ,  H01L21/312 ,  H01L21/4763

Abstract: The present invention is directed towards planarization materials that produ ce little or no volatile byproducts during the hardening process when used in contact planarization process. The materials can be hardened by photo- orradiation or by heat during the planirization process, and they include on e or more types of monomers, oligomers, or mixtures thereof, an optional cross - linker, and an optional organic reactive solvents. The solvent, if used, is chemically reacted with the monomers or oligomers and thus becomes part of t he polymer matrix during the curing process. These materials can be used for damascene, dual damascene, bi-layer, and multi-layer applications, microelectromechanical system (MEMS), packaging, optical devices, photonics, optoelectronics, microelectronics, and sensor devices fabrication.

公开(公告)号：DE69807913T2

公开(公告)日：2003-01-30

申请号：DE69807913

申请日：1998-10-20

Applicant: BREWER SCIENCE INC

Inventor： SHAO XIE ,  HESTER COLIN ,  FLAIM D ,  BREWER L

IPC: G03F7/11 ,  C08G63/54 ,  C09D167/00 ,  G03F7/09 ,  G03C1/492 ,  E01B9/12

Abstract: Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (-CH2-) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.

公开(公告)号：AU4752901A

公开(公告)日：2002-02-25

申请号：AU4752901

申请日：2001-03-15

Applicant: BREWER SCIENCE INC

Inventor： XU GU ,  BREWER DAN W ,  LIMMER TIMOTHY ,  STRODER MIKE ,  FOWLER SHELLY ,  MAYO JONATHON

IPC: C08F2/46 ,  C08F8/00 ,  C08F8/32 ,  G03F7/00 ,  G03F7/033 ,  C08F212/08 ,  G03C1/72 ,  G03F9/00

Abstract: New polymers, compositions comprising these polymers, and methods of using these compositions are provided. The polymers comprise styrene and maleic anhydride monomers with at least some of the maleic anhydride monomers having certain functional groups bonded thereto. Preferred functional groups include those derived from adhesion promoters (e.g., 2-aminophenol), photoinitiators (e.g., 4-aminoacetophenone), and solubilizers (e.g., 4-aminobenzoic acid). The polymers can be incorporated according to conventional processes into compositions which are then used to form a color filter to be used in a liquid crystal display. The final color filter has a high resolution, is highly resistant to solvents typically used in the color filter manufacturing process, is strongly adhered to the color filter substrate, has superior optical clarity, is highly soluble in a wide range of alkali developers, and has excellent heat and UV light stability.

公开(公告)号：AU3478701A

公开(公告)日：2002-01-14

申请号：AU3478701

申请日：2001-02-02

Applicant: BREWER SCIENCE INC

Inventor： PAGEL RUSSELL T ,  MCCUTCHEON JEREMY W ,  KOHNE JEFFREY L

IPC: B05C5/00 ,  B05C5/02 ,  B05C11/10 ,  B65D47/22 ,  F16K7/06 ,  H01L21/00 ,  B65D37/00 ,  F16K7/04

Abstract: A dispenser (10) for flowable, viscous material (52) is provided which includes a reservoir (50) for the material (52) with an elongated, synthetic resin deformable outlet tube (80) presenting an outlet end (82) coupled to the reservoir (50). A flow-controlling assembly (16) including a tube-engaging element (84, 132, 150, 158) and an actuator linkage assembly (86, 130, 144, 154) allows precise on-off operation of the dispenser (10). In the flow-permitting position, the element (84, 132, 150, 158) is adjacent the tube (80). When it is desired to terminate material flow, the actuator linkage assembly (86, 130, 144, 154) is operated to cause the element (84, 132,150, 158) to move into deforming engagement with the tube (80) against a backing surface (41); continued movement of the element (84, 132, 150, 158) along the length of the tube (80) in a direction away from outlet end (82) generates a suction force causing material (52) adjacent the end (82) to be drawn into the confines of the tube (80). This prevents air-drying of the material (52) at outlet end (82), ensuring continued smooth operation of the dispenser (10) while minimizing material loss. Preferably, the assembly (16) applies resilient flow-blocking force against the outlet tube (80).

公开(公告)号：AU6790000A

公开(公告)日：2001-03-19

申请号：AU6790000

申请日：2000-08-17

Applicant: BREWER SCIENCE INC

Inventor： LAMB JAMES E III ,  SHAO XIE

IPC: H01L21/302 ,  H01L21/3065 ,  H01L21/312 ,  H01L21/3205 ,  H01L21/768 ,  H01L21/47 ,  H01L21/66

Abstract: An improved via and contact hole fill composition and method for using the composition in the dual damascene production of circuits is provided. Broadly, the fill compositions include a quantity of solid components including a polymer binder and a solvent system for the solid components. The boiling point of the solvent system is less than the cross-linking temperature of the composition. Preferred solvents for use in the solvent system include those selected from the group consisting of alcohols, ethers, glycol ethers, amides, ketones, and mixtures thereof. Preferred polymer binders are those having an aliphatic backbone and a molecular weight of less than about 80,000, with polyesters being particularly preferred. In use, the fill composition is applied to the substrate surfaces forming the contact or via holes as well as to the substrate surfaces surrounding the holes, followed by heating to the composition reflow temperature so as to cause the composition to uniformly flow into and cover the hole-forming surfaces and substrate surfaces. The composition is then cured, and the remainder of the dual damascene process is carried out.

公开(公告)号：DE69518171T2

公开(公告)日：2001-03-15

申请号：DE69518171

申请日：1995-12-14

Applicant: BREWER SCIENCE INC

Inventor： FLAIM TONY D ,  MEADOR JIM D ,  SHAO XIE ,  BREWER TERRY L

IPC: C08G59/16 ,  C08G59/14 ,  C08G59/40 ,  C08G59/68 ,  C08L63/00 ,  C09D163/00 ,  G03F7/09

Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.

公开(公告)号：DE69518171D1

公开(公告)日：2000-08-31

申请号：DE69518171

申请日：1995-12-14

Applicant: BREWER SCIENCE INC

Inventor： FLAIM TONY D ,  MEADOR JIM D ,  SHAO XIE ,  BREWER TERRY L

IPC: C08G59/16 ,  C08G59/14 ,  C08G59/40 ,  C08G59/68 ,  C08L63/00 ,  C09D163/00 ,  G03F7/09

Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.

公开(公告)号：CA2305461A1

公开(公告)日：1999-04-29

申请号：CA2305461

申请日：1998-10-20

Applicant: BREWER SCIENCE INC

Inventor： SHAO XIE ,  HESTER COLIN ,  FLAIM TONY D ,  BREWER TERRY L

IPC: G03F7/11 ,  C08G63/54 ,  C09D167/00 ,  G03F7/09 ,  G03C1/492

Abstract: Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a diand/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (-CH2-) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.