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公开(公告)号：JPS6122244B2
公开(公告)日：1986-05-30
申请号：JP17647980
申请日：1980-12-16
Applicant: Tokyo Shibaura Electric Co
Inventor： AIDA AKIRA
CPC classification number: G01J1/10
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公开(公告)号：KR102227868B1
公开(公告)日：2021-03-15
申请号：KR1020207015150A
申请日：2018-10-29
Applicant: 주식회사 스트라티오코리아
CPC classification number: G01J3/14 , G01B9/00 , G01J1/00 , G01J1/10 , G01J1/16 , G01J1/42 , G01J3/0202 , G01J3/0208 , G01J3/0289 , G01J3/0291 , G01J3/2803 , G02B27/1013 , G02B5/04 , G02B5/045
Abstract: 광을 분석하기 위한 장치는, 광을 수신하기 위한 입력 개구; 상기 입력 개구로부터의 광을 중계하도록 구성된 하나 이상의 렌즈의 제1 세트; 및 상기 하나 이상의 렌즈의 제1 세트로부터의 광을 분산시키도록 구성되는 프리즘 조립체를 포함한다. 상기 프리즘 조립체는 제1 프리즘, 상기 제1 프리즘과 구분되는 제2 프리즘, 및 상기 제1 프리즘 및 상기 제2 프리즘과 구분되는 제3 프리즘을 포함하는 복수의 프리즘을 포함한다. 상기 제1 프리즘은 상기 제2 프리즘과 기계적으로 커플링되고, 상기 제2 프리즘은 상기 제3 프리즘과 기계적으로 커플링된다. 상기 장치는 또한 상기 프리즘 조립체로부터 분산된 광을 포커싱하도록 구성된 하나 이상의 렌즈의 제2 세트; 및 상기 하나 이상의 렌즈의 제2 세트로부터의 광을 전기 신호들로 변환하도록 구성된 어레이 검출기를 포함한다.
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公开(公告)号：JP2018084423A
公开(公告)日：2018-05-31
申请号：JP2016225893
申请日：2016-11-21
Applicant: アズビル株式会社
Inventor： 森 雷太
CPC classification number: F23N5/082 , F23N2023/04 , F23N2023/08 , F23N2023/10 , F23N2023/40 , F23N2029/00 , F23N2029/22 , G01J1/0228 , G01J1/10 , G01J1/18 , G01J1/429 , G01J1/44 , G01J5/0014 , G01J5/0018 , G01J5/026 , G01J2001/444 , G01J2005/0048
Abstract: 【課題】簡単な構成で、かつ精度よく、火炎の有無を検出する。 【解決手段】感度パラメータ記憶部19に、火炎センサ1が有する既知の感度パラメータとして、基準の受光量Q 0 ,基準のパルス幅T 0 ,正規の放電の確率P 0 および非正規の放電の確率P N (P N1 ,P N2 ,P N3 )を記憶させておく。火炎センサ1に加えた駆動パルスPMのパルス数Nと、この駆動パルスPMを受けて火炎センサ1が放電したと判定された放電回数nとから、放電確率P(P=n/N)を算出する(放電確率演算部202)。この算出した放電確率Pと、既知の感度パラメータ(Q 0 ,T 0 ,P 0 ,P N (P N1 ,P N2 ,P N3 ))とを用いて、火炎センサ1が受けた光の単位時間当たりの受光量Qを求める(受光量演算部203)。 【選択図】 図1
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公开(公告)号：JP2012037267A
公开(公告)日：2012-02-23
申请号：JP2010175311
申请日：2010-08-04
Applicant: Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
Inventor： NANBA AKIHIRO , ONISHI FUJIO , TERUI YASUSHI
IPC: G01J1/44
Abstract: PROBLEM TO BE SOLVED: To provide a technology for detecting a quantity of light, which enables measurement in a wide dynamic range from a quantity of weak light to a quantity of intense light in a light quantity detecting apparatus for detecting a quantity of light.SOLUTION: In the light quantity detecting apparatus, a detection signal of a photon count type photo-detector is A/D converted. A threshold-value processing is carried out such that if the A/D converted detection signal is equal to or higher than a preset threshold value, the detection signal is transmitted to the subsequent photon counting circuit as it is, and if the detection signal is equal to or lower than the threshold value, a preset reference value is transmitted to the subsequent circuit. In the photon counting circuit, the number of photons or the quantity of light that has entered the photon count type photo-detector is obtained from the area of the wave shape of the detection signal obtained until the measurement of the quantity of light finishes.
Abstract translation: 要解决的问题：提供一种用于检测光量的技术，其能够在用于检测数量的光量检测装置中的从弱光量到强光量的宽动态范围内进行测量 光。 解决方案：在光量检测装置中，对光子计数型光检测器的检测信号进行A / D转换。 执行阈值处理，使得如果A / D转换的检测信号等于或高于预设阈值，则将检测信号原样传输到随后的光子计数电路，并且如果检测信号为 等于或低于阈值，则将预设的参考值发送到后续电路。 在光子计数电路中，从所获得的检测信号的波形的区域获得进入光子计数型光检测器的光子数量或光量，直到光量测量结束。 版权所有（C）2012，JPO＆INPIT
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公开(公告)号：US20180081022A1
公开(公告)日：2018-03-22
申请号：US15811473
申请日：2017-11-13
Applicant: ams AG
Inventor： David MEHRL , Kerry GLOVER
IPC: G01S3/786 , G01S5/16 , G01S3/782 , G01S3/781 , F24J2/38 , G01J1/42 , G01J1/10 , G01J1/04 , G01J1/02
CPC classification number: G01S3/7862 , F24S50/20 , G01J1/0242 , G01J1/0403 , G01J1/10 , G01J1/4204 , G01J1/4228 , G01S3/781 , G01S3/782 , G01S3/786 , G01S5/163
Abstract: A sensor arrangement comprises at least a first, a second, and a third light sensor. A three-dimensional framework comprises at least a first, a second, and a third connection means which are connected to the at least first, second, and third light sensor, respectively. The first, the second, and the third connection means are configured to align the at least first, second, and third light sensor along a first, second, and third face of a polyhedron-like volume, respectively, such that the sensor arrangement encloses the polyhedron-like volume. The invention also relates to a method for operating the sensor arrangement.
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Patent Agency Ranking
公开(公告)号：US09863815B2
公开(公告)日：2018-01-09
申请号：US14968289
申请日：2015-12-14
Applicant: BEIHANG UNIVERSITY
Inventor： Zheng Zheng , Xin Zhao , Lei Liu , Jiansheng Liu
IPC: G01B9/02 , G01J11/00 , G01J3/42 , G01J3/10 , G01J3/447 , G01J3/02 , G01J3/433 , G01J1/10 , G02F1/365 , H01S3/00 , G02F1/35 , G02F1/37 , H01S3/067 , H01S3/11 , H01S3/23 , H01S3/08
CPC classification number: G01J11/00 , G01J1/10 , G01J3/0224 , G01J3/0245 , G01J3/10 , G01J3/108 , G01J3/42 , G01J3/433 , G01J3/447 , G02F1/353 , G02F1/365 , G02F1/37 , G02F2203/13 , H01S3/0092 , H01S3/06791 , H01S3/0809 , H01S3/1106 , H01S3/1112 , H01S3/2391
Abstract: A method and a system for measuring an optical asynchronous sample signal. The system for measuring an optical asynchronous sampling signal comprises a pulsed optical source capable of emitting two optical pulse sequences with different repetition frequencies, a signal optical path, a reference optical path, and a detection device. Since the optical asynchronous sampling signal can be measured by merely using one pulsed optical source, the complexity and cost of the system are reduced. A multi-frequency optical comb system using the pulsed optical source and a method for implementing the multi-frequency optical comb are further disclosed.
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公开(公告)号：US20170158130A1
公开(公告)日：2017-06-08
申请号：US14958310
申请日：2015-12-03
Applicant: Dura Operating, LLC
Inventor： Rajashekhar Patil , Gordon M. Thomas , Aaron E. Thompson
CPC classification number: G07C5/0816 , B60Q11/00 , G01J1/10 , G01J1/32 , G01J1/4228 , G01J2001/4247 , G07C5/0808
Abstract: A system to detect or determine vehicle lamp performance and a method using the system is described. The system includes a first optical sensor having a field of view which includes the location of a vehicle lamp or into which light from a vehicle lamp is emitted, the optical sensor providing an output indicative of vehicle lamp performance; and a controller in communication with the first optical sensor to receive the output, the controller including at least one processor adapted to analyze the optical sensor output and provide a control output at least when the optical sensor output is indicative that the vehicle lamp performance is below a threshold.
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88.发明申请APPARATUS FOR MONITORING VACUUM ULTRAVIOLET AND PLASMA PROCESS EQUIPMENT INCLUDING THE SAME 审中-公开用于监测真空超声波和等离子体处理装置的装置公开(公告)号：US20160379802A1
公开(公告)日：2016-12-29
申请号：US15161432
申请日：2016-05-23
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Sejin OH , Dougyong SUNG , Kiho HWANG , Yun-Kwang JEON
CPC classification number: G01J1/0407 , C23C16/50 , C23C16/52 , G01J1/0295 , G01J1/0422 , G01J1/0492 , G01J1/10 , G01J1/22 , G01J1/26 , G01J1/429 , G01J2001/242 , H01J37/32935 , H01J37/32972 , H01J37/3299
Abstract: An apparatus for monitoring vacuum ultraviolet, the apparatus including a light controller including a slit, the slit to transmit plasma emission light emitted from a process chamber in which a plasma process is performed on a substrate; a light selector adjacent to the light controller, the light selector selectively to transmit light, having a predetermined wavelength band, of the plasma emission light passing through the slit; a light collector to concentrate the light selectively transmitted by the light selector; and a detector to detect the light concentrated by the light collector, the light selectively transmitted by the light selector being vacuum ultraviolet.
Abstract translation: 一种用于监测真空紫外线的装置，该装置包括具有狭缝的光控制器，该狭缝用于传输从其中在基板上执行等离子体处理的处理室发射的等离子体发射光; 与所述光控制器相邻的光选择器，所述光选择器选择性地透射通过所述狭缝的等离子体发射光的具有预定波长带的光; 集光器，用于集中由选择器选择性地传输的光; 以及检测器，用于检测由光收集器集中的光，由选择器选择性地透射的光是真空紫外线。
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89.发明授权公开(公告)号：US09273994B2
公开(公告)日：2016-03-01
申请号：US14475434
申请日：2014-09-02
Applicant: BEIHANG UNIVERSITY
Inventor： Zheng Zheng , Xin Zhao , Lei Liu , Jiansheng Liu
CPC classification number: G01J11/00 , G01J1/10 , G01J3/0224 , G01J3/0245 , G01J3/10 , G01J3/108 , G01J3/42 , G01J3/433 , G01J3/447 , G02F1/353 , G02F1/365 , G02F1/37 , G02F2203/13 , H01S3/0092 , H01S3/06791 , H01S3/0809 , H01S3/1106 , H01S3/1112 , H01S3/2391
Abstract: A method and a system for measuring an optical asynchronous sample signal. The system for measuring an optical asynchronous sampling signal comprises a pulsed optical source capable of emitting two optical pulse sequences with different repetition frequencies, a signal optical path, a reference optical path, and a detection device. Since the optical asynchronous sampling signal can be measured by merely using one pulsed optical source, the complexity and cost of the system are reduced. A multi-frequency optical comb system using the pulsed optical source and a method for implementing the multi-frequency optical comb are further disclosed.
Abstract translation: 一种用于测量光学异步采样信号的方法和系统。 用于测量光学异步采样信号的系统包括能够发射具有不同重复频率的两个光脉冲序列的脉冲光源，信号光路，参考光路和检测装置。 由于可以通过仅使用一个脉冲光源来测量光学异步采样信号，所以系统的复杂性和成本降低。 进一步公开了使用脉冲光源的多频光梳系统和实现多频光梳的方法。
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公开(公告)号：US20150111200A1
公开(公告)日：2015-04-23
申请号：US14500682
申请日：2014-09-29
Applicant: APPLIED BIOSYSTEMS, LLC
Inventor： J. Michael PHILLIPS , Kevin S. Bodner , Aldrich N. K. Lau , Mark F. Oldham , Donald R. Sandell , David H. Tracy , Steven J. Boege
CPC classification number: G01N21/278 , B82Y15/00 , G01J1/10 , G01N21/01 , G01N21/4785 , G01N21/6452 , G01N21/76 , G01N2201/06113 , G01N2201/0612 , G01N2201/062 , G01N2201/0691 , G01N2201/0697 , Y10S977/943 , Y10S977/949
Abstract: The present teachings provide for systems, and components thereof, for detecting and/or analyzing light. These systems can include, among others, optical reference standards utilizing luminophores, such as nanocrystals, for calibrating, validating, and/or monitoring light-detection systems, before, during, and/or after sample analysis.
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