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公开(公告)号：KR100377705B1
公开(公告)日：2003-06-09
申请号：KR1019960074143
申请日：1996-12-27
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/30
CPC classification number: C23C16/4408 , B01J4/00 , C23C16/4407 , C23C16/4481 , C23C16/52 , F17C7/04 , F17C2221/012 , F17C2221/016 , F17C2223/0153 , F17C2227/044 , F17C2250/032 , F17C2250/043 , F17C2250/0636 , F17C2270/0518 , Y02E60/321
Abstract: A process gas supply apparatus according to the invention comprises a supply pipe line connecting a supply source containing an organic aluminum metallic compound in a liquid state, to a process device for forming a film on an object using the organic aluminum metallic compound, a force-feed device for force-feeding, through the supply pipe line, the organic aluminum metallic compound contained in the supply source, a vaporizing device provided across the supply pipe line for vaporizing the force-fed organic aluminum metallic compound of the liquid state, a purge gas introduction device connected to the supply pipe line for introducing a pressurized purge gas into the supply pipe line, a solvent introduction device connected to the supply pipe line for introducing into the supply pipe line a solvent for dissolving the organic aluminum metallic compound, an exhaustion device connected to the supply pipe line for exhausting the supply pipe line by a negative pressure, and a control device having a plurality of valves arranged across the supply pipe line, and controlling the flow of fluids flowing through the supply pipe line by opening and closing the valves.
Abstract translation: 根据本发明的处理气体供应设备包括：供应管线，其将含有液态有机铝金属化合物的供应源连接到用于使用有机铝金属化合物在物体上形成膜的处理装置; 通过供给管线供给包含在供给源中的有机铝金属化合物的供给装置，设置在供给管线上以汽化液体的强制供给有机铝金属化合物的汽化装置， 气体引入装置，连接到供应管路上，用于将加压清洗气体引入供应管路;溶剂引入装置，连接到供应管路，用于将用于溶解有机铝金属化合物的溶剂引入供应管路; 装置连接到供应管线，用于通过负压排出供应管线，以及控制装置 e具有布置在供应管线上的多个阀，并且通过打开和关闭阀来控制流过供应管线的流体的流动。
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公开(公告)号：KR100449115B1
公开(公告)日：2004-12-04
申请号：KR1019960074144
申请日：1996-12-27
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/205
Abstract: This invention provides a clustered tool apparatus comprises a water-removal processing member chamber for heating an object to be processed by using a heater to remove water and the like adhering to the surface of the object, an oxide- film removal processing chamber for removing, by etching, a natural oxide film formed on the surface of the object W from which the water has been removed, film-formation processing chambers for performing film-formation processing on the surface of the object, a cooling processing chamber for cooling the object from the film-formation processing, and a common transfer chamber, commonly connected/disconnected to/from the water-removal processing chamber, the oxide-film removal processing chamber, the film-formation processing chambers and the cooling processing chamber 20, to loading/unloading the object.
Abstract translation: 本发明提供了一种集群式工具装置，其包括用于通过使用加热器来加热被处理物体以去除附着在物体表面上的水等的除水处理构件室，用于除去， 通过蚀刻在被除去了水分的被处理体W的表面上形成的自然氧化膜，对被处理体表面进行成膜处理的成膜处理室，冷却被处理物的处理室 成膜处理和共同的传送室，通常与脱水处理室，氧化膜去除处理室，成膜处理室和冷却处理室20连接/分离，以将装载/ 卸载对象。
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公开(公告)号：KR1019970052092A
公开(公告)日：1997-07-29
申请号：KR1019960074144
申请日：1996-12-27
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/205
Abstract: 본 발명은 본 발명의 클러스터 툴(cluster tool)장치는 대상물이 반입/반출된 반송실과; 반송실과 연속적으로 통과하게 접속되고, 대상물을 가열하는 가열 히터를 구비하고, 가열 히터에 의해 대상물을 가열하여 대상물의 표면에 부착하는 수분을 제거하기 위한 수분 제거 처리실과; 반송실과 연속적으로 통과하게 접속되고 대상무의 표면에 부착하는 자연 산화막을 에칭 가스에 의해 제거하기 위한 산화막 제거 처리실과; 반송실과 연속적으로 통과하게 접속되고 대상물의 표면에 성막 처리실을 행하기 위한 성막 처리실과; 반송실과 연속적으로 통과가능하게 접속되고, 성막 처리된 대상물을 냉각하기 위한 냉각 처리실을 구비한다.
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