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公开(公告)号：KR1020160070687A
公开(公告)日：2016-06-20
申请号：KR1020150172439
申请日：2015-12-04
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/027 , G03F7/30 , G03F7/42 , G03F7/20 , G03F7/40
Abstract: 외주에절결이형성되는기판에있어서의직선영역의레지스트막의제거를행하는데 있어서, 레지스트막이제거되는영역의형상을고정밀도로제어하는것이다. 제1 영역에, 기판을국소적으로노광하기위한광 조사영역을배치하여, 당해제1 영역을노광하는공정과, 제1 기판을촬상하여화상데이터를취득하고이 화상데이터에기초하여, 당해기판이노광된위치와, 상기절결의위치와, 기판의중심위치의관계에관한위치데이터를취득하는공정과, 제2 기판에대하여상기위치데이터에기초하여, 상기제1 영역에대응하는영역으로부터그 위치가보정된제2 영역에상기조사영역을위치시키는공정과, 상기제2 기판에대하여상기조사영역을상대적으로이동시켜, 상기제2 영역을포함하는직선영역을노광하는공정과, 상기기판을현상하여상기직선영역의레지스트막을제거하는공정을포함하는것을특징으로한다.
Abstract translation: 本发明的目的是高精度地控制除去抗蚀剂膜的区域的形状，在具有形成在外周上的切口的基板上的直线区域中去除抗蚀剂膜。 抗蚀膜去除方法包括以下处理：通过在第一区域中布置用于局部暴露衬底的光辐射区域来将第一区域曝光; 通过拍摄第一基板获取图像数据，并且基于图像数据获得关于基板暴露于光的位置与切口的位置和基板的中心位置之间的关系的位置数据; 基于相对于第二基板的位置数据，将辐射区域放置在具有从对应于第一区域的区域校正的位置的第二区域中; 通过相对于第二基板相对移动辐射区域将包括第二区域的线性区域曝光; 以及通过显影衬底去除线性区域中的抗蚀剂膜。
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公开(公告)号：KR101849411B1
公开(公告)日：2018-04-16
申请号：KR1020120045224
申请日：2012-04-30
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/66
CPC classification number: G01N21/956 , G01N21/8806 , G01N21/93 , G01N21/9501 , G01N2021/9513 , G06T7/0004
Abstract: 본발명의과제는검사용기판을사용하는일 없이조명부의조도의저하에의한검사의문제가발생하는것을방지할수 있는기술을제공하는것이다. 하우징내에설치된적재대에적재된기판을피사체로서촬상하여검사를행하는검사모드와, 조명부의조도를확인하기위한메인터넌스모드사이에서모드를선택하기위한모드선택부와, 상기하우징내에설치되어, 상기조명부의광을촬상부의촬상소자에도광하기위한도광부재와, 메인터넌스모드실행시에상기도광부재를통해촬상소자에의해취득한조명부의광의휘도가, 미리설정된허용범위내인지여부를판정하는판정부와, 상기판정부에의해상기휘도가상기허용범위로부터벗어나있다고판정되었을때에조명부의교환을필요로하는것을통지하기위한통지부를구비하도록기판검사장치를구성한다.
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公开(公告)号：KR1020120133999A
公开(公告)日：2012-12-11
申请号：KR1020120045224
申请日：2012-04-30
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H01L21/66
CPC classification number: G01N21/956 , G01N21/8806 , G01N21/93 , G01N21/9501 , G01N2021/9513 , G06T7/0004
Abstract: PURPOSE: A substrate inspection apparatus, a substrate inspection method, and a storage medium are provided to prevent an inspection problem of a substrate due to illumination degradation in a lighting part without transferring a controlling substrate to the apparatus. CONSTITUTION: A mode selection part(46) selects a mode from a loading table inspection mode and a maintenance mode. A light guiding member is installed within a housing and guides light of a lighting part to an image pickup device. A determination part determines whether or not the brightness of the light in the lighting part acquired by the image pickup device is in a predetermined tolerance range using the light guiding member when the maintenance mode is executed. A notifying part(45) notifies that it is necessary to have the exchange of the lighting part when the determination part determines the brightness of the light is beyond the predetermined tolerance range. [Reference numerals] (30,HH) Image pickup device 1-2048; (32) Lens; (34) A/D converter; (35) Output correction part; (36) Signal processing part; (37) Converting part; (4) Control part; (42) CPU; (43) Program storing part; (45) Display part(notifying part); (46) Input part; (51) Program for an inspection mode; (52) Program for a maintenance mode; (53) Target value of brightness, upper bound of a indication value, and tolerance range of the difference from the target value; (55) Lamp exchange date; (56) Reference data; (62) Elapsed time of the indication value; (63) Need or not need for lamp exchange, the presence of indication value change; (AA) Image pickup device; (BB) Digital value(0-255); (CC) Brightness(0-255); (DD) Correction value; (EE) Indication value; (FF) Indication value setting data; (GG) Determined indication value; (II) Brightness α-γ
Abstract translation: 目的：提供基板检查装置，基板检查方法和存储介质，以防止由于照明部分的照明劣化而导致的基板的检查问题，而不将控制基板传送到设备。 构成：模式选择部（46）从装载台检查模式和维护模式中选择模式。 导光构件安装在壳体内并将照明部分的光引导到图像拾取装置。 确定部件确定当执行维护模式时，由图像拾取装置获取的照明部分中的光的亮度是否在使用导光部件的预定公差范围内。 通知部件（45）通知当确定部件确定光的亮度超过预定公差范围时，需要更换照明部件。 （附图标记）（30，HH）图像拾取装置1-2048; （32）镜头; （34）A / D转换器; （35）输出校正部; （36）信号处理部分; （37）转换件; （4）控制部分; （42）CPU; （43）程序存储部分; （45）显示部（通知部）; （46）输入部分; （51）检查模式程序; （52）维护方式的程序; （53）亮度的目标值，指示值的上限，以及与目标值的差的公差范围; （55）灯交换日期; （56）参考数据; （62）指示值的经过时间; （63）需要或不需要灯交换，指示值存在变化; （AA）摄像装置; （BB）数字值（0-255）; （CC）亮度（0-255）; （DD）校正值; （EE）指示值; （FF）指示值设定数据; （GG）确定指示值; （II）亮度α＆ggr;
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公开(公告)号：KR1020100065073A
公开(公告)日：2010-06-15
申请号：KR1020090095470
申请日：2009-10-08
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: G01N21/956 , G01B11/30 , H01L21/66
CPC classification number: G06T7/001 , G06T7/33 , G06T2207/30121 , G06T2207/30148
Abstract: PURPOSE: A substrate test method and apparatus and a storage medium are provided to improve the test accuracy of an inspected substrate by controlling a distortion of an image due to the position and the location of an imaging device. CONSTITUTION: A substrate test method comprises the following steps. The coordinates of a reference point on a viewing coordinate system which is specified with a pixel group arranged in the matrix shape are acquired. The coordinates of the reference point are converted into coordinates on a viewing plane coordinate system. The coordinates of the reference point on the viewing plane coordinate system are converted into the coordinates of a camera coordinate system. The transform parameter of both coordinate systems is calculated and obtained. A substrate to be inspected is imaged with a camera. The image data on the viewing coordinate system is acquired. The obtained image data on the viewing coordinate system is converted into the image data on the viewing plane coordinate system. The image data on the viewing plane coordinate system is converted into the image data on the camera coordinate system. The image data on the camera coordinate system is converted into the image data on the world coordinate system. The inspection of the substrate is processed based on the image data on the world coordinate system.
Abstract translation: 目的：提供基板测试方法和设备以及存储介质，以通过控制由于成像设备的位置和位置而导致的图像失真来提高被检查基板的测试精度。 构成：底物测试方法包括以下步骤。 获取以矩阵形状排列的像素组指定的观察坐标系上的基准点的坐标。 参考点的坐标转换为观察平面坐标系上的坐标。 观察平面坐标系上参考点的坐标被转换为相机坐标系的坐标。 计算和获得两个坐标系的变换参数。 用相机对待检查的基片进行成像。 获取观察坐标系上的图像数据。 将观看坐标系上获得的图像数据转换成观察平面坐标系上的图像数据。 观察平面坐标系上的图像数据被转换成相机坐标系上的图像数据。 相机坐标系上的图像数据被转换为世界坐标系上的图像数据。 基于世界坐标系上的图像数据对基板的检查进行处理。
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