Abstract:
PURPOSE: A semiconductor device which includes a buffer electrode, a manufacturing method thereof, a semiconductor module including the same, and an electronic system are provided to arrange a Ti/TiN buffer electrode pattern between an ohmic contact layer and a lower electrode pattern, thereby reducing contact resistance between the lower electrode pattern and the ohmic contact layer. CONSTITUTION: A switching device(40) is formed on a substrate(110). A buffer electrode pattern(150) is formed on the switching device. A lower electrode pattern(160) is formed on a first region. A trim insulation pattern(164) is formed on a second region. A variable resistance pattern(170) is formed on the lower electrode pattern.
Abstract:
PURPOSE: A phase change memory device is provided to form the lower layer of a lower electrode with low resistance by a first structure including titanium silicide and a second structure including titanium nitride. CONSTITUTION: A substrate(100) includes a field area and an active area. A switching device(120) is electrically connected to a word line(104). A lower electrode includes a first structure(124), a second structure(134), and a third structure(136). A phase change material pattern(140) is electrically connected to a lower electrode. An upper electrode(142) is electrically connected to the phase change material pattern.
Abstract:
PURPOSE: A semiconductor device and a forming method thereof are provided to selectively form the second metal patterns in an opening to completely insulate the second metal patterns, thereby increasing reliability of the semiconductor device. CONSTITUTION: A semiconductor structure(133) and an insulating pattern(142) are formed on a substrate(100). The semiconductor structure is formed in a hole penetrating insulating films(123,125) between gates. An opening includes a sidewall defined by one side of the insulating pattern. The opening is filled with the first metal film. The first metal film is wet-etched so that the sidewall of the opening is partially exposed. The second metal film is selectively formed on the etched first metal film.
Abstract:
상변화 메모리 유닛은 기판 상에 형성된 절연 구조물, 도전성 구조물과 제1 전극을 갖는 전극 구조체, 상변화 물질층 패턴 및 제2 전극을 포함한다. 절연 구조물은 기판 상에 형성되며, 기판을 부분적으로 노출시키는 개구를 구비한다. 도전성 구조물은 개구 내에 형성되며, 제1 전극은 도전성 구조물에 접촉되는 측벽과 저면을 가진다. 상변화 물질층 패턴은 제1 전극 및 절연 구조물 상에 형성되며, 제2 전극은 상변화 물질층 패턴 상에 형성된다. 도전성 구조물이 제1 전극을 감싸는 구조를 가지며, 절연 부재가 도전성 구조물과 상변화 물질층 패턴을 전기적으로 절연시키기 때문에, 오믹층 패턴의 손상을 방지하면서 상변화 메모리 유닛의 전기적인 특성을 향상시킬 수 있다.