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公开(公告)号:KR1020170051952A
公开(公告)日:2017-05-12
申请号:KR1020150153700
申请日:2015-11-03
Applicant: 삼성전자주식회사
IPC: H01L29/66 , H01L29/78 , H01L29/423
CPC classification number: H01L29/7855 , H01L29/0657 , H01L29/41791 , H01L29/7843 , H01L29/7846 , H01L29/7853 , H01L29/7854
Abstract: 반도체장치가제공된다. 상기반도체장치는서로대향되는제1 및제2 측면을포함하는제1 핀형패턴, 상기제1 측면에접하는제1 깊이의제1 트렌치, 상기제2 측면에접하는상기제1 깊이와다른제2 깊이의제2 트렌치, 상기제1 트렌치의일부를채우는제1 필드절연막및 상기제2 트렌치의일부를채우는제2 필드절연막을포함하되, 상기제1 핀형패턴은하부와, 상기하부보다좁은폭의상부를포함하되, 상기상부와상기하부의경계에제1 단차를가지고, 상기제1 필드절연막은상기하부와접하는제1 하부필드절연막과, 상기상부와접하는제1 상부필드절연막을포함한다.
Abstract translation: 提供了一种半导体器件。 第一销形图案,第一沟槽,所述的半导体器件,其中所述第二,不同的深度在所述第一深度与所述第一侧包括第一mitje第二侧彼此相对的接触与所述第一深度的第二侧接触 制品包括两个沟槽,其包括:第一场绝缘膜以填充第一沟槽的该部分第二场绝缘膜以填充第二沟槽,其中,所述第一销形图案是下的部分,并且比下部窄服装份 第一场绝缘膜具有与下部接触的第一下部场绝缘膜和与上部接触的第一上部场绝缘膜。
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公开(公告)号:KR1020120110448A
公开(公告)日:2012-10-10
申请号:KR1020110028315
申请日:2011-03-29
Applicant: 삼성전자주식회사
IPC: H01L27/115 , H01L21/8247
CPC classification number: H01L27/2472 , H01L27/2409 , H01L45/06 , H01L45/1233 , H01L45/126 , H01L45/143 , H01L45/144 , H01L45/148 , H01L45/146
Abstract: PURPOSE: A semiconductor memory device and a manufacturing method thereof are provided to increase the width of an effective channel by forming trenches on a channel area of cell driving transistors. CONSTITUTION: A semiconductor substrate(100) includes a core area(20). Phase-change memory cells are arranged on cell areas. Cell driving transistors are arranged on the core area. A gate electrode(141) is formed on the semiconductor substrate. The cell driving transistor includes a gate insulating film.
Abstract translation: 目的:提供半导体存储器件及其制造方法,以通过在单元驱动晶体管的沟道区上形成沟槽来增加有效沟道的宽度。 构成:半导体衬底(100)包括芯区(20)。 相变存储器单元布置在单元区域上。 单元驱动晶体管布置在核心区域上。 在半导体衬底上形成栅电极(141)。 电池驱动晶体管包括栅极绝缘膜。
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公开(公告)号:KR1020100084215A
公开(公告)日:2010-07-26
申请号:KR1020090003567
申请日:2009-01-16
Applicant: 삼성전자주식회사
IPC: H01L27/115 , H01L21/8247
CPC classification number: H01L45/1625 , H01L27/2409 , H01L45/06 , H01L45/1233 , H01L45/1273 , H01L45/144 , H01L21/28052 , H01L45/143
Abstract: PURPOSE: A phase change memory device and a method for forming the same are provided to be adopted as a protective film in an outer spacer formation process by previously forming a metal barrier sidewall on a part of a contact sidewall and on a metal silicon layer. CONSTITUTION: An interlayer insulating film is formed on a semiconductor substrate(100). A contact hole is formed on the interlayer insulating film. An epi layer and a diode are formed in the contact hole. A metal silicide(170) is formed on the diode. A metal barrier sidewall is formed on the metal silicide and on a contact sidewall. An outer spacer(185) is formed on the metal silicide and the contact sidewall. A lower electrode(193) is formed on the outer spacer.
Abstract translation: 目的:通过在接触侧壁的一部分和金属硅层上预先形成金属阻挡侧壁,在外部间隔物形成工艺中提供了相变存储器件及其形成方法作为保护膜。 构成:在半导体衬底(100)上形成层间绝缘膜。 在层间绝缘膜上形成接触孔。 在接触孔中形成外延层和二极管。 在二极管上形成金属硅化物(170)。 在金属硅化物和接触侧壁上形成金属阻挡侧壁。 在金属硅化物和接触侧壁上形成外隔离物(185)。 在外隔板上形成下电极(193)。
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公开(公告)号:KR1020170109793A
公开(公告)日:2017-10-10
申请号:KR1020160033832
申请日:2016-03-22
Applicant: 삼성전자주식회사
IPC: H01L27/24 , H01L45/00 , H01L27/098 , H01L27/088 , H01L21/768
CPC classification number: H01L27/2481 , H01L45/06 , H01L45/1233 , H01L45/1246 , H01L45/1253 , H01L45/144
Abstract: 메모리소자는, 기판상에, 제1 방향으로연장되는복수의제1 도전패턴들과, 상기제1 도전패턴들상에구비되는제1 선택패턴과, 상기제1 선택패턴측벽을둘러싸고, 음전하를띄어상기제1 선택패턴을통해흐르는전류를상기제1 선택패턴의중심부로집중시키는제1 장벽부와, 상기제1 선택패턴상에구비되는제1 전극및 제1 가변저항패턴과, 상기제1 가변저항패턴상에, 상기제1 방향과교차하는제2 방향으로연장되는제2 도전패턴을포함할수 있다. 상기메모리소자는선택패턴의누설전류가감소될수 있다.
Abstract translation: 存储器元件,在基板上,围绕所述多个第一导电图案,和第一选择模式中,第一选择模式侧壁被设置在沿第一方向延伸的第一导电图案,负电荷 调出第二和第一壁部中流经第一选择模式,其被设置在第一选择模式和一个第一可变电阻器图案和所述第一的第一电极的电流的第一选择图案的中心集中 以及在可变电阻图案上沿与第一方向交叉的第二方向延伸的第二导电图案。 存储器元件可以减小所选图案的泄漏电流。
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公开(公告)号:KR1020170021060A
公开(公告)日:2017-02-27
申请号:KR1020150115382
申请日:2015-08-17
Applicant: 삼성전자주식회사
CPC classification number: H01L29/785 , H01L27/1233 , H01L29/66795 , H01L29/7846 , H01L29/7854
Abstract: 반도체장치가제공된다. 상기반도체장치는액티브영역을정의하는딥 트렌치, 상기액티브영역내에돌출되고, 하부와, 상기하부보다좁은폭의상부와, 상기상부및 상기하부의경계에형성된제1 단차를포함하는핀형패턴, 상기하부를둘러싸는제1 필드절연막및 상기제1 필드절연막상에형성되고, 상기상부의일부를둘러싸는제2 필드절연막을포함한다.
Abstract translation: 提供一种半导体器件,其包括限定有源区的深沟槽和在有源区域内突出的鳍型图案。 翅片型图案具有下部,比下部更窄的上部,以及形成在上部和下部之间的边界处的第一阶梯部。 该器件还包括围绕下部的第一场绝缘膜和形成在第一场绝缘膜上并部分围绕上部的第二场绝缘膜。
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公开(公告)号:KR1020130116414A
公开(公告)日:2013-10-24
申请号:KR1020120026260
申请日:2012-03-14
Applicant: 삼성전자주식회사
CPC classification number: G06F21/44 , G06F21/6281 , G06F3/0484 , G06F3/147 , H04W12/06 , H04W88/02
Abstract: PURPOSE: An authorization control device for an application in a portable terminal and a method thereof are provided to notify the restriction of a specific function to a user by obtaining authorization for the specific function based on a user identity (ID) and a process ID. CONSTITUTION: When the call of a specific function provided from a framework is requested in the execution of a specific application, a control unit (101) confirms the acquisition of authentication for the specific function by using the user ID and process ID of the specific application. When the control unit is restricted for the specific function, a first message indicating the restriction of the authorization is displayed. The control unit displays the name of the specific function and the first message. When the restriction of the authorization for the specific function is requested by the user, the control unit stores authorization restriction information including the specification function in which the authorization is restricted. [Reference numerals] (101) Control unit; (103) Display unit; (105) Key input unit; (107) Memory unit; (109) RF unit; (111) Data processing unit; (113) Voice processing unit
Abstract translation: 目的:提供一种用于便携式终端中的应用的授权控制装置及其方法,用于通过基于用户身份(ID)和进程ID获得特定功能的授权来向用户通知特定功能的限制。 构成:当在特定应用的执行中请求从框架提供的特定功能的调用时,控制单元(101)通过使用特定应用的用户ID和进程ID确认对特定功能的认证的获取 。 当控制单元被限制用于特定功能时,显示指示授权的限制的第一消息。 控制单元显示特定功能的名称和第一个消息。 当用户请求对特定功能的授权的限制时,控制单元存储包括限制授权的规范功能的授权限制信息。 (附图标记)(101)控制单元; (103)显示单元; (105)键输入单元; (107)存储单元; (109)射频单元; (111)数据处理单元; (113)语音处理单元
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公开(公告)号:KR1020100006967A
公开(公告)日:2010-01-22
申请号:KR1020080067347
申请日:2008-07-11
Applicant: 삼성전자주식회사
IPC: H01L27/108 , H01L21/8242
CPC classification number: H01L28/75 , H01L27/11502 , H01L28/55 , H01L28/87
Abstract: PURPOSE: A method for manufacturing a ferroelectric memory device is provided to prevent a metal oxide of an additional upper electrode from being reduced to a metal with the reaction with the metal of the hard mask and the metal by removing the hard mask as an etch mask of the additional upper electrode. CONSTITUTION: A first interlayer insulation film(150) is formed. A contact hole for the upper exposure of the ferroelectric capacitor is formed by etching the first interlayer insulation film. An additional upper electrode layer is formed and is filled in the contact hole. A hard mask is formed on the additional upper electrode layer. An additional upper electrode(160a) is formed by etching the additional upper electrode layer. The hard mask is used as an etching mask. The hard mask is removed on the additional upper electrode.
Abstract translation: 目的:提供一种用于制造铁电存储器件的方法,以通过去除硬掩模作为蚀刻掩模来防止附加上电极的金属氧化物与硬掩模和金属的金属反应而被还原成金属 的附加上电极。 构成:形成第一层间绝缘膜(150)。 通过蚀刻第一层间绝缘膜来形成用于强电介质电容器的上部曝光的接触孔。 形成附加的上电极层并填充在接触孔中。 在另外的上电极层上形成硬掩模。 通过蚀刻另外的上电极层来形成附加的上电极(160a)。 硬掩模用作蚀刻掩模。 在附加的上电极上去除硬掩模。
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公开(公告)号:KR1020090081681A
公开(公告)日:2009-07-29
申请号:KR1020080007677
申请日:2008-01-24
Applicant: 삼성전자주식회사
IPC: H01L27/105
Abstract: A ferroelectric random access memory and a manufacturing method thereof are provided to prevent deterioration of a ferroelectric capacitor due to the hydrogen by including a hydrogen barrier layer. A ferroelectric random access memory device includes a plurality of ferroelectric capacitors(510), an additional top electrode(530), a hydrogen barrier layer(542), and an etch stop layer(550). The plurality of ferroelectric capacitors are formed on a semiconductor substrate(100). The additional top electrode is commonly connected to a top electrode(516) of the plurality of ferroelectric capacitors. The hydrogen barrier layer is formed on the additional top electrode. The etch stop layer is formed on the hydrogen barrier layer.
Abstract translation: 提供铁电随机存取存储器及其制造方法,以通过包括氢阻挡层来防止由于氢而导致的铁电电容器的劣化。 铁电随机存取存储器件包括多个铁电电容器(510),附加顶电极(530),氢势垒层(542)和蚀刻停止层(550)。 多个铁电电容器形成在半导体衬底(100)上。 另外的顶部电极通常连接到多个铁电电容器的顶部电极(516)。 氢阻挡层形成在附加的顶部电极上。 蚀刻停止层形成在氢阻挡层上。
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