신규의 탄탈 화합물 및 그 제조 방법
    1.
    发明公开
    신규의 탄탈 화합물 및 그 제조 방법 无效
    新型钽络合物及其制备方法

    公开(公告)号:KR1020120058762A

    公开(公告)日:2012-06-08

    申请号:KR1020100120197

    申请日:2010-11-30

    CPC classification number: C07F9/00 C23C16/405 C23C16/45525

    Abstract: PURPOSE: A tantalic compound and a method for preparing the same are provided to ensure excellent thermal stability and volatility. CONSTITUTION: A tantalic compound is denoted by chemical formula 1(R1N=Ta[O-A-NR2R3]x[R4]3-x), 2(R1N=Ta[O-CR5R6(CH2)m-NR2R3]x[R11]3-x), or 3(R1N=Ta[O-CR5R6(CH2)m-NR2R3]x[R12]3-x). The tantalic compound is Ta(NtBu)(OCMe2CH2NMe2)2Cl or Ta(NtBu)(OCMe2CH2NMe2)2Me. A method for preparing the tantanlic compounds comprises a step of reacting tantalic compounds of chemical formula 4(R1N=TaR113Py2) with metal amino alkoxide of chemical formula 5(MO-A-NR2R3).

    Abstract translation: 目的:提供钽酸盐化合物及其制备方法以确保优异的热稳定性和挥发性。 构成:化学式1(R1N = Ta [OA-NR2R3] x [R4] 3-x),2(R1N = Ta [O-CR5R6(CH2)m-NR2R3] x [R11] 3 -x)或3(R1N = Ta [O-CR5R6(CH2)m-NR2R3] x [R12] 3-x)。 钽(NtBu)(OCMe2CH2NMe2)2Cl或Ta(NtBu)(OCMe2CH2NMe2)2Me的钽酸盐化合物。 制备钽酸钡化合物的方法包括使化学式4(R1N = TaR113Py2)的钽酸化合物与化学式5的金属氨基醇盐(MO-A-NR2R3)反应的步骤。

    신규의 갈륨 글리콜레이트 화합물 및 그 제조 방법
    3.
    发明公开
    신규의 갈륨 글리콜레이트 화합물 및 그 제조 방법 有权
    新型GALLIUM GLYCOLATE化合物及其制备方法

    公开(公告)号:KR1020120032720A

    公开(公告)日:2012-04-06

    申请号:KR1020100094200

    申请日:2010-09-29

    CPC classification number: C07F5/00 C01G15/00 C01P2004/64 C23C16/40

    Abstract: PURPOSE: A novel gallium glycolate compounds and a method for preparing the same are provided to ensure excellent thermal stability and easy storage. CONSTITUTION: A gallium glycolate compound is denoted by chemical formula 1. The gallium glycolate compound is prepared by reacting gallium compounds of chemical formula 2(GaX^1_3) and glycolate compound of chemical formulas 3(HOCOCH_2OR^3) and 4(HOCH_2COOR^3). A gallium oxide thin film is formed by MOCVD using gallium glycolate compounds as a precursor.

    Abstract translation: 目的:提供新型的乙醇酸镓化合物及其制备方法,以确保优异的热稳定性和易于储存。 构成:化学式1表示乙酸羟乙酯化合物。通过使化学式2的镓化合物(GaX 3)和化学式3(HOCOCH 2 OR 3)和4(HOCH 2 COOR 3)的乙醇酸化合物 )。 通过MOCVD,使用乙酸羟乙酯化合物作为前体形成氧化镓薄膜。

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