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公开(公告)号：KR1020100054317A
公开(公告)日：2010-05-25
申请号：KR1020080113192
申请日：2008-11-14
Applicant: 한국화학연구원
IPC: C01F7/00
CPC classification number: C07F5/06
Abstract: PURPOSE: Novel aluminum alkoxide compounds and a preparing method thereof are provided, which can obtain heat stability and excellent volatility and enable manufacture of a film of the high purity containing aluminum. CONSTITUTION: An aluminium alkoxide compound is represented as the chemical formula 1, Al(O-A-NR^1R^2)_x(R^3)_3-x. In the chemical formula 1, A is alkylene of C2-C5 and is substituted for linear or branched alkyl of one or more C1-C5, R^1 to R^3 are independently linear or branched alkyl of C1-C5, and X is fixed number of 1 to 3. The manufacturing method of the aluminium alkoxide compound is to react aluminum compound of the chemical formula 3, AlR^3_3 and alcohol of the chemical formula 4, HO-A-NR^1R^2.
Abstract translation: 目的：提供新的烷氧基铝化合物及其制备方法，其可以获得热稳定性和优异的挥发性，并且能够制造含有高纯度的铝的膜。 构成：烷氧化铝化合物表示为化学式1，Al（O-A-NR 1 R 1）2（X 3）3-x。 在化学式1中，A是C 2 -C 5的亚烷基并且被一个或多个C 1 -C 5的直链或支链烷基取代，R 1至R 3独立地是C1-C5的直链或支链烷基，X是 固定数量为1〜3。烷氧基铝化合物的制造方法是使化学式3的铝化合物，AlR 3 3 3和化学式4的醇HO-A-NR 1 1R 2。
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公开(公告)号：KR1020100054300A
公开(公告)日：2010-05-25
申请号：KR1020080113164
申请日：2008-11-14
Applicant: 한국화학연구원
IPC: C01G27/00
Abstract: PURPOSE: A novel hafnium alkoxide compounds and a preparing method thereof are provided, in which compounds are thermally stable, have high volatility, and enhance reactivity with the ozone. CONSTITUTION: A novel hafnium alkoxide compound is represented as the chemical formula 1, HF(OCR^1R^2R^3)_4. In the chemical formula 1, R^1 and R2 are independently the linear or branched alkyl group of C1-C5, R^3 is linear alkenyl or alkynyl group of C2-C5. R^1 and R2 are independently selected from CH_3, C2H5, and CH(CH_3)2 or C(CH_3)3, and R^3 is C≡CH, CH_2C≡CH, CH_2CH_2C≡CH, C≡CCH_3, CH_2C≡CCH_3 or CH_2CH_2C≡CCH_3. The manufacturing method of the hafnium alkoxide compound of the chemical formula 1 is to react hafnium amide compound of the chemical formula 2, Hf(NR^4R^5)_4 and alcohol compound of the chemical formula 3, HOCR^1R^2R^3.
Abstract translation: 目的：提供一种新型的铪醇盐化合物及其制备方法，其中化合物是热稳定的，具有高挥发性，并增强与臭氧的反应性。 构成：一种新的铪醇盐化合物以化学式1表示，HF（OCR 1 R 1 R 2 R 3）4。 在化学式1中，R 1和R 2独立地是C 1 -C 5的直链或支链烷基，R 3是C 2 -C 5的直链烯基或炔基。 R 1和R 2独立地选自CH 3，C 2 H 5和CH（CH 3）2或C（CH 3）3，R 3是C≡CH，CH 2C≡CH，CH 2 CH 2C≡CH，C≡CCH3，CH 2C≡CCH3 或CH 2 CH 2C≡CCH3。 化学式1的铪醇盐化合物的制造方法是使化学式2的铪酰胺化合物，Hf（NR 4 4R 5）4和化学式3的HO化合物HOCR 1 1R 2 2R 3 。
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公开(公告)号：KR101083103B1
公开(公告)日：2011-11-16
申请号：KR1020100038772
申请日：2010-04-27
Applicant: 한국화학연구원
Abstract: 본 발명은 변형된 글리신 유도체를 이용한 신규의 알칼리 토금속 화합물 및 그 제조 방법에 관한 것으로, 하기 화학식 1로 표시되는 알칼리 토금속 화합물에 관한 것이다.
[화학식 1]
본 발명에 따른 알칼리 토금속 화합물은 금속 산화물 박막 및 금속 산화물 나노입자 형성을 위한 전구체로 사용되며, 수분에 덜 민감하고 보관이 용이하며 열적 안정성이 우수한 특성이 있다.-
公开(公告)号：KR1020110006968A
公开(公告)日：2011-01-21
申请号：KR1020090064627
申请日：2009-07-15
Applicant: 한국화학연구원
IPC: C07F7/28 , H01L21/205 , C23C16/18
CPC classification number: C07F7/28 , C23C16/405 , C23C16/45525 , H01L21/205
Abstract: PURPOSE: A method for preparing titanium alkoxide compound is provided to manufacture thermally stable titanium oxide thin film. CONSTITUTION: A titanium alkoxide compound is denoted by chemical formula 1(Ti(OCR^1R^2R^3)_4). In chemical formula 1, R1 and R2 are independently linear or branched alkyl group of C1-C5; and R3 is linear alkenyl or alkinyl group of C2-C5. A titanium alkoxide compound is prepared by reacting alcohol compound of chemical formula 3(HOCR^1R^2R^3) with titanium amide compound of chemical formula 4(Ti(NR^4R^5)_4). A titanium oxide thin film is manufactured using titanium alkoxide compound as a precursor by MOCVD(metal organic chemical vapor deposition) and ALD(atomic layer deposition).
Abstract translation: 目的：提供一种制备钛醇盐化合物的方法，以制造热稳定的氧化钛薄膜。 构成：化学式1表示钛醇盐化合物（Ti（OCR，1R ^ 2R ^ 3））4）。 在化学式1中，R1和R2分别是C1-C5的直链或支链烷基; 并且R 3是C 2 -C 5的直链烯基或炔基。 通过使化学式3的醇化合物（HOCR 1 1R 2 2R 3）与化学式4的钛酰胺化合物（Ti（NR 4 4R 5）4））反应制备烷氧基钛化合物。 通过MOCVD（金属有机化学气相沉积）和ALD（原子层沉积）作为前体的钛醇盐化合物制造氧化钛薄膜。
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公开(公告)号：KR1020100129591A
公开(公告)日：2010-12-09
申请号：KR1020090048234
申请日：2009-06-01
Applicant: 한국화학연구원
IPC: C07F7/18 , C23C16/42 , H01L21/205
CPC classification number: C07F7/1804 , C23C16/24 , C23C16/401 , C23C16/45525 , H01L21/2053
Abstract: PURPOSE: A method for preparing a novel silicon alkoxide compound is provided to ensure volatile characteristic at low temperature and to use as a silicon ingredient. CONSTITUTION: A silicon alkoxide compound is denoted by chemical formula 1. The silicon alkoxide compound is prepared by reacting alkali metal salt of chemical formulas 5(M^2O-A^2-OR^3) and 4(M^1O-A^1-OR^1) with a silicon compound of chemical formula 3([R^4]3-a-bX^1bX^2aSi-SiX^1nX^2m[R^2]3-n-m). A silicon-containing thin film is produced using the silicon alkoxide compound as a precursor. The silicon-containing thin film is formed by metal organic chemical vapor deposition(MOCVD) or atom layer deposition(ALD).
Abstract translation: 目的：提供一种制备新的硅烷氧化物化合物的方法，以确保低温下的挥发性特征并用作硅成分。 构成：硅烷氧化物化合物由化学式1表示。硅烷氧化物化合物通过使化学式5（M 2 O-A 2 2- OR 3）和4（M 1 O-A ^ 1-OR 1）与化学式3的硅化合物（[R 4] 3-a-bX 1，1b 3）2 Si-SiX 1 1 X 2 2 [[R 2] 3-nm）反应。 使用硅醇盐化合物作为前体制造含硅薄膜。 含硅薄膜由金属有机化学气相沉积（MOCVD）或原子层沉积（ALD）形成。
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Patent Agency Ranking
公开(公告)号：KR101116246B1
公开(公告)日：2012-03-09
申请号：KR1020090048255
申请日：2009-06-01
Applicant: 한국화학연구원
IPC: C07F7/18 , C23C16/42 , H01L21/205
Abstract: 본발명에따른실리콘아미노알콕사이드화합물은상온에서액체상태로존재하며낮은온도에서휘발되는특성을나타냄으로실리콘을포함하는물질의박막증착또는여러가지합금제조에실리콘원료물질로유용하게사용될수 있다.
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公开(公告)号：KR101093817B1
公开(公告)日：2011-12-19
申请号：KR1020090064627
申请日：2009-07-15
Applicant: 한국화학연구원
IPC: C07F7/28 , H01L21/205 , C23C16/18
Abstract: 본 발명은 하기 화학식 1로 표시되는 티타늄 알콕사이드 화합물 및 이의 제조 방법에 관한 것으로, 본 발명에 따른 티타늄 알콕사이드 화합물은 열적으로 안정한 티타늄 산화물 박막을 제조하는데 유용하게 사용될 수 있다.
[화학식 1]
Ti(OCR
1 R
2 R
3 )
4
[상기 화학식 1에서 R
1 및 R
2 는 서로 독립적으로 C
1 -C
5 의 선형 또는 분지형 알킬기이고, R
3 은
C
2 -C
5 의 선형 알케닐 또는 알키닐기이다.]
티타늄, 티타늄 알콕사이드 화합물, 티타늄 산화물 박막, 화학기상 증착법(MOCVD), 원자층 증착법(ALD)-
公开(公告)号：KR1020110119191A
公开(公告)日：2011-11-02
申请号：KR1020100038772
申请日：2010-04-27
Applicant: 한국화학연구원
CPC classification number: C07F3/003 , C01G23/006 , C01G35/006 , C01P2002/34 , C01P2004/64 , C23C4/04 , C23C16/404
Abstract: PURPOSE: A novel alkaline earth metal compound using modified glycine derivatives is provided to ensure easy maintenance and excellent thermal stability. CONSTITUTION: An alkaline earth metal compound is denoted by chemical formula 1. The alkaline earth metal compound of chemical formula 1 is prepared by reacting alkaline earth metal halide compound of chemical formula 2(MX_2) with sodium(bis-(alkoxyalkyl))glycinate or sodium(bis-(dialkylaminoalkyl))glycinate of chemical formula 3(NaOCOCH_2N &(CH_2)nY R_2). An alkaline earth metal oxide thin film is formed by metal organic chemical vapor deposition.
Abstract translation: 目的：提供使用改性甘氨酸衍生物的新型碱土金属化合物，以确保易于维护和优异的热稳定性。 化学式1的碱土金属化合物是通过使化学式2（MX_2）的碱土金属卤化物与（双 - （烷氧基烷基））甘氨酸钠或 化学式3（NaOCOCH 2 N＆（CH 2）n Y R 2）的（双（二烷基氨基烷基））甘氨酸钠。 通过金属有机化学气相沉积形成碱土金属氧化物薄膜。
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公开(公告)号：KR101124216B1
公开(公告)日：2012-04-12
申请号：KR1020090095757
申请日：2009-10-08
Applicant: 한국화학연구원
IPC: C07F3/00 , H01L21/205 , B82B3/00
Abstract: 본 발명은 변형된 글리신을 사용한 신규의 알칼리 토금속 디알킬글리신 화합물 및 그 제조 방법에 관한 것으로, 하기 화학식 1로 표시되는 알칼리 토금속 디알킬글리신 화합물에 관한 것이다.
[화학식 1]
[상기 화학식 1에서,
M은 Be, Mg, Ca, Sr, Ba 또는 Ra에서 선택되는 알칼리 토금속이고, R
1 및 R
2 는 서로 독립적으로 할로겐이 하나 이상 치환되거나 치환되지 않은 C3-C7의 선형 또는 분지형의 알킬기이다.]
본 발명에 따른 알칼리 토금속 디알킬글리신 화합물은 금속 산화물 박막 및 금속 산화물 나노입자 형성을 위한 전구체로 사용되며, 수분에 덜 민감하고 보관이 용이하며 열적 안정성이 우수한 특성이 있다.
알칼리 토금속, 디알킬글리신, 전구체, 금속 산화물, 박막
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