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公开(公告)号:SE9700141D0
公开(公告)日:1997-01-20
申请号:SE9700141
申请日:1997-01-20
Applicant: ABB RESEARCH LTD
Inventor: HERMANSSON WILLY , BIJLENGA BO , RAMBERG LENNART , ROTTNER KURT , ZDANSKY LENNART , HARRIS CHRISTOPHER , BAKOWSKI MIETEK , SCHOENER ADOLF , LUNDBERG NILS , OESTLING MIKAEL , DAHLQUIST FANNY
IPC: H01L21/04 , H01L29/24 , H01L29/872 , H01L