公开(公告)号：AU2234099A

公开(公告)日：1999-09-06

申请号：AU2234099

申请日：1999-01-19

Applicant: ADVANCED TECH MATERIALS

Inventor： ROEDER JEFFREY R ,  CHEN SHIN ING ,  BILODEAU STEVEN ,  BAUM THOMAS H

IPC: B32B9/00 ,  C07C55/02 ,  C23C16/40 ,  C30B25/02 ,  H01B3/12 ,  H01L21/316 ,  H01L21/8246 ,  H01L27/105 ,  H01L41/187 ,  C30B23/00

Abstract: A modified PbZrTiO3 perovskite crystal material thin film, wherein the PbZrTiO3 perovskite crystal material includes crystal lattice A-sites and B-sites at least one of which is modified by the presence of a substituent selected from the group consisting of (i) A-site substituents consisting of Sr, Ca, Ba and Mg, and (ii) B-site substituents selected from the group consisting of Nb and Ta. The perovskite crystal thin film material may be formed by liquid delivery MOCVD from metalorganic precursors of the metal components of the thin film, to form PZT and PSZT, and other piezoelectric and ferroelectric thin film materials. The thin films of the invention have utility in non-volatile ferroelectric memory devices (NV-FeRAMs), and in microelectromechanical systems (MEMS) as sensor and/or actuator elements, e.g., high speed digital system actuators requiring low input power levels.

公开(公告)号：AU2003301333A8

公开(公告)日：2004-05-04

申请号：AU2003301333

申请日：2003-10-15

Applicant: ADVANCED TECH MATERIALS

Inventor： STAWASZ MICHELE ,  CHEN SHIN ING ,  NEUNER JEFFREY W ,  KING MACKENZIE E ,  ROEDER JEFFREY F ,  WELCH JAMES ,  DIMEO FRANK ,  BAUM THOMAS H ,  CHEN PHILIP S H

IPC: G01N33/00 ,  G01N9/00

Abstract: A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.

公开(公告)号：AU2003301333A1

公开(公告)日：2004-05-04

申请号：AU2003301333

申请日：2003-10-15

Applicant: ADVANCED TECH MATERIALS

Inventor： BAUM THOMAS H ,  KING MACKENZIE E ,  CHEN SHIN ING ,  ROEDER JEFFREY F ,  DIMEO FRANK ,  CHEN PHILIP S H ,  NEUNER JEFFREY W ,  WELCH JAMES ,  STAWASZ MICHELE

IPC: G01N33/00

Abstract: A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.