公开(公告)号：WO2008028170A2

公开(公告)日：2008-03-06

申请号：PCT/US2007077466

申请日：2007-08-31

Applicant: ADVANCED TECH MATERIALS ,  CLEARY JOHN M ,  ARNO JOSE I ,  HENDRIX BRYAN C ,  NAITO DONN ,  BATTLE SCOTT ,  GREGG JOHN ,  WODJENSKI MICHAEL J ,  XU CHONGYING

Inventor： CLEARY JOHN M ,  ARNO JOSE I ,  HENDRIX BRYAN C ,  NAITO DONN ,  BATTLE SCOTT ,  GREGG JOHN ,  WODJENSKI MICHAEL J ,  XU CHONGYING

IPC: B01J7/00

CPC classification number: C23C16/4481 ,  C23C14/48 ,  C23C16/08 ,  C23C16/16 ,  C23C16/18 ,  C23C16/30 ,  C23C16/4402 ,  C23C16/45525 ,  C23C16/45544

Abstract: Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.

Abstract translation: 用于挥发容易产生颗粒或在相应的源试剂蒸气中存在颗粒的源试剂的装置和方法，其中通过蒸气产生系统的结构或加工特征抑制了这种颗粒产生或存在。 这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。 一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。 本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。

公开(公告)号：SG186381A1

公开(公告)日：2013-01-30

申请号：SG2012092904

申请日：2011-06-18

Applicant: ADVANCED TECH MATERIALS

Inventor： SWEENEY JOSEPH D ,  AVILA ANTHONY M ,  WODJENSKI MICHAEL J ,  DESPRES JOSEPH R ,  BAUM THOMAS H

Abstract: Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.

公开(公告)号：WO2007136887A2

公开(公告)日：2007-11-29

申请号：PCT/US2007061256

申请日：2007-01-29

Applicant: ADVANCED TECH MATERIALS ,  DIMEO FRANK JR ,  CARRUTHERS J DONALD ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH

Inventor： DIMEO FRANK JR ,  CARRUTHERS J DONALD ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH

IPC: H01L21/31

CPC classification number: B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

Abstract: A porous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone. Porous carbon material is also described as a storage medium for chlorine gas, or as a hydrogen storage medium, e.g., for hydrogen fuel cells.

Abstract translation: 与单独的纳米多孔碳相比，具有至少部分填充有赋予复合材料的材料相对于选自硬度，耐磨性和韧性的特性的增强特性的多孔碳复合材料。 多孔碳材料也被描述为用于氯气的储存介质，或作为储氢介质，例如氢燃料电池。

公开(公告)号：WO2006047410A2

公开(公告)日：2006-05-04

申请号：PCT/US2005038173

申请日：2005-10-24

Applicant: ADVANCED TECH MATERIALS ,  DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

Inventor： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC: H01L21/66 ,  B67D7/06 ,  B67D99/00

CPC classification number: G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

Abstract: A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

Abstract translation: 一种监视系统（100），用于在操作期间监视流体供给容器（22,24,26,28,108）中的流体，包括从流体供给容器分配流体。 监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器（114,126），（ii）数据采集模块（40,132,146），其可操作地耦合到所述一个 或更多传感器以从其接收监测数据并响应地产生与由所述一个或更多个传感器监测的特性相关的输出，以及（iii）处理器（50,150）和显示器（52,150），可操作地与所述数据采集模块 并且布置成处理来自数据采集模块的输出并且响应地输出流体供应容器中的流体的图形表示，计费文档，使用报告和/或再供应请求。

公开(公告)号：WO2004052487A8

公开(公告)日：2005-08-25

申请号：PCT/US0337719

申请日：2003-11-25

Applicant: ADVANCED TECH MATERIALS

Inventor： BRESTOVANSKY DENNIS ,  WODJENSKI MICHAEL J ,  ARNO JOSE I ,  CARRUTHERS J DONALD

IPC: B01D20060101 ,  B01D53/02 ,  B01D53/04 ,  B01D59/26 ,  B67D7/74 ,  B67D99/00 ,  F17C11/00

CPC classification number: B01D53/053 ,  B01D53/0407 ,  B01D2253/102 ,  B01D2253/304 ,  B01D2253/342 ,  B01D2257/40 ,  B01D2257/704 ,  B01D2257/706 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C13/084 ,  F17C2201/0157 ,  F17C2205/0103 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/0318

Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

Abstract translation: 一种流体储存和分配设备，包括具有长方体形状的流体储存和分配容器以及在通气气柜中包括这种流体储存和分配设备和/或使用点通风气体洗涤器的集成气柜组件。 通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如在从气柜供应的处理气体具有毒性或其他危险特性的情况下。

公开(公告)号：SG10201401164RA

公开(公告)日：2014-07-30

申请号：SG10201401164R

申请日：2003-11-25

Applicant: ADVANCED TECH MATERIALS

Inventor： BRESTOVANSKY DENNIS ,  WODJENSKI MICHAEL J ,  ARNO JOSE I ,  CARRUTHERS DONALD J ,  PHILIP A MOROCO

IPC: B01D20060101 ,  B01D53/02 ,  B01D53/04 ,  B01D59/26 ,  B67D7/74 ,  B67D99/00 ,  F17C11/00

Abstract: A vessel having a drawn seamless tube closed at one end to define an interior volume holding a monolithic carbon adsorbent that is confonned in size and shape to the interior volume of the drawn seamless tube and occupies at least 60% of said interior volume is described. The drawn seamless tube having an opposite end to which a top plate member is welded, with a fluid dispensing assembly secured to the top plate member. By the use of the adsorbent media, a gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

公开(公告)号：SG152060A1

公开(公告)日：2009-05-29

申请号：SG2006085476

申请日：2003-05-29

Applicant: ADVANCED TECH MATERIALS

Inventor： OLANDER KARL W ,  DONATUCCI MATTHEW B ,  WANG LUPING ,  WODJENSKI MICHAEL J

IPC: F17C7/00 ,  F17C5/00 ,  B08B5/00 ,  G05B11/01 ,  G06F15/00

Abstract: Apparatus and method for dispensing a gas using a gas source (102) coupled in selective flow relationship with a gas manifold (126). The gas manifold (126) including flow circuitry (110) for discharging gas to a gas-using zone, and the gas source (126) includes a pressure-regulated gas source vessel (126) containing the gas at superatomospheric pressure.

公开(公告)号：WO2011160105A3

公开(公告)日：2012-04-05

申请号：PCT/US2011041013

申请日：2011-06-18

Applicant: ADVANCED TECH MATERIALS ,  SWEENEY JOSEPH D ,  AVILA ANTHONY M ,  WODJENSKI MICHAEL J ,  DESPRES JOSEPH R ,  BAUM THOMAS H

Inventor： SWEENEY JOSEPH D ,  AVILA ANTHONY M ,  WODJENSKI MICHAEL J ,  DESPRES JOSEPH R ,  BAUM THOMAS H

IPC: H01L21/66 ,  H01L21/02

CPC classification number: F17D3/01 ,  F17D3/00 ,  G05D7/0635 ,  H01J37/3171 ,  H01J2237/006 ,  H01J2237/30466 ,  H01L21/67017 ,  H01L21/67253 ,  Y10T137/0324 ,  Y10T137/86389

Abstract: Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.

Abstract translation: 用于确定流体供应容器的端点的装置和方法，其中通过设置在流体供应容器的内部容积中的流动通道在流体流动建立时具有静态流动限制装置和可选择性致动的阀元件来控制流体流动。 端点确定可以用于终止从流体供应容器供应的流体和/或从流体耗尽的供应容器切换到新鲜容器，以便连续或更新流体供应操作。 该设备和方法适用于诸如离子注入机之类的流体分解装置。

公开(公告)号：WO2007090104A2

公开(公告)日：2007-08-09

申请号：PCT/US2007061255

申请日：2007-01-29

Applicant: ADVANCED TECH MATERIALS ,  DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

Inventor： DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

IPC: B60K15/06

CPC classification number: B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

Abstract: Carbonaceous materials are described, having utility for fluid storage/dispensing and desulfurization applications. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage medium, e.g., for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. Infrared emitter devices are described, which utilize carbon adsorbent to store silane for reaction with oxygen in a controlled manner. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described. Also described is a method of increasing the loading capacity of a porous carbon adsorbent, by contacting of the carbon adsorbent with a swelling agent, followed by contacting of the carbon adsorbent with a pressurized gaseous penetration agent, and by removal of the swelling agent and penetration agent.

Abstract translation: 描述了碳质材料，其用于流体储存/分配和脱硫应用。 一种实施方案中的含碳材料是具有孔隙率的纳米多孔碳复合材料，其与至少部分填充有赋予复合材料的材料相比，与由硬度，耐磨性和韧性组成的组相比的特性相比具有增强特性 纳米多孔碳。 另一个实施方案是利用多孔碳材料作为氯气的储存介质。 另外的实施例使用多孔碳材料作为储氢介质，例如用于氢燃料电池。 在另一个实施方案中，多孔碳材料用作流体储存和分配系统中的吸附剂介质，在多个多孔碳制品的布置中，并且使用位置稳定结构来限制该装置的移动。 描述了红外发射器件，其利用碳吸附剂以可控的方式存储硅烷与氧反应。 描述了通过吸附剂的电阻和/或感应加热使碳吸附剂解吸剩余流体的布置。 还描述了一种通过使碳吸附剂与溶胀剂接触，然后使碳吸附剂与加压的气体渗透剂接触，并且通过除去溶胀剂和渗透物来增加多孔碳吸附剂的负载能力的方法 剂。

公开(公告)号：WO2004052487A3

公开(公告)日：2005-04-28

申请号：PCT/US0337719

申请日：2003-11-25

Applicant: ADVANCED TECH MATERIALS

Inventor： BRESTOVANSKY DENNIS ,  WODJENSKI MICHAEL J ,  ARNO JOSE I ,  CARRUTHERS J DONALD

IPC: B01D20060101 ,  B01D53/02 ,  B01D53/04 ,  B01D59/26 ,  B67D7/74 ,  B67D99/00 ,  F17C11/00

CPC classification number: B01D53/053 ,  B01D53/0407 ,  B01D2253/102 ,  B01D2253/304 ,  B01D2253/342 ,  B01D2257/40 ,  B01D2257/704 ,  B01D2257/706 ,  B01D2257/93 ,  B01D2258/0216 ,  B01D2259/4525 ,  F17C11/00 ,  F17C13/084 ,  F17C2201/0157 ,  F17C2205/0103 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2270/0518 ,  Y02E60/321 ,  Y10T137/0318

Abstract: A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.

Abstract translation: 液体储存和分配设备包括具有长方体形状的流体储存和分配容器，以及在通风气体柜中包括这种流体存储和分配装置和/或使用点的通气气体洗涤器的集成气体柜组件。 通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如，从气柜提供的工艺气体具有有毒或其他危险性质。