公开(公告)号：WO2013131706A1

公开(公告)日：2013-09-12

申请号：PCT/EP2013/052420

申请日：2013-02-07

Applicant: ASML NETHERLANDS B.V.

Inventor： KEMPEN, Antonius ,  DIJKSMAN, Johan ,  MESTROM, Wilbert

IPC: G03F7/20 ,  H05G2/00 ,  B01L3/02 ,  B41J2/045

CPC classification number: H05G2/006 ,  B05B17/0653 ,  G03F7/70033 ,  G03F7/70058 ,  G03F7/7085 ,  G03F7/709 ,  G03F7/70916

Abstract: The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation.

Abstract translation: 本发明提供一种监测包括含燃料毛细管和压电致动器（500）的辐射源燃料液滴流发生器的操作的方法。 该方法包括分析包括含燃料的毛细管和压电致动器的系统的共振频谱，以寻找声学系统的共振频率的变化，其可以指示系统的性质的变化 需要调查。

公开(公告)号：WO2012084558A1

公开(公告)日：2012-06-28

申请号：PCT/EP2011/072379

申请日：2011-12-09

Applicant: ASML NETHERLANDS B.V. ,  PEETERS, Emiel ,  KETELAARS, Wilhelmus ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  KOOLE, Roelof ,  VAN HEESCH, Chris

Inventor： PEETERS, Emiel ,  KETELAARS, Wilhelmus ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  KOOLE, Roelof ,  VAN HEESCH, Chris

IPC: G03F7/00

CPC classification number: C30B19/12 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

Abstract: A method is disclosed involving depositing a neutral orientation template layer onto a substrate after formation of chemical epitaxy or graphoepitaxy features on the substrate, but before deposition and orientation of a self-assemblable polymer. The orientation layer is arranged to bond with the substrate but not with certain features, so that it may be easily removed by vacuum or rinsing with organic solvent. The neutral orientation layer has a chemical affinity to match that of blocks in the self-assemblable polymer so that blocks of differing types wet the neutral orientation layer so that domains in the self-assembled polymer may lie side by side along the substrate surface, with interfaces normal to the substrate surface. The resulting aligned and oriented self-assembled polymer may itself be used as a resist for device lithography of the substrate.

Abstract translation: 公开了一种方法，其涉及在衬底上形成化学外延或者石墨电极特征之后，但在自组装聚合物的沉积和取向之前，将中性取向模板层沉积到衬底上。 取向层被布置成与基底结合，但不具有某些特征，使得其可以容易地通过真空或用有机溶剂漂洗除去。 中性取向层具有与自组装聚合物中的嵌段相符的化学亲和力，使得不同类型的块润湿中性取向层，使得自组装聚合物中的畴可以沿着衬底表面并排， 界面垂直于衬底表面。 所得到的对准和取向的自组装聚合物本身可以用作衬底的器件光刻的抗蚀剂。

公开(公告)号：WO2010063504A3

公开(公告)日：2010-06-10

申请号：PCT/EP2009/062963

申请日：2009-10-06

Applicant: ASML NETHERLANDS B.V. ,  KONINKLIJKE PHILIPS ELECTRONICS B.V. ,  VAN DER TEMPEL, Leendert ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  KRUIJT-STEGEMAN, Yvonne ,  LAMMERS, Jeroen ,  MUTSAERS, Cornelis

Inventor： VAN DER TEMPEL, Leendert ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  KRUIJT-STEGEMAN, Yvonne ,  LAMMERS, Jeroen ,  MUTSAERS, Cornelis

IPC: G03F7/00

Abstract: A method of imprint lithography involves the use of a void space in the substrate or imprint template. A gas pocket trapped between an imprint template and an imprintable, flowable medium on the substrate may lead to an irregularity once the imprintable medium has set. A void space allows the gas pocket to dissipate by flow or diffusion of gas into the void space, typically prior to setting the imprintable medium. A layer of solid porous medium as part of the imprint template, for instance as a layer forming or neighbouring the patterning surface of the template, may provide the void space. The void space of the porous layer acts as a void space into which the trapped gas can flow or diffuse. The substrate to be patterned may include a porous layer for the same purpose. A suitable solid porous medium includes a nanoporous silica.

公开(公告)号：WO2014019803A1

公开(公告)日：2014-02-06

申请号：PCT/EP2013/064258

申请日：2013-07-05

Applicant: ASML NETHERLANDS B.V.

Inventor： NIKIPELOV, Andrey ,  DIJKSMAN, Johan ,  YAKUNIN, Andrei ,  IVANOV, Vladimir

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006

Abstract: A method for generating radiation. Directing a first body from a first location. Directing a second body from a second, different location. The first body and second body being used to form a target at a plasma formation location. At least one of the first body and second body comprising a fuel for use in generating a radiation generating plasma. Directing initiating radiation at the target at the plasma formation location to generate a radiation generating plasma from the target.

Abstract translation: 一种产生辐射的方法。 从第一个位置引导第一个身体。 从第二个不同的位置引导第二个身体。 用于在等离子体形成位置形成靶的第一体和第二体。 第一主体和第二主体中的至少一个包括用于产生辐射产生等离子体的燃料。 引导在等离子体形成位置处的目标处的发射辐射以产生来自靶的辐射产生等离子体。

公开(公告)号：WO2012031818A3

公开(公告)日：2012-03-15

申请号：PCT/EP2011/062554

申请日：2011-07-21

Applicant: ASML NETHERLANDS B.V. ,  KOOLE, Roelof ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  PEETERS, Emiel

Inventor： KOOLE, Roelof ,  DIJKSMAN, Johan ,  WUISTER, Sander ,  PEETERS, Emiel

IPC: B81C1/00 ,  H01L21/027

Abstract: A method of lithography on a substrate uses a self-assembled polymer (SAP) layer deposited on the substrate, with first and second domains arranged in a pattern across the layer. A planarization layer is formed over the SAP and a development etch applied to substantially remove a portion of the planarization layer over the second domain leaving a cap of the planarization layer substantially covering the first domain. The uncapped second domain is then removed from the surface by a breakthrough etch leaving the capped first domain as a pattern feature on the surface. A transfer etch may then be used to transfer the pattern feature to the substrate using the capped first domain. The capping allows the second domain to be removed, e.g., without excessive loss of lateral feature width for the remaining first domain, even when the difference in etch resistance between the first and second domains is small.

公开(公告)号：WO2014067741A1

公开(公告)日：2014-05-08

申请号：PCT/EP2013/070616

申请日：2013-10-03

Applicant: ASML NETHERLANDS B.V.

Inventor： BADIE, Ramin ,  BANINE, Vadim ,  DIJKSMAN, Johan ,  KEMPEN, Antonius ,  YAKUNIN, Andrei ,  VAN GREEVENBROEK, Hendrikus ,  WINKELS, Gerhardus, Koen

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/006 ,  H05G2/008

Abstract: A radiation source (e.g., LPP - laser produced plasma source) for generation of extreme UV (EUV) radiation has at least two fuel particle streams having different trajectories. Each stream is directed to cross the path of an excitation (laser) beam focused at a plasma formation region, but the trajectories are spaced apart at the plasma formation region, and the streams phased, so that only one stream has a fuel particle in the plasma formation region at any time, and so that when a fuel particle from one stream is generating plasma and EUV radiation at the plasma generation region, other fuel particles are sufficiently spaced so as to be substantially unaffected by the plasma. The arrangement permits potential doubling of the radiation intensity achievable for a particular fuel particle size.

Abstract translation: 用于产生极端UV（EUV）辐射的辐射源（例如，LPP-激光产生的等离子体源）具有至少两个具有不同轨迹的燃料粒子流。 每个流被引导以跨过等离子体形成区域聚焦的激发（激光）束的路径，但是轨迹在等离子体形成区域处被间隔开，并且流被相位化，使得仅一条流在 等离子体形成区域，并且使得当来自一个流的燃料粒子在等离子体产生区域产生等离子体和EUV辐射时，其它燃料颗粒被充分间隔开，以致基本上不受等离子体的影响。 该布置允许对于特定燃料粒子尺寸可实现的辐射强度的潜在加倍。

公开(公告)号：WO2013029902A1

公开(公告)日：2013-03-07

申请号：PCT/EP2012/064945

申请日：2012-07-31

Applicant: ASML Netherlands B.V. ,  SCHIMMEL, Hendrikus ,  DIJKSMAN, Johan ,  LABETSKI, Dzmitry

Inventor： SCHIMMEL, Hendrikus ,  DIJKSMAN, Johan ,  LABETSKI, Dzmitry

IPC: H05G2/00 ,  G03F7/20

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/005 ,  H05G2/006

Abstract: Methods and apparatus are provided for promoting the coalescence of fuel droplets in a stream generated by a radiation source droplet stream generator for use in lithographic apparatus. Various examples are described in which a modulating voltage source is applied to the emitter so that the electrical characteristics of the droplets may be controlled. This results in acceleration and deceleration of droplets in the stream which causes them to merge and promotes coalescence.

Abstract translation: 提供了用于促进由用于光刻设备的辐射源液滴发生器产生的流中的燃料液滴聚结的方法和装置。 描述了各种示例，其中将调制电压源施加到发射器，使得可以控制液滴的电特性。 这导致流中液滴的加速和减速，这导致它们合并并促进聚结。

公开(公告)号：WO2014082811A1

公开(公告)日：2014-06-05

申请号：PCT/EP2013/072689

申请日：2013-10-30

Applicant: ASML NETHERLANDS B.V.

Inventor： DIJKSMAN, Johan ,  BADIE, Ramin ,  HULTERMANS, Ronald ,  LABETSKI, Dzmitry

IPC: H05G2/00

CPC classification number: G03F7/70033 ,  B05B17/06 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A droplet generator, for an EUV radiation source, comprises: a capillary in which, in use, molten material flows; an actuator configured to modulate a pressure inside the capillary; and a controller configured to drive the actuator at a driving frequency; wherein the droplet generator is arranged such that, in use, the driving frequency is equal or about equal to a main resonance frequency of the molten material in the capillary.

Abstract translation: 用于EUV辐射源的液滴发生器包括：毛细管，其中在使用中熔融材料流动; 构造成调节毛细管内的压力的致动器; 以及控制器，其构造成以驱动频率驱动所述致动器; 其中所述液滴发生器被布置为使得在使用中，所述驱动频率等于或大致等于所述毛细管中的熔融材料的主共振频率。

公开(公告)号：WO2013117355A1

公开(公告)日：2013-08-15

申请号：PCT/EP2013/050055

申请日：2013-01-03

Applicant: ASML NETHERLANDS B.V.

Inventor： DIJKSMAN, Johan ,  HULTERMANS, Ronald ,  KEMPEN, Antonius ,  BADIE, Ramin

IPC: H05G2/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  G03F7/70908 ,  G03F7/70916 ,  H05G2/005

Abstract: The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardly whereby gravity assists in the establishment of the stream. The droplets are monitored using a visualization system and once the stream is determined to have the desired characteristics the stream generator is moved to a second position of steady state use in which the droplet stream is emitted in a horizontal direction.

Abstract translation: 本发明提供了一种便于启动燃料液滴流发生器的方法和装置。 在起动阶段期间，燃料液滴流发生器被定位成使得燃料液滴向下发射，由此重力有助于流的建立。 使用可视化系统监测液滴，并且一旦确定流具有所需特性，则流发生器被移动到其中液滴流在水平方向上发射的稳态使用的第二位置。

公开(公告)号：WO2013020758A1

公开(公告)日：2013-02-14

申请号：PCT/EP2012/063019

申请日：2012-07-04

Applicant: ASML NETHERLANDS B.V. ,  LOOPSTRA, Erik ,  DIJKSMAN, Johan

Inventor： LOOPSTRA, Erik ,  DIJKSMAN, Johan

IPC: H05G2/00

CPC classification number: H05G2/003 ,  B05B1/086 ,  B05B1/24 ,  B05B17/0607 ,  H05G2/005 ,  H05G2/006

Abstract: A radiation source for generating EUV from a stream of molten fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel (314) and at least one laser configured to vaporize at least some of the droplets of fuel, whereby radiation is generated. The fuel droplet generator has a nozzle (301), a feed chamber, and a reservoir (303), with a pumping device arranged to supply a flow of fuel in molten state from the reservoir through the feed chamber and out of the nozzle as a stream of droplets. The feed chamber has an outer face in contact with a drive cavity (310) filled with a liquid, and the liquid is driven to oscillate by a vibrator (311) with the oscillation transmissible to the molten fuel in the feed chamber from the outer face of the feed chamber through the liquid. The arrangement permits oscillatory driving of a nozzle feed chamber to control fuel stream breakup into droplets without need for direct contact between a vibrator and the fuel nozzle feed chamber. This may reduce risk of loss of transmission from vibrator to feed chamber through contact failure and may allow for remote positioning of the vibrator at a cooled location for efficient operation.

Abstract translation: 用于通过LPP（激光产生等离子体）或（双激光等离子体）从熔融燃料液滴流产生EUV的辐射源具有燃料液滴发生器，其布置成提供燃料液滴（314）和至少一个激光器，其配置成 蒸发至少一些燃料液滴，从而产生辐射。 燃料液滴发生器具有喷嘴（301），进料室和储存器（303），其中泵送装置被布置成将熔融状态的燃料流从储存器通过进料室提供出来并作为喷嘴 液滴流。 进料室具有与填充有液体的驱动腔（310）接触的外表面，并且液体被振动器（311）驱动振荡，振动器（311）可从外表面传送到进料室中的熔融燃料 的进料室通过液体。 该布置允许喷嘴进料室的振荡驱动以将燃料流分解成液滴，而不需要振动器和燃料喷嘴进料室之间的直接接触。 这可以降低通过接触故障从振动器传递到进料室的损失的风险，并且可以允许将振动器远程定位在冷却的位置以进行有效的操作。