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1.发明申请FUEL SYSTEM FOR LITHOGRAPHIC APPARATUS, EUV SOURCE,LITHOGRAPHIC APPARATUS AND FUEL FILTERING METHOD 审中-公开用于平面设备的燃料系统，EUV源，光刻设备和燃料过滤方法
公开(公告)号：WO2013143733A1
公开(公告)日：2013-10-03
申请号：PCT/EP2013/052342
申请日：2013-02-06
Applicant: ASML NETHERLANDS B.V.
Inventor： MESTROM, Wilbert , SWINKELS, Gerardus
IPC: H05G2/00
CPC classification number: H05G2/006 , G03F7/70033 , H05G2/001 , H05G2/005 , H05G2/008 , Y10T137/0318 , Y10T137/794
Abstract: A fuel supply for an EUV radiation source is disclosed. The fuel supply comprises a reservoir (40) for retaining a volume of fuel (42), a nozzle (32), in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location, and a fuel contamination control arrangement (44) which separates contamination particles from the fuel. The contamination control arrangement comprises at least one acoustic filter. The acoustic filter may apply an acoustic standing wave to the fuel. Also disclosed is a method of controlling contamination in such a fuel supply.
Abstract translation: 公开了用于EUV辐射源的燃料供应。 燃料供应包括用于保持一定体积的燃料（42）的储存器（40），与储存器流体连接的喷嘴（32），并且构造成沿着等离子体形成位置的轨迹引导燃料流;以及 燃料污染控制装置（44），其将污染颗粒与燃料分离。 污染控制装置包括至少一个声学滤波器。 声学滤波器可以将声驻波应用于燃料。 还公开了一种控制这种燃料供应中的污染物的方法。
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2.发明申请POWER SOURCE FOR A LITHOGRAPHIC APPARATUS, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH A POWER SOURCE 审中-公开用于光刻设备的电源和包含这种电源的平面设备
公开(公告)号：WO2014090480A1
公开(公告)日：2014-06-19
申请号：PCT/EP2013/072927
申请日：2013-11-04
Applicant: ASML NETHERLANDS B.V.
Inventor： MESTROM, Wilbert , LABETSKI, Dzmitry , SWINKELS, Gerardus
CPC classification number: G03F7/70033 , H05G2/005 , H05G2/006 , H05G2/008
Abstract: Disclosed is a radiation source configured to generate a beam of EUV radiation by excitation of a fuel. The radiation source comprises a gas stream generation module which preconditions a droplet of the fuel by application of a high velocity gas stream to the droplet. Also disclosed is a lithographic apparatus comprising such a radiation source.
Abstract translation: 公开了一种被配置为通过激发燃料而产生EUV辐射束的辐射源。 辐射源包括气流发生模块，其通过向液滴施加高速气流来预处理燃料液滴。 还公开了包括这种辐射源的光刻设备。
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3.发明申请
公开(公告)号：WO2011098169A1
公开(公告)日：2011-08-18
申请号：PCT/EP2010/069192
申请日：2010-12-08
Applicant: ASML NETHERLANDS B.V. , KEMPEN, Antonius , BRULS, Richard , LOOPSTRA, Erik , MOORS, Roel , SWINKELS, Gerardus , MESTROM, Wilbert
Inventor： KEMPEN, Antonius , BRULS, Richard , LOOPSTRA, Erik , MOORS, Roel , SWINKELS, Gerardus , MESTROM, Wilbert
IPC: G03F7/20
CPC classification number: G03F7/70908 , B08B3/08 , G03F7/70033 , G03F7/708 , G03F7/70916 , G03F7/70925
Abstract: A radiation source generates extreme ultraviolet radiation for a lithographic apparatus as a chamber that is provided with a low pressure hydrogen environment. A trace amount of a protective compound, e.g., H 2 O, H 2 O 2 , O 2 , NH 3 or NO x , is provided to the chamber to assist in maintaining a protective oxide film on metal, e.g., titanium, components in the chamber.
Abstract translation: 辐射源为光刻设备产生极紫外辐射，作为设置有低压氢环境的室。 向腔室提供痕量的保护性化合物，例如H 2 O，H 2 O 2，O 2，NH 3或NO x，以有助于在室中的金属（例如钛）组分上维持保护性氧化膜。
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4.发明申请EUV RADIATION SOURCE COMPRISING A DROPLET ACCELERATOR AND LITHOGRAPHIC APPARATUS 审中-公开包含减速机加速器和平面设备的EUV辐射源
公开(公告)号：WO2011082891A1
公开(公告)日：2011-07-14
申请号：PCT/EP2010/068421
申请日：2010-11-29
Applicant: ASML NETHERLANDS B.V. , MESTROM, Wilbert , LOOPSTRA, Erik , SWINKELS, Gerardus , BUURMAN, Erik
Inventor： MESTROM, Wilbert , LOOPSTRA, Erik , SWINKELS, Gerardus , BUURMAN, Erik
IPC: H05G2/00
Abstract: An EUV radiation source includes a fuel supply configured to supply fuel to a plasma formation location. The fuel supply includes a nozzle configured to eject droplets of fuel, and a droplet accelerator configured to accelerate the fuel droplets. The EUV radiation source includes a laser radiation source configured to irradiate the fuel supplied by the fuel supply at the plasma formation location.
Abstract translation: EUV辐射源包括配置成向等离子体形成位置供应燃料的燃料供应。 燃料供给包括喷射燃料液滴的喷嘴，和配置成加速燃料液滴的液滴加速器。 EUV辐射源包括被配置为照射由等离子体形成位置处的燃料供应供应的燃料的激光辐射源。
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公开(公告)号：WO2013189827A3
公开(公告)日：2013-12-27
申请号：PCT/EP2013/062259
申请日：2013-06-13
Applicant: ASML NETHERLANDS B.V.
Inventor： RIEPEN, Michel , LABETSKI, Dzmitry , MESTROM, Wilbert , KAMPINGA, Wim, Ronald , NIEUWENKAMP, Jan, Okke , BRINKERT, Jacob , CASTELIJNS, Henricus , TEN KATE, Nicolaas , SCHIMMEL, Hendrikus , JANSEN, Hans , PAULUSSEN, Dennis , VIRGO, Brian , JILISEN, Reinier , BADIE, Ramin , RIJPMA, Albert , FRANKEN, Johannes , VAN PUTTEN, Peter , VAN DER STRAATEN, Gerrit
Abstract: A radiation source (SO) comprising a fuel source configured to deliver fuel to a location (12) from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface (24c, d) provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.
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Patent Agency Ranking
公开(公告)号：WO2013131706A1
公开(公告)日：2013-09-12
申请号：PCT/EP2013/052420
申请日：2013-02-07
Applicant: ASML NETHERLANDS B.V.
Inventor： KEMPEN, Antonius , DIJKSMAN, Johan , MESTROM, Wilbert
CPC classification number: H05G2/006 , B05B17/0653 , G03F7/70033 , G03F7/70058 , G03F7/7085 , G03F7/709 , G03F7/70916
Abstract: The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation.
Abstract translation: 本发明提供一种监测包括含燃料毛细管和压电致动器（500）的辐射源燃料液滴流发生器的操作的方法。 该方法包括分析包括含燃料的毛细管和压电致动器的系统的共振频谱，以寻找声学系统的共振频率的变化，其可以指示系统的性质的变化 需要调查。
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7.发明申请SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开光源收集器装置，光刻装置及装置制造方法
公开(公告)号：WO2013127587A2
公开(公告)日：2013-09-06
申请号：PCT/EP2013/051657
申请日：2013-01-29
Applicant: ASML NETHERLANDS B.V.
Inventor： BANINE, Vadim , FRANKEN, Johannes , KEMPEN, Antonius , VAN KAMPEN, Maarten , MESTROM, Wilbert
IPC: G03F7/20
CPC classification number: G03F7/70033 , G03F7/70916 , G03F7/7095 , H05G2/003
Abstract: A source collector apparatus includes a plasma generation apparatus arranged to excite a fuel to form a radiation emitting plasma, a collector arranged to collect the radiation, and a contamination receiving apparatus, wherein the contamination receiving apparatus is provided with a porous structure.
Abstract translation: 源收集器装置包括被配置为激励燃料以形成辐射发射等离子体的等离子体发生装置，被设置为收集辐射的收集器以及污染物接收装置，其中污染物接收装置被提供 具有多孔结构。
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公开(公告)号：WO2011082894A1
公开(公告)日：2011-07-14
申请号：PCT/EP2010/068461
申请日：2010-11-30
Applicant: ASML NETHERLANDS B.V. , LOOPSTRA, Erik , SWINKELS, Gerardus , BUURMAN, Erik , MESTROM, Wilbert
Inventor： LOOPSTRA, Erik , SWINKELS, Gerardus , BUURMAN, Erik , MESTROM, Wilbert
IPC: H05G2/00
Abstract: An EUV radiation source that includes a fuel supply configured to supply fuel to a plasma formation location. The fuel supply includes a reservoir configured to hold fuel at a temperature that is sufficiently high to maintain the fuel in liquid form, and a pressure vessel configured to contain the reservoir, the pressure vessel being at least partially thermally isolated from the reservoir. The EUV radiation source also includes a laser radiation source configured to irradiate fuel supplied by the fuel supply at the plasma formation location.
Abstract translation: EUV辐射源，其包括配置成向等离子体形成位置供应燃料的燃料供应。 燃料供应包括储存器，其构造成将燃料保持在足够高的温度以将燃料保持为液体形式;以及压力容器，其构造成容纳储存器，压力容器至少部分地与储存器热隔离。 EUV辐射源还包括被配置为照射由等离子体形成位置处的燃料供应供应的燃料的激光辐射源。
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公开(公告)号：EP2742387A1
公开(公告)日：2014-06-18
申请号：EP13704760.1
申请日：2013-02-07
Applicant: ASML Netherlands B.V.
Inventor： KEMPEN, Antonius , DIJKSMAN, Johan , MESTROM, Wilbert
CPC classification number: H05G2/006 , B05B17/0653 , G03F7/70033 , G03F7/70058 , G03F7/7085 , G03F7/709 , G03F7/70916
Abstract: The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation.
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公开(公告)号：EP2742387B1
公开(公告)日：2015-04-01
申请号：EP13704760.1
申请日：2013-02-07
Applicant: ASML Netherlands B.V.
Inventor： KEMPEN, Antonius , DIJKSMAN, Johan , MESTROM, Wilbert
CPC classification number: H05G2/006 , B05B17/0653 , G03F7/70033 , G03F7/70058 , G03F7/7085 , G03F7/709 , G03F7/70916
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