公开(公告)号：WO2013117518A2

公开(公告)日：2013-08-15

申请号：PCT/EP2013/052154

申请日：2013-02-04

Applicant: ASML NETHERLANDS B.V.

Inventor： CADEE, Theodorus, Petrus, Maria ,  BANINE, Vadim, Yevgenyevich ,  ZAAL, Koen, Jacobus, Johannes, Maria ,  BADIE, Ramin ,  SINGH, Harmeet

IPC: G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/70708 ,  G03F7/70733 ,  H01L21/6875

Abstract: A lithographic apparatus has a support that is provided with burls for holding an object. The support has been fabricated with a lithographic manufacturing method, e.g., a MEMS-technology, so as to create burls whose orientations or positions are individually electrically controllable.

Abstract translation: 光刻设备具有一个支撑件，该支撑件设置有用于保持物体的毛刺。 已经利用诸如MEMS技术的光刻制造方法来制造支撑件，以便产生其取向或位置可单独地电可控制的孔。

公开(公告)号：WO2014067741A1

公开(公告)日：2014-05-08

申请号：PCT/EP2013/070616

申请日：2013-10-03

Applicant: ASML NETHERLANDS B.V.

Inventor： BADIE, Ramin ,  BANINE, Vadim ,  DIJKSMAN, Johan ,  KEMPEN, Antonius ,  YAKUNIN, Andrei ,  VAN GREEVENBROEK, Hendrikus ,  WINKELS, Gerhardus, Koen

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/006 ,  H05G2/008

Abstract: A radiation source (e.g., LPP - laser produced plasma source) for generation of extreme UV (EUV) radiation has at least two fuel particle streams having different trajectories. Each stream is directed to cross the path of an excitation (laser) beam focused at a plasma formation region, but the trajectories are spaced apart at the plasma formation region, and the streams phased, so that only one stream has a fuel particle in the plasma formation region at any time, and so that when a fuel particle from one stream is generating plasma and EUV radiation at the plasma generation region, other fuel particles are sufficiently spaced so as to be substantially unaffected by the plasma. The arrangement permits potential doubling of the radiation intensity achievable for a particular fuel particle size.

Abstract translation: 用于产生极端UV（EUV）辐射的辐射源（例如，LPP-激光产生的等离子体源）具有至少两个具有不同轨迹的燃料粒子流。 每个流被引导以跨过等离子体形成区域聚焦的激发（激光）束的路径，但是轨迹在等离子体形成区域处被间隔开，并且流被相位化，使得仅一条流在 等离子体形成区域，并且使得当来自一个流的燃料粒子在等离子体产生区域产生等离子体和EUV辐射时，其它燃料颗粒被充分间隔开，以致基本上不受等离子体的影响。 该布置允许对于特定燃料粒子尺寸可实现的辐射强度的潜在加倍。

公开(公告)号：WO2014082811A1

公开(公告)日：2014-06-05

申请号：PCT/EP2013/072689

申请日：2013-10-30

Applicant: ASML NETHERLANDS B.V.

Inventor： DIJKSMAN, Johan ,  BADIE, Ramin ,  HULTERMANS, Ronald ,  LABETSKI, Dzmitry

IPC: H05G2/00

CPC classification number: G03F7/70033 ,  B05B17/06 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A droplet generator, for an EUV radiation source, comprises: a capillary in which, in use, molten material flows; an actuator configured to modulate a pressure inside the capillary; and a controller configured to drive the actuator at a driving frequency; wherein the droplet generator is arranged such that, in use, the driving frequency is equal or about equal to a main resonance frequency of the molten material in the capillary.

Abstract translation: 用于EUV辐射源的液滴发生器包括：毛细管，其中在使用中熔融材料流动; 构造成调节毛细管内的压力的致动器; 以及控制器，其构造成以驱动频率驱动所述致动器; 其中所述液滴发生器被布置为使得在使用中，所述驱动频率等于或大致等于所述毛细管中的熔融材料的主共振频率。

公开(公告)号：WO2013117355A1

公开(公告)日：2013-08-15

申请号：PCT/EP2013/050055

申请日：2013-01-03

Applicant: ASML NETHERLANDS B.V.

Inventor： DIJKSMAN, Johan ,  HULTERMANS, Ronald ,  KEMPEN, Antonius ,  BADIE, Ramin

IPC: H05G2/00

CPC classification number: H05G2/006 ,  G03F7/70033 ,  G03F7/70908 ,  G03F7/70916 ,  H05G2/005

Abstract: The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardly whereby gravity assists in the establishment of the stream. The droplets are monitored using a visualization system and once the stream is determined to have the desired characteristics the stream generator is moved to a second position of steady state use in which the droplet stream is emitted in a horizontal direction.

Abstract translation: 本发明提供了一种便于启动燃料液滴流发生器的方法和装置。 在起动阶段期间，燃料液滴流发生器被定位成使得燃料液滴向下发射，由此重力有助于流的建立。 使用可视化系统监测液滴，并且一旦确定流具有所需特性，则流发生器被移动到其中液滴流在水平方向上发射的稳态使用的第二位置。

公开(公告)号：WO2013189827A3

公开(公告)日：2013-12-27

申请号：PCT/EP2013/062259

申请日：2013-06-13

Applicant: ASML NETHERLANDS B.V.

Inventor： RIEPEN, Michel ,  LABETSKI, Dzmitry ,  MESTROM, Wilbert ,  KAMPINGA, Wim, Ronald ,  NIEUWENKAMP, Jan, Okke ,  BRINKERT, Jacob ,  CASTELIJNS, Henricus ,  TEN KATE, Nicolaas ,  SCHIMMEL, Hendrikus ,  JANSEN, Hans ,  PAULUSSEN, Dennis ,  VIRGO, Brian ,  JILISEN, Reinier ,  BADIE, Ramin ,  RIJPMA, Albert ,  FRANKEN, Johannes ,  VAN PUTTEN, Peter ,  VAN DER STRAATEN, Gerrit

IPC: G03F7/20 ,  H05G2/00

Abstract: A radiation source (SO) comprising a fuel source configured to deliver fuel to a location (12) from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface (24c, d) provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.