-
公开(公告)号：SG137811A1
公开(公告)日：2007-12-28
申请号：SG2007036841
申请日：2007-05-21
Applicant: ASML NETHERLANDS BV
Inventor： STAVENGA MARCO KOERT , BRULS RICHARD JOSEPH , JANSEN HANS , LEENDERS MARTINUS HENDRIKUS AN , WANTEN PETER FRANCISCUS , CUIJPERS JOHANNES WILHEMUS JAC , BEEREN RAYMOND GERARDUS MARIUS , DE JONG ANTHONIUS MARTINUS COR
Abstract: An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves to clean a surface of an immersion lithographic projection apparatus are disclosed.
Search Results
1
records
(took 0.022 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
