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公开(公告)号：SG118242A1
公开(公告)日：2006-01-27
申请号：SG200402194
申请日：2004-04-22
Applicant: ASML NETHERLANDS BV
Inventor： WEHRENS MARTIJN GERARD DOMINIQUE , UITTERDIJK TAMMO , LUIJTEN CARLO CORNELIS MARIA , CICILIA ORLANDO SERAPIO , BOOM HERMAN , BRULS RICHARD JOSEPH , PONGERS WILLEM RICHARD , HOFMANS GERARDUS CAROLUS JOHANNUS , JANSEN ALBERT JOHANNES MARIA , DIJK VAN HENDRIKUS ALPHONSUS LUDOVICUS , BAGGEN MARCEL KOENRAAD MARIE , JASPER JOHANNES CHRISTIAAN MARIA , DEMARTEAU MARCEL JOHANNES LOUIS MARIE
IPC: G03F1/62 , G03F1/64 , G03F1/82 , G03F7/20 , H01L21/027
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