Patent search ap:("ASML NETHERLANDS BV") AND inv:"DRIE NHUIZEN BERT" Page 1

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发明专利
METHOD AND APPARATUS FOR GENERATING RADIATION. 未知

公开(公告)号：NL2011580A

公开(公告)日：2014-05-08

申请号：NL2011580

申请日：2013-10-10

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK , YAKUNIN ANDREI , BANINE VADIM , NIKIPELOV ANDREY , OSORIO OLIVEROS EDGAR , STRUYCKEN ALEXANDER , DRIE NHUIZEN BERT , SCHOOT JAN

IPC: G03F7/20 , H05G2/00

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