中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

8 records (took 0.023 seconds)

    RADIATION COLLECTOR, COOLING SYSTEM AND LITHOGRAPHIC APPARATUS
    2.
    发明申请
    RADIATION COLLECTOR, COOLING SYSTEM AND LITHOGRAPHIC APPARATUS 审中-公开
    辐射收集器，冷却系统和光刻设备

    公开(公告)号：WO2014170093A3

    公开(公告)日：2015-01-22

    申请号：PCT/EP2014055870

    申请日：2014-03-24

    Applicant: ASML NETHERLANDS BV

    Inventor： VANDERHALLEN IVO ,  STRUYCKEN ALEXANDER ,  FRANKEN JOHANNES

    IPC: G03F7/20

    CPC classification number: G02B19/0023 ,  G02B5/09 ,  G02B5/10 ,  G02B7/1815 ,  G02B19/009 ,  G02B27/0006 ,  G03F7/70033 ,  G03F7/70175 ,  G03F7/70575 ,  G03F7/70891 ,  G03F7/7095

    Abstract: A radiation collector (141) comprising a plurality of reflective surfaces (400-405), wherein each of the plurality of reflective surfaces is coincident with part of one of a plurality of ellipsoids (40-45), wherein the plurality of ellipsoids have in common a first focus (12) and a second focus (16), each of the plurality of reflective surfaces coincident with a different one of the plurality of ellipsoids, wherein the plurality of reflective surfaces are configured to receive radiation originating from the first focus (12) and reflect the radiation to the second focus (16). An apparatus (820) shown in figure 11 comprising a cooling system (832) and a reflector (831), wherein the cooling system is configured to cool the reflector, the cooling system comprising: a porous structure (823) situated in thermal contact with the reflector, wherein the porous structure is configured to receive a coolant in a liquid phase state; a condenser (825) configured to receive coolant from (826) the porous structure in a vapour phase state, condense the coolant thereby causing the coolant to undergo a phase change to a liquid phase state and output the condensed coolant in the liquid phase state for entry (827) into the porous structure.

    Abstract translation: 一种辐射收集器（141），包括多个反射表面（400-405），其中所述多个反射表面中的每一个与多个椭圆体（40-45）中的一个的一部分重合，其中所述多个椭圆体 共同的第一焦点（12）和第二焦点（16），所述多个反射表面中的每一个与所述多个椭圆体中的不同的一个重合，其中所述多个反射表面被配置为接收源自所述第一焦点的辐射 12）并将辐射反射到第二焦点（16）。 图11所示的装置（820）包括冷却系统（832）和反射器（831），其中所述冷却系统构造成冷却所述反射器，所述冷却系统包括：多孔结构（823），其与 所述反射器，其中所述多孔结构被构造成接收处于液相状态的冷却剂; 冷凝器（825），被配置为以气相状态从（826）多孔结构接收冷却剂，冷凝冷却剂，从而使冷却剂经历相变至液相状态，并输出处于液相状态的冷凝的冷却剂 进入（827）进入多孔结构。

    RADIATION COLLECTOR, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS.
    5.
    发明专利
    RADIATION COLLECTOR, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS. 未知

    公开(公告)号：NL2012499A

    公开(公告)日：2014-10-20

    申请号：NL2012499

    申请日：2014-03-24

    Applicant: ASML NETHERLANDS BV

    Inventor： VANDERHALLEN IVO ,  STRUYCKEN ALEXANDER ,  FRANKEN JOHANNES

    IPC: G03F7/20 ,  H05G2/00

    Abstract: A radiation collector (141) comprising a plurality of reflective surfaces (400-405), wherein each of the plurality of reflective surfaces is coincident with part of one of a plurality of ellipsoids (40-45), wherein the plurality of ellipsoids have in common a first focus (12) and a second focus (16), each of the plurality of reflective surfaces coincident with a different one of the plurality of ellipsoids, wherein the plurality of reflective surfaces are configured to receive radiation originating from the first focus (12) and reflect the radiation to the second focus (16). An apparatus (820) shown in FIG. 11 comprising a cooling system (832) and a reflector (831), wherein the cooling system is configured to cool the reflector, the cooling system comprising: a porous structure (823) situated in thermal contact with the reflector, wherein the porous structure is configured to receive a coolant in a liquid phase state; a condenser (825) configured to receive coolant from (826) the porous structure in a vapour phase state, condense the coolant thereby causing the coolant to undergo a phase change to a liquid phase state and output the condensed coolant in the liquid phase state for entry (827) into the porous structure.

Patent Agency Ranking