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公开(公告)号：NL2011237A
公开(公告)日：2014-02-04
申请号：NL2011237
申请日：2013-07-30
Applicant: ASML NETHERLANDS BV
Inventor： BANINE VADIM , MINNAERT ARTHUR , MUITJENS MARCEL , YAKUNIN ANDREI , SCACCABAROZZI LUIGI , MALLMANN HANS , BAL KURSAT , LUIJTEN CARLO , NIENHUYS HAN-KWANG , HUIJBERTS ALEXANDER , GASSELING PAULUS , RIZO DIAGO PEDRO , KAMPEN MAARTEN , AERLE NICK
IPC: G03F7/20
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