公开(公告)号：NL2004497A

公开(公告)日：2010-11-02

申请号：NL2004497

申请日：2010-04-01

Applicant: ASML NETHERLANDS BV

Inventor： THOMAS IVO ,  LANDHEER SIEBE ,  MEESTER ARNOUT ,  MIRANDA MARCIO ,  TANASA GHEORGHE

IPC: G03F7/20

公开(公告)号：NL2004907A

公开(公告)日：2010-12-20

申请号：NL2004907

申请日：2010-06-17

Applicant: ASML NETHERLANDS BV

Inventor： JACOBS JOHANNES ,  JANSEN HANS ,  BRUIJSTENS JEROEN ,  THOMAS IVO ,  KUSTERS GERARDUS ,  MIRANDA MARCIO ,  TANASA GHEORGHE

IPC: G03F7/20

公开(公告)号：NL2003392A

公开(公告)日：2010-03-18

申请号：NL2003392

申请日：2009-08-25

Applicant: ASML NETHERLANDS BV

Inventor： BRUIJSTENS JEROEN ,  BRULS RICHARD ,  JANSEN HANS ,  LANDHEER SIEBE ,  MEESTER ARNOUT ,  THOMAS IVO ,  MIRANDA MARCIO ,  TANASA GHEORGHE

IPC: G03F7/20

公开(公告)号：NL2008250A

公开(公告)日：2012-09-11

申请号：NL2008250

申请日：2012-02-07

Applicant: ASML NETHERLANDS BV

Inventor： NIENHUYS HAN-KWANG ,  CUIJPERS MARTINUS ,  LEVASIER LEON ,  SCHOOT JAN ,  VIJVER YURI ,  VOZNYI OLEG ,  JANSSEN FRANCISCUS ,  PHILIPS DANNY ,  MIRANDA MARCIO ,  GALAKTIONOV OLEKSIY ,  BAL KURSAT ,  SCHMITZ ROGER ,  LEROUX ALAIN ,  RANJAN MANISH ,  RIJPMA ALBERT

IPC: G03F7/20

公开(公告)号：NL2005874A

公开(公告)日：2011-07-25

申请号：NL2005874

申请日：2010-12-17

Applicant: ASML NETHERLANDS BV

Inventor： PATEL HRISHIKESH ,  JACOBS JOHANNES ,  KUSTERS GERARDUS ,  LAURENT THIBAULT ,  MIRANDA MARCIO ,  BLOKS RUUD ,  FENG PENG ,  KUNNEN JOHAN

IPC: G03F7/20

公开(公告)号：NL2004808A

公开(公告)日：2011-01-12

申请号：NL2004808

申请日：2010-06-03

Applicant: ASML NETHERLANDS BV

Inventor： PATEL HRISHIKESH ,  STEFFENS KOEN ,  LEMPENS HAN ,  LIEROP MATHIEUS ,  METSENAERE CHRISTOPHE ,  SPRUYTENBURG PATRICK ,  VERSTRAETE JORIS ,  BLOKS RUUD ,  MIRANDA MARCIO ,  JACOBS JOHANNES ,  LIEBREGTS PAULUS ,  HAM RONALD ,  SIMONS WILHELMUS ,  DIRECKS DANIEL ,  JANSSEN FRANCISCUS ,  BERKVENS PAUL ,  BRANDS GERT-JAN

IPC: G03F7/20

Abstract: A fluid handling structure configured to supply and confine immersion liquid to a space defined between a projection system and a facing surface facing the fluid handling structure is disclosed. The fluid handling structure includes a supply passage formed therein for the passage of fluid from outside the fluid handling structure to the space, and a thermal isolator positioned adjacent the supply passage at least partly to isolate fluid in the supply passage from a thermal load induced in the fluid handling structure.

公开(公告)号：NL2003395A

公开(公告)日：2010-03-18

申请号：NL2003395

申请日：2009-08-26

Applicant: ASML NETHERLANDS BV

Inventor： BRUIJSTENS JEROEN ,  LEE MAURICE ,  TANASA GHEORGHE ,  NOORDAM LAMBERTUS DOMINICUS ,  BRULS RICHARD ,  JANSEN HANS ,  LANDHEER SIEBE ,  JORRITSMA LAURENTIUS ,  MEESTER ARNOUT ,  JANSEN BAUKE ,  THOMAS IVO ,  MIRANDA MARCIO

IPC: G03F7/20