公开(公告)号：NL2005951A

公开(公告)日：2011-08-03

申请号：NL2005951

申请日：2011-01-05

Applicant: ASML NETHERLANDS BV

Inventor： DIRECKS DANIEL ,  EUMMELEN ERIK ,  SCHEPERS MAIKEL ,  DUNGEN CLEMENS ,  SHULEPOV SERGEI ,  MULDER PIETER ,  BESSEMS DAVID ,  BARAGONA MARCO

IPC: G03F7/20

公开(公告)号：NL2006389A

公开(公告)日：2011-10-18

申请号：NL2006389

申请日：2011-03-14

Applicant: ASML NETHERLANDS BV

Inventor： PHILIPS DANNY ,  DIRECKS DANIEL ,  DUNGEN CLEMENS ,  SCHEPERS MAIKEL ,  BERKVENS PAUL ,  ZANDEN MARCUS ,  MULDER PIETER

IPC: G03F7/20

Abstract: A fluid handling structure configured to supply immersion liquid to a space defined between a projection system and a facing surface facing the fluid handling structure is disclosed. An undersurface of the fluid handling structure has a supply opening configured to supply fluid toward the facing surface, a plurality of extraction openings configured to remove fluid from between the fluid handling structure and the facing surface, and a protrusion between the supply opening and the extraction openings.