Patent search ap:("ASML NETHERLANDS BV") AND inv:"EUMMELEN ERIK" Page 1

1.

发明专利
A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2009139A

公开(公告)日：2013-02-06

申请号：NL2009139

申请日：2012-07-06

Applicant: ASML NETHERLANDS BV

Inventor： BESSEMS DAVID , EUMMELEN ERIK , RIEPEN MICHEL , CORTIE ROGIER , BAETEN HENS , ROPS CORNELIUS

IPC: G03F7/20

2.

发明专利
A FLUID HANDLING DEVICE, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2004362A

公开(公告)日：2010-10-12

申请号：NL2004362

申请日：2010-03-09

Applicant: ASML NETHERLANDS BV

Inventor： EUMMELEN ERIK , STEFFENS KOEN

IPC: G03F7/20

3.

发明专利
LITHOGRAPHIC APPARATUS AND A METHOD OF MEASURING FLOW RATE IN A TWO PHASE FLOW. 未知

公开(公告)号：NL2004820A

公开(公告)日：2011-01-04

申请号：NL2004820

申请日：2010-06-04

Applicant: ASML NETHERLANDS BV

Inventor： KRAMER PIETER , NET ANTONIUS , EUMMELEN ERIK , KUIJPER ANTHONIE

IPC: G03F7/20

Abstract: A lithographic apparatus is disclosed that includes a conduit for two phase flow therethrough. A flow separator is provided to separate the two phase flow into a gas flow and a liquid flow. A flow meter measures the flow rate of fluid in the gas flow or the liquid flow.

4.

发明专利
A FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2007453A

公开(公告)日：2012-04-19

申请号：NL2007453

申请日：2011-09-21

Applicant: ASML NETHERLANDS BV

Inventor： BESSEMS DAVID , CORTIE ROGIER , ZANDEN MARCUS , ROPS CORNELIUS , WILLEMS PAUL , EUMMELEN ERIK , WINKEL JIMMY

IPC: G03F7/20

5.

发明专利
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2006054A

公开(公告)日：2011-08-10

申请号：NL2006054

申请日：2011-01-24

Applicant: ASML NETHERLANDS BV

Inventor： RIEPEN MICHEL , ROPS CORNELIUS , VERDONCK ADRIANUS MARINUS , EUMMELEN ERIK , GRAAF SANDRA , CORTIE ROGIER HENDRIKUS MAGDALENA , KANEKO TAKESHI , DZIOMKINA NINA , BOKHOVEN LAURENTIUS , EVANGELISTA FABRIZIO , BESSEMS DAVID

IPC: G03F7/20

6.

发明专利
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2005951A

公开(公告)日：2011-08-03

申请号：NL2005951

申请日：2011-01-05

Applicant: ASML NETHERLANDS BV

Inventor： DIRECKS DANIEL , EUMMELEN ERIK , SCHEPERS MAIKEL , DUNGEN CLEMENS , SHULEPOV SERGEI , MULDER PIETER , BESSEMS DAVID , BARAGONA MARCO

IPC: G03F7/20

7.

发明专利
A SHUTTER MEMBER, A LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. 未知

公开(公告)号：NL2005322A

公开(公告)日：2011-03-14

申请号：NL2005322

申请日：2010-09-07

Applicant: ASML NETHERLANDS BV

Inventor： KANEKO TAKESHI , EUMMELEN ERIK , DZIOMKINA NINA , KRUIZINGA MATTHIAS

IPC: G03F7/20

8.

发明专利
未知

公开(公告)号：NL2003575A

公开(公告)日：2010-05-03

申请号：NL2003575

申请日：2009-09-30

Applicant: ASML NETHERLANDS BV

Inventor： STEFFENS KOEN , HAM RONALD , EUMMELEN ERIK

IPC: G03F7/20

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