CLAMP ASSEMBLY
    7.
    发明公开
    CLAMP ASSEMBLY 审中-公开

    公开(公告)号:US20230420287A1

    公开(公告)日:2023-12-28

    申请号:US18137799

    申请日:2023-04-21

    CPC classification number: H01L21/68721 H01L21/67092 H01L21/68735

    Abstract: A clamp assembly includes at least one clamp which is provided to clamp a workpiece in electroless plating, etching, electroplating or cleaning process. The clamp includes a base, a clamping element and a limiting element. The base is mounted on a carrier and includes a guide hole and a first limiting hole which are communicated with each other. The clamping element includes a guide rod and a second limiting hole, the guide rod is inserted into the guide hole to allow the second limiting hole located on the guide hole to be communicated with the first limiting hole. The limiting element is inserted into the first and second limiting holes to integrate the base with the clamping element for clamping the workpiece.

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