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Patent Agency Ranking
公开(公告)号：EP1501115A3
公开(公告)日：2007-09-05
申请号：EP04076891.3
申请日：2004-07-01
Applicant: FEI COMPANY
Inventor： Hill, Ray , Sanford, Colin , DiManna, Mark , Tanguay, Michael , Scipioni, Lawrence
CPC classification number: H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
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公开(公告)号：EP1501115B1
公开(公告)日：2009-07-01
申请号：EP04076891.3
申请日：2004-07-01
Applicant: FEI COMPANY
Inventor： Hill, Ray , Sanford, Colin , DiManna, Mark , Tanguay, Michael , Scipioni, Lawrence
CPC classification number: H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
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公开(公告)号：EP1367629A2
公开(公告)日：2003-12-03
申请号：EP03076961.6
申请日：2003-05-30
Applicant: FEI COMPANY
Inventor： Groholski, Alexander , Drainoni, Riccardo , Tanguay, Michael
IPC: H01J37/02
CPC classification number: H01J37/28 , H01J37/023 , H01J37/16 , H01J37/3056 , H01J2237/0245
Abstract: The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.
Abstract translation: 本发明提供了一种列倾斜装置和方法，用于将扫描光束系统中的光束的偏离正常入射角提供给通过在操作期间电机械调节的偏心点的基板上，同时保持色谱柱的真空完整性 和工作室，没有引起显着的振动。
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公开(公告)号：EP1367629A3
公开(公告)日：2009-01-07
申请号：EP03076961.6
申请日：2003-05-30
Applicant: FEI COMPANY
Inventor： Groholski, Alexander , Drainoni, Riccardo , Tanguay, Michael
IPC: H01J37/02
CPC classification number: H01J37/28 , H01J37/023 , H01J37/16 , H01J37/3056 , H01J2237/0245
Abstract: The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.
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公开(公告)号：EP1501115A2
公开(公告)日：2005-01-26
申请号：EP04076891.3
申请日：2004-07-01
Applicant: FEI Company
Inventor： Hill, Ray , Sanford, Colin , DiManna, Mark , Tanguay, Michael , Scipioni, Lawrence
CPC classification number: H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
Abstract: A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
Abstract translation: 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得在离子束操作期间物镜不被关闭。 可选的二次粒子检测器和可选的电荷中和喷枪适于在存在磁场的情况下操作。 磁物镜被设计成具有恒定的热标记，而不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。
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