Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
    9.
    发明专利
    Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same 审中-公开
    化学敏感性或辐射敏感性树脂组合物和使用其的图案形成方法

    公开(公告)号:JP2013167731A

    公开(公告)日:2013-08-29

    申请号:JP2012030486

    申请日:2012-02-15

    Abstract: PROBLEM TO BE SOLVED: To provide an actinic ray-sensitive or radiation-sensitive resin composition capable of suppressing pattern collapse and improving LWR (line width roughness) and storage stability, and a pattern forming method using the composition.SOLUTION: An actinic ray-sensitive or radiation-sensitive resin composition comprises: (A) resin having a repeating unit expressed by the following general formula (1) and a repeating unit that is decomposed by an action of an acid to increase the solubility in an alkali developing solution; (B) a compound Rincluding at least one nitrogen atom or a compound which is an ionic compound including a basic moiety Rincluding at least one nitrogen atom, both having such a property that R-Hor R-Has conjugated acids thereof has a pKa of 8 or lower; and (C) a compound that generates an acid by irradiation with actinic rays or radiation. In the general formula (1), L represents a single bond or a divalent connecting group; Rrepresents a hydrogen atom or an alkyl group; and Z represents a cyclic acid anhydride structure.

    Abstract translation: 要解决的问题:提供能够抑制图案塌陷并提高LWR(线宽粗糙度)和保存稳定性的光化射线敏感性或辐射敏感性树脂组合物以及使用该组合物的图案形成方法。解决方案: 敏感或辐射敏感性树脂组合物包含:(A)具有由以下通式(1)表示的重复单元的树脂和通过酸作用分解以提高在碱性显影液中的溶解度的重复单元; (B)包含至少一个氮原子的化合物或作为包含碱性部分的离子化合物的化合物包含至少一个氮原子的化合物,其具有R-Hor R-has共轭酸的pKa为8的性质 或更低; 和(C)通过用光化射线或辐射照射产生酸的化合物。 在通式(1)中,L表示单键或二价连接基团; R表示氢原子或烷基; Z表示环状酸酐结构。

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