레지스트 조성물, 레지스트막, 패턴 형성 방법, 전자 디바이스의 제조 방법

    公开(公告)号:KR20200128088A

    公开(公告)日:2020-11-11

    申请号:KR20207027901

    申请日:2019-04-12

    Applicant: FUJIFILM CORP

    Abstract: 라인위드스러프니스성능과노광래티튜드성능을, 온도가변화할수 있는환경하에서경시보존한경우에있어서도유지가능한레지스트조성물, 및이것을이용한레지스트막, 패턴형성방법, 및전자디바이스의제조방법을제공한다. 산의작용에의하여분해되어극성기를발생하는기를갖는반복단위와, 락톤구조, 설톤구조, 설폰일구조, 및카보네이트구조중 적어도어느하나를갖는반복단위를포함하는수지, 및활성광선또는방사선의조사에의하여산을발생하는화합물을포함하는레지스트조성물로서, 상기수지의분산도가 1.7 이하이며, Na, K, Ca, Fe, Cu, Mg, Mn, Al, Li, Cr, Ni, Sn, Pb, Zn, Co, Ti, Ag, W, V, Ba, Au, As, Cd, Zr 및 Mo의각 금속원소의함유량의총합인금속원소함유량이, 상기레지스트조성물의전체질량에대하여, 0.01질량ppt 이상 1질량ppb 이하이다.

    CURABLE COMPOSITION, CURED FILM, NEAR INFRARED CUT FILTER, CAMERA MODULE AND METHOD FOR MANUFACTURING CAMERA MODULE

    公开(公告)号:SG10201710324WA

    公开(公告)日:2018-02-27

    申请号:SG10201710324W

    申请日:2014-06-09

    Applicant: FUJIFILM CORP

    Abstract: Provided are a curable composition which can be used to produce a cured film that does not easily allow a near infrared-absorbing pigment to be eluted even when the cured film is immersed in a solvent, a cured film, a near infrared cut filter, a camera module, and a method for manufacturing a camera module. The curable composition including: a near infrared-absorbing pigment (A) and a curable compound (B) having one or more atoms or groups selected from a fluorine atom, a silicon atom, a linear alkyl group having 8 or more carbon atoms, and a branched alkyl group having 3 or more carbon atoms.

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