公开(公告)号：GB2503851B

公开(公告)日：2016-01-20

申请号：GB201318741

申请日：2012-05-08

Applicant: IBM ,  KING ABDULAZIZ CITY SCI & TECH

Inventor： KHAYYAT MAHA M ,  CORTES NORMA E SOSA ,  SAENGER KATHERINE L ,  BEDELL STEPHEN W ,  SADANA DEVENDRA K

IPC: H01L21/18 ,  H01L21/30

公开(公告)号：GB2495166B

公开(公告)日：2015-05-06

申请号：GB201209218

申请日：2011-02-16

Applicant: IBM

Inventor： BEDELL STEPHEN W ,  FOGEL KEITH E ,  CORTES NORMA E SOSA ,  SADANA DEVENDRA ,  SHAHRJERDI DAVOOD ,  WACASER BRENT A

IPC: H01L31/0304 ,  H01L31/042 ,  H01L31/18

公开(公告)号：GB2503851A

公开(公告)日：2014-01-08

申请号：GB201318741

申请日：2012-05-08

Applicant: IBM

Inventor： KHAYYAT MAHA M ,  CORTES NORMA E SOSA ,  SAENGER KATHERINE L ,  BEDELL STEPHEN W ,  SADANA DEVENDRA K

IPC: H01L21/18 ,  H01L21/30

Abstract: Method to (i) introduce additional control into a material spalling process, thus improving both the crack initiation and propagation, and (ii) increase the range of selectable spalling depths are provided. In one embodiment, the method includes providing a stressor layer on a surface of a base substrate at a first temperature which is room temperature. Next, the base substrate including the stressor layer is brought to a second temperature which is less than room temperature. The base substrate is spalled at the second temperature to form a spalled material layer. Thereafter, the spalled material layer is returned to room temperature, i.e., the first temperature.