OPTICAL PROXIMITY CORRECTION METHOD

    公开(公告)号:JPH1069058A

    公开(公告)日:1998-03-10

    申请号:JP12729397

    申请日:1997-05-16

    Applicant: IBM

    Abstract: PROBLEM TO BE SOLVED: To improve the efficiency and accuracy of optical proximity correction by sorting associated edge parts by a predetermined proximity characteristic and forming correction shapes along associated shape edges. SOLUTION: Levels of design data sets including electrical function elements, such as polysilicon gates 14, 16, 18, 20, 22, are selected and inputted. Next, the data sets are sorted to the levels requiring the proximity correction and the levels contributing to the proximity effect but not requiring the proximity correction. The levels requiring the proximity correction are gathered and edge projections 14A, 16A, 18A, 20A, 22A of the first set are formed. The edge projections of the first set are intersected with the design levels to determine the electrical function parameters and the common parts therebetween are gathered. Next, the common parts are sorted by their proximity correction characteristics and the sorted common parts are fabricated within the final proximity correction photomask shapes.

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