Porous dielectric material and method for manufacturing therefor
    4.
    发明专利
    Porous dielectric material and method for manufacturing therefor 有权
    多孔电介质材料及其制造方法

    公开(公告)号:JP2009120843A

    公开(公告)日:2009-06-04

    申请号:JP2008329614

    申请日:2008-12-25

    CPC classification number: H01L21/316 C08J3/24 H01L21/312

    Abstract: PROBLEM TO BE SOLVED: To provide a porous dielectric material used in electronic devices such as integrated circuits. SOLUTION: Crosslinked particles are manufactured by activating crosslinkable groups in synthetic polymer molecules. The crosslinkable groups are inert until activated and, when activated, undergo an irreversible intramolecular crosslinking reaction to form crosslinked particles. Further, the crosslinked particles are intermolecularly deactivated to the polymer molecules under the crosslinking condition. The crosslinked particles are also intermolecularly deactivated each other under the crosslinking condition. The resultant crosslinked particles having the decomposition temperature lower than that of the host-matrix material is mixed with the host-matrix material, heated up to the decomposition temperature of the crosslinked particle to irreversibly decompose the particles into the porous dielectric material. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供用于诸如集成电路的电子设备中的多孔电介质材料。 解决方案:通过在合成聚合物分子中活化可交联基团来制备交联颗粒。 可交联基团是惰性的,直到活化,并且当被活化时,经历不可逆的分子内交联反应以形成交联颗粒。 此外,交联颗粒在交联条件下与聚合物分子分子失活。 交联颗粒在交联条件下也分子内失活。 将得到的分解温度低于主体 - 基体材料的交联颗粒与主体 - 基体材料混合,加热到交联颗粒的分解温度,以将颗粒不可逆地分解成多孔电介质材料。 版权所有(C)2009,JPO&INPIT

    Porous dielectric material and method for producing the same
    6.
    发明专利
    Porous dielectric material and method for producing the same 有权
    多孔电介质材料及其制造方法

    公开(公告)号:JP2005330495A

    公开(公告)日:2005-12-02

    申请号:JP2005215082

    申请日:2005-07-25

    CPC classification number: H01L21/316 C08J3/24 H01L21/312

    Abstract: PROBLEM TO BE SOLVED: To provide a porous dielectric material applicable to electronic devices such as integrated circuits. SOLUTION: Crosslinked particles are produced by activating the crosslinkable groups on synthetic polymer. The crosslinkable groups are inert until activated and, when activated, undergo an irreversible intramolecular crosslinking reaction to form crosslinked particles. And the crosslinked particles are inert to the polymer molecules in intermolecular crosslinking under crosslinking conditions, and are inert to each other in intermolecular crosslinking under crosslinking conditions. The thus obtained crosslinked particles having a lower decomposition temperature than that of the host matrix material are mixed with the host matrix material, and the compound is heated to the decomposition temperature of the crosslinked particles to decompose the crosslinked particles so as to produce the porous dielectric material. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供可应用于诸如集成电路的电子器件的多孔电介质材料。 解决方案:通过活化合成聚合物上的可交联基团来制备交联颗粒。 可交联基团是惰性的,直到活化,并且当被活化时,经历不可逆的分子内交联反应以形成交联颗粒。 并且交联颗粒在交联条件下在分子间交联中对聚合物分子是惰性的,并且在交联条件下在分子间交联中彼此是惰性的。 将如此获得的具有比主体基质材料低的分解温度的交联颗粒与主体基质材料混合,并将化合物加热至交联颗粒的分解温度以分解交联颗粒,从而产生多孔介电 材料。 版权所有(C)2006,JPO&NCIPI

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