公开(公告)号：EP2404316A4

公开(公告)日：2016-04-06

申请号：EP10770142

申请日：2010-04-22

Applicant: IBM

Inventor： GREENE BRIAN J ,  CHUDZIK MICHAEL P ,  HAN SHU-JEN ,  HENSON WILLIAM K ,  LIANG YUE ,  MACIEJEWSKI EDWARD P ,  NA MYUNG-HEE ,  NOWAK EDWARD J ,  YU XIAOJUN

IPC: H01L21/8234 ,  H01L21/28 ,  H01L21/84 ,  H01L27/12

CPC classification number: H01L21/823462 ,  H01L21/28229 ,  H01L21/84 ,  H01L27/1203

公开(公告)号：JP2005123597A

公开(公告)日：2005-05-12

申请号：JP2004271982

申请日：2004-09-17

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： AJMERA ATUL C ,  BRYANT ANDRES ,  GILBERT PERCY V ,  GRIBELYUK MICHAEL A ,  MACIEJEWSKI EDWARD P ,  MO RENEE T ,  NARASIMHA SHREESH

IPC: H01L21/28 ,  H01L21/311 ,  H01L21/3205 ,  H01L21/336 ,  H01L21/8238 ,  H01L23/52 ,  H01L27/092 ,  H01L29/417 ,  H01L29/423 ,  H01L29/49 ,  H01L29/78

CPC classification number: H01L21/02063 ,  H01L21/31116 ,  H01L21/823835 ,  H01L21/823864 ,  H01L29/665 ,  H01L29/6653 ,  H01L29/6656 ,  H01L2924/0002 ,  H01L2924/00

Abstract: PROBLEM TO BE SOLVED: To provide a method of forming a gate electrode that avoids dielectric layer undercut during a silicide precleaning step. SOLUTION: A patterned gate stack includes a gate dielectric below a conductor having vertical sidewalls, and a dielectric layer is formed over the patterned gate stack and substrate surfaces. Nitride spacers are formed overlying the dielectric layer at each vertical sidewall. The dielectric layer on the substrate surface is removed using an etch process such that a portion of the dielectric layer underlying each spacer remains. Then, a nitride layer is deposited over the entire sample and subsequently removed by an etch process such that only a portion of the nitride film ("plug") remains. The plug seals and encapsulates the dielectric layer underlying the each spacer, thus preventing the dielectric material from being undercut during the subsequent silicide precleaning process. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种在硅化物预清洗步骤期间形成避免电介质层底切的栅电极的方法。 解决方案：图案化栅极堆叠包括在具有垂直侧壁的导体下方的栅极电介质，并且在图案化的栅极堆叠和衬底表面上形成介电层。 在每个垂直侧壁处形成覆盖电介质层的氮化物间隔物。 使用蚀刻工艺去除衬底表面上的电介质层，使得每个间隔物下面的电介质层的一部分保留。 然后，在整个样品上沉积氮化物层，然后通过蚀刻工艺去除，使得只有一部分氮化膜（“插塞”）保留。 塞子密封并封装每个间隔物下面的电介质层，从而防止在随后的硅化物预清洗过程中电介质材料被切下。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2000101093A

公开(公告)日：2000-04-07

申请号：JP24211799

申请日：1999-08-27

Applicant: IBM

Inventor： BRYANT ANDRES ,  CLARK WILLIAM F ,  ELLIS-MONAGHAN JOHN J ,  MACIEJEWSKI EDWARD P ,  EDWARD J NOWACK ,  WILBUR D PRISER ,  MIN H TONG

IPC: H01L27/06 ,  H01L21/8234 ,  H01L27/12 ,  H01L29/78 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To provide a device structure of SOI(silicon on isulator) CMOS (complementary metal oxide semiconductor) in which avalanche multiplication of current flowing through a device is increased when an FET(field effect transistor) is turned on and body charges are removed when the FET is turned off. SOLUTION: An FET having an electric floating body is substantially isolated electrically from a substrate. A high resistance path 16 for coupling the floating body is provided at the source. The resistor is operated as a floating body for active switching and a body grounded in waiting mode in order to reduce leakage current. The high resistance path has a resistance of at least 1 MΩ and made of polysilicon. The resistor is formed using a split polysilicon process for opening a hole in a first polysilicon layer in order that an embedded contact mask 19 brings a second polysilicon layer into contact with the substrate.

公开(公告)号：HK1026064A1

公开(公告)日：2000-12-01

申请号：HK00105169

申请日：2000-08-17

Applicant: IBM

Inventor： BRYANT ANDRES ,  CLARK WILLIAM F ,  ELLIS-MONAGHAN JOHN J ,  MACIEJEWSKI EDWARD P ,  NOWAK EDWARD J ,  PRICER WILBUR D ,  TONG MINH H

IPC: H01L27/06 ,  H01L21/8234 ,  H01L27/12 ,  H01L29/78 ,  H01L29/786 ,  H01L

Abstract: A device design for an FET in SOI CMOS which is designed for enhanced avalanche multiplication of current through the device when the FET is on, and to remove the body charge when the FET is off. The FET has an electrically floating body and is substantially electrically isolated from the substrate. The present invention provides a high resistance path coupling the floating body of the FET to the source of the FET, such that the resistor enables the device to act as a floating body for active switching purposes and as a grounded body in a standby mode to reduce leakage current. The high resistance path has a resistance of at least 1 M-ohm, and comprises a polysilicon resistor which is fabricated by using a split polysilicon process in which a buried contact mask opens a hole in a first polysilicon layer to allow a second polysilicon layer to contact the substrate.

公开(公告)号：SG174853A1

公开(公告)日：2011-11-28

申请号：SG2011057296

申请日：2010-04-22

Applicant: IBM

Inventor： GREENE BRIAN J ,  CHUDZIK MICHAEL P ,  HAN SHU-JEN ,  HENSON WILLIAM K ,  LIANG YUE ,  MACIEJEWSKI EDWARD P ,  NA MYUNG-HEE ,  NOWAK EDWARD J ,  YU XIAOJUN

Abstract: Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.

公开(公告)号：BRPI1007604A2

公开(公告)日：2016-02-16

申请号：BRPI1007604

申请日：2010-04-22

Applicant: IBM

Inventor： GREENE BRIAN J ,  NOWAK EDWARD J ,  MACIEJEWSKI EDWARD P ,  CHUDZIK MICHAEL P ,  NA MYUNG-HEE ,  HAN SHU-JEN ,  HENSON WILLIAM K ,  YU XIAOJUN ,  LIANG YUE

IPC: H01L21/283 ,  H01L29/49

公开(公告)号：CA2750215A1

公开(公告)日：2010-11-04

申请号：CA2750215

申请日：2010-04-22

Applicant: IBM

Inventor： GREENE BRIAN J ,  CHUDZIK MICHAEL P ,  HAN SHU-JEN ,  HENSON WILLIAM K ,  LIANG YUE ,  MACIEJEWSKI EDWARD P ,  NA MYUNG-HEE ,  NOWAK EDWARD J ,  YU XIAOJUN

IPC: H01L21/71 ,  H01L21/77 ,  H01L27/085 ,  H01L27/098

Abstract: Multiple types of gate stacks (100,..., 600) are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric (30L) is formed on the doped semiconductor well (22, 24). A metal gate layer (42L) is formed in one device area, while the high-k gate dielectric is exposed in other device areas (200, 400, 500, 600). Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer (72L) is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.

公开(公告)号：MY117189A

公开(公告)日：2004-05-31

申请号：MYPI9903633

申请日：1999-08-25

Applicant: IBM

Inventor： BRYANT ANDRES ,  CLARK WILLIAM F ,  ELLIS-MONAGHAN JOHN J ,  MACIEJEWSKI EDWARD P ,  NOWAK EDWARD J ,  PRICER WILBUR DAVID ,  TONG MINH H

IPC: H01L27/06 ,  H01L29/76 ,  H01L21/00 ,  H01L21/8234 ,  H01L27/12 ,  H01L29/78 ,  H01L29/786 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113

Abstract: A DEVICE DESIGN FOR AN FET IN SOL CMOS WHICH IS DESIGNED FOR ENHANCED AVALANCHE MULTIPLICATION OF CURRENT THROUGH THE DEVICE WHEN THE FET IS ON, AND TO REMOVE THE BODY CHARGE WHEN THE FET IS OFF. THE FET HAS AN ELECTRICALLY FLOATING BODY AND IS SUBSTATIALLY ELECTRICALLY ISOLATED FROM THE SUBSTRATE. THE PRESENT INVENTION PROVIDES A HIGH RESISTANCE PATH COUPLING THE FLOATING BODY OF THE FET TO THE SOURCE OF THE FET, SUCH THAT THE RESISTOR ENABLES THE DEVICE TO ACT AS A FLOATING BODY FOR ACTIVE SWITCHING PURPOSES AND AS A GROUNDED BODY IN A STANDBY MODE TO REDUCE LEAKAGE CURRENT. THE HIGH RESISTANCE PATH HAS A RESISTANCE OF AT LEAST 1 M-OHM, AND COMPRISES A POLYSILICON RESISTOR WHICH IS FABRICATED BY USING A SPLIT POLYSILICON PROCESS IN WHICH A BURIED CONTACT MASK OPENS A HOLE IN A FIRST POLYSILICON LAYER TO ALLOW A SECOND POLYSILICON LAYER TO CONTACT THE SUBSTRATE. (FIGURE 1)