公开(公告)号：GB2627899B

公开(公告)日：2025-02-12

申请号：GB202408555

申请日：2022-09-04

Applicant: IBM

Inventor： AKIHIRO HORIBE ,  QIANWEN CHEN ,  RISA MIYAZAWA ,  MICHAEL BELYANSKY ,  JOHN KNICKERBOCKER ,  TAKASHI HISADA

IPC: H01L21/683

Abstract: Handler wafers and methods of handling a wafer include positioning a handler, which is attached to a wafer by a bonding layer that comprises a debonding layer, an optical enhancement layer, and an anti-reflection layer. The handler is debonded from the wafer using a laser that emits laser energy at a wavelength that is absorbed by the debonding layer and that is confined to the debonding layer by the optical enhancement layer, such that the material of the debonding layer ablates when exposed to the laser energy to release the wafer.

公开(公告)号：GB2603839A

公开(公告)日：2022-08-17

申请号：GB202117435

申请日：2021-12-02

Applicant: IBM

Inventor： QIANWEN CHEN ,  JAE-WOONG NAH ,  BING DANG ,  LEANNA PANCOAST ,  JOHN KNICKERBOCKER

IPC: H01M10/04 ,  H01M6/40 ,  H01M10/0585 ,  H01M50/119

Abstract: A microbattery includes a first micro-battery device including a substrate 102 having a metal anode via 104 and a metal cathode via 104. A battery element 112 formed on the substrate includes a cathode current collector 114 electrically connected to a cathode through the metal cathode via and an anode current collector 106 electrically connected to an anode 110 through the metal anode via. A metal sealing layer 124 is formed on at least sidewall surfaces of the battery element and is electrically connected to the cathode. A method of forming a microbattery device involves forming a metal anode via and a metal cathode via in a substrate, forming a metal layer 108 on a bottom side of the substrate, forming a battery element on a top side of the substrate, forming an encapsulation layer 116 around the battery element, forming trenches (150, Figure 1F) through the encapsulation layer and the substrate on different sides of the battery element, and forming a metal sealing layer in the trenches to cover at least sidewall surfaces of the battery element. The metal sealing layer is electrically connected to the battery element through the metal layer and the metal cathode via.