公开(公告)号：JP2000280166A

公开(公告)日：2000-10-10

申请号：JP2000078478

申请日：2000-03-21

Applicant: INFINEON TECHNOLOGIES CORP

Inventor： LIN CHENTING ,  VAN DEN BERG ROBERT ,  PANDEY SUMIT

IPC: B24B37/04 ,  B24B57/02 ,  H01L21/302 ,  H01L21/304 ,  B24B37/00

Abstract: PROBLEM TO BE SOLVED: To even the distribution of the slurry during the polishing by distributing the slurry from plural positions onto a polishing cloth. SOLUTION: A multi-position slurry dispenser 242 has a discharge pipe, and this discharge pipe has plural outlets 248 formed in the discharge pipe. The discharge pipe can be formed into a cylindrical shape. The discharge pipe is positioned along the radius of a polishing cloth. The slurry is distributed onto the polishing cloth 246 through outlets. The slurry is distributed to various parts of the polishing cloth 246 by having plural outlets, and distribution of the slurry capable of being controlled more for improvement of the CMP process is generated. The multi-position dispenser is optimally used in response to a set of an operation parameter and/or expendable supplies so as to form a slurry profile for generating a desirable polishing characteristic.

公开(公告)号：JP2000243213A

公开(公告)日：2000-09-08

申请号：JP2000046289

申请日：2000-02-23

Applicant: INFINEON TECHNOLOGIES CORP ,  IBM

Inventor： WEBER STEFAN J ,  IGGULDEN ROY ,  NARAYAN CHANDRASEKHAR ,  BRINTZINGER AXEL CHRISTOPH ,  HOINKIS MARK ,  VAN DEN BERG ROBERT

IPC: H01H85/00 ,  H01H69/02 ,  H01L21/82 ,  H01L23/525

Abstract: PROBLEM TO BE SOLVED: To provide a method for shrinking an area for a fuse to occupy on a semiconductor tip, and to adjust a fuse resistance relative to a fuse of a semiconductor device. SOLUTION: A fuse for a semiconductor is formed, so as to have a substrate 12 having a conductive passage disposed on its surface, a dielectric layer 14 disposed on the substrate, and a vertical fuse 110 vertically disposed on the surface. The vertical fuse penetrates through the dielectric layer 14 and is connected to the conductive passage. The vertical fuse also has a hole 108, a liner material is disposed on its vertical surface, and the fuse is cut off with fusing of the liner material along the vertical surface.